Abstract: In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions.

Abstract: In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the mirror, for rocking the mirror around an axis on a plane of the fixed frame, the first piezoelectric actuator includes a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to the fixed frame, and the second piezoelectric actuator includes a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to the fixed frame. The optical deflector further includes at least one first crossing bar coupled between one of the first folded portions and one of the second folded portions symmetrically located with respect to the mirror.

Abstract: In an optical deflector including a mirror, a movable ring-shaped frame surrounding the mirror, a pair of torsion bars connected between the mirror and the movable ring-shaped frame and oppositely arranged along a rocking direction of the mirror, a support body surrounding the movable ring-shaped frame, and piezoelectric actuators for rocking the mirror through the torsion bars along the rocking direction, first, second, third and fourth coupling bars are connected between the support body and the movable ring-shaped frame. The first and third coupling bars are oppositely arranged along a first direction obtained by inclining the rocking direction by a first predetermined angle between +30° and +45°, and the second and fourth coupling bars are oppositely arranged along a second direction obtained by inclining the rocking direction by a second predetermined angle between ?30° and ?60°.

Abstract: [Problems to be solved] A physical/chemical sensor that enables reduction of the size of the sensor and formation of arrays of the sensors is provided. The sensor can sense small change of surface stress and can measure mass of fixed specific substance. Also, a measuring method of the specific substance using the sensor is provided. [Means for solving problems] A physical/chemical sensor has a movable membrane (3) having a diaphragm structure provided to form a hollow section (2) between the movable membrane (3) and a light receiving surface of a light receiving element (1), a first piezoelectric membrane (4) that is provided on a front-side surface or a backside surface of the movable membrane (3) and that excites the movable membrane (3), and a second piezoelectric membrane (5) that is provided on the front-side surface or the backside surface of the movable membrane (3) and that senses a voltage caused by oscillation of the movable membrane (3).

Abstract: In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions.

Abstract: In an optical deflector including a mirror, a fixed frame surrounding the mirror, and first and second piezoelectric actuators of a meander-type provided opposite to each other with respect to the mirror, for rocking the mirror around an axis on a plane of the fixed frame, the first piezoelectric actuator includes a plurality of first piezoelectric cantilevers folded at first folded portions and coupled to the fixed frame, and the second piezoelectric actuator includes a plurality of second piezoelectric cantilevers folded at second folded portions and coupled to the fixed frame. The optical deflector further includes at least one first crossing bar coupled between one of the first folded portions and one of the second folded portions symmetrically located with respect to the mirror.

Abstract: In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.

Abstract: An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).

Abstract: In an optical deflector including a mirror, a movable ring-shaped frame surrounding the mirror, a pair of torsion bars connected between the mirror and the movable ring-shaped frame and oppositely arranged along a rocking direction of the mirror, a support body surrounding the movable ring-shaped frame, and piezoelectric actuators for rocking the mirror through the torsion bars along the rocking direction, first, second, third and fourth coupling bars are connected between the support body and the movable ring-shaped frame. The first and third coupling bars are oppositely arranged along a first direction obtained by inclining the rocking direction by a first predetermined angle between +30° and +45°, and the second and fourth coupling bars are oppositely arranged along a second direction obtained by inclining the rocking direction by a second predetermined angle between ?30° and ?60°.

Abstract: In a two-dimensional optical deflector comprising a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators comprising a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).

Abstract: An LED can include a silicon substrate and a pair of electrodes formed inside a horn that is formed on the silicon substrate by anisotropic etching. The LED can include an LED chip mounted inside the horn, the LED chip being electrically connected to the pair of electrodes. A resin mold made of a resin material can be filled in the horn.