Abstract: A substrate drying device includes a reduced pressure enclosure including an airproof door, and an exhaustion device. Inside of the enclosure is caused to be a sealed state when the airproof door is closed. After a substrate to which an application material is applied is received into the reduced pressure enclosure, the airproof door is closed to make inside of the reduced pressure enclosure be an airproof state. Subsequently, inside of the reduced pressure enclosure is exhausted by the exhaustion device to perform for eliminating air bubbles in the application material and drying the application material on the substrates. The exhaustion device may include a reserve tank that has a volume capable of rapidly reducing a pressure of the internal volume of the reduced pressure enclosure to maintain a predetermined negative pressure. A rapid exhaustion of the inside of the reduced pressure enclosure is performed by connecting the reserve tank to the reduced pressure enclosure.

Abstract: An apparatus and method for testing thermal fatigue resistance. The apparatus utilizes a unified heating device and cooling device so that the apparatus is smaller and simpler and a more even temperature distribution can be obtained. The apparatus has at least one gas duct facing the test unit and a device for supplying the duct with a compressed gas flow. A plurality of gas ducts may be used which face plural points on the test unit from plural directions. Thermocouples are placed on several points on the test unit and the temperatures of the points measured. Swift and precise testing of thermal fatigue resistance can be performed by a feedback control of each heating device based on the measured temperature. Thermal strains are caused in certain parts of the test unit due to differences of thermal expansion between members of the test unit.