Abstract: A torsion tester including a plurality of driving units configured to connect with and rotate three or more input/output shafts of a test body, respectively, and a controller configured to control the plurality of driving units to be driven with one of individually-set rotational frequencies and individually-set torques, respectively.

Abstract: A discharge surface treatment electrode used in discharge surface treatment for forming a wear-resistant film on a treatment target surface of a workpiece by use of the discharge energy of electric discharges caused between the electrode and the workpiece, the film being made of a material of an electrode or a substance obtained by a reaction of the material of the electrode with the discharge energy. The discharge surface treatment electrode is formed by: compression-molding a mixed powder into a green compact, the mixed powder being formed from a powder of a Stellite alloy with an average particle size of 3 ?m or less prepared by use of a jet mill and a powder of a metal with an average particle size of 3 ?m or less manufactured through an atomization process or a chemical process; and subjecting the green compact to heat treatment.

Abstract: A torsion tester including a reaction force unit and a drive unit including a servo motor, a first reduction gear, a shaft transmitting an output force from the first reduction gear, a clutch having an input shaft fixed to the shaft, a second reduction gear decelerating rotation of an output shaft of the clutch, a chuck, and a connection mechanism connecting the chuck with one of the shaft and the second reduction gear, the drive unit configured to switch between a first mode where the clutch is disengaged, and the shaft is connected with the chuck by the connection mechanism and a second mode where the clutch is engaged, and the second reduction gear is connected with the chuck by the connection mechanism.

Abstract: A rotational torsion tester, comprising: a first drive shaft; a second drive shaft; a load applying unit that applies a torsional load to a workpiece; at least one bearing unit including a first bearing unit that supports the load applying unit to be rotatable about a rotation axis; a rotation drive unit having a first electric motor that drives the second drive shaft and the load applying unit to rotate in phase; and a torque sensor that detects the torsional load, wherein the load applying unit comprises: a second electric motor that drives the first drive shaft; the torque sensor is attached to a part at which the first drive shaft is inserted into the shaft part; the torque sensor is disposed between a pair of first bearings; and the torque sensor includes a strain gauge adhered to a narrowed part to detect the torsional load.

Abstract: A torsion tester including a plurality of driving units configured to connect with and rotate three or more input/output shafts of a test body, respectively, and a controller configured to control the plurality of driving units to be driven with one of individually-set rotational frequencies and individually-set torques, respectively.

Abstract: A torsion tester including a reaction force unit and a drive unit including a servo motor, a first reduction gear, a shaft transmitting an output force from the first reduction gear, a clutch having an input shaft fixed to the shaft, a second reduction gear decelerating rotation of an output shaft of the clutch, a chuck, and a connection mechanism connecting the chuck with one of the shaft and the second reduction gear, the drive unit configured to switch between a first mode where the clutch is disengaged, and the shaft is connected with the chuck by the connection mechanism and a second mode where the clutch is engaged, and the second reduction gear is connected with the chuck by the connection mechanism.

Abstract: A rotational torsion tester, comprising: a first drive shaft; a second drive shaft; a load applying unit that applies a torsional load to a workpiece; at least one bearing unit including a first bearing unit that supports the load applying unit to be rotatable about a rotation axis; a rotation drive unit having a first electric motor that drives the second drive shaft and the load applying unit to rotate in phase; and a torque sensor that detects the torsional load, wherein the load applying unit comprises: a second electric motor that drives the first drive shaft; the torque sensor is attached to a part at which the first drive shaft is inserted into the shaft part; the torque sensor is disposed between a pair of first bearings; and the torque sensor includes a strain gauge adhered to a narrowed part to detect the torsional load.

Abstract: A discharge surface treatment electrode used in discharge surface treatment for forming a wear-resistant film on a treatment target surface of a workpiece by use of the discharge energy of electric discharges caused between the electrode and the workpiece, the film being made of a material of an electrode or a substance obtained by a reaction of the material of the electrode with the discharge energy. The discharge surface treatment electrode is formed by: compression-molding a mixed powder into a green compact, the mixed powder being formed from a powder of a Stellite alloy with an average particle size of 3 ?m or less prepared by use of a jet mill and a powder of a metal with an average particle size of 3 ?m or less manufactured through an atomization process or a chemical process; and subjecting the green compact to heat treatment.

Abstract: A wavefront aberration measuring device includes a mask placed in an object plane of a to-be-tested optical system and having a pattern including a pinhole producing a spherical wave and adjoining diffraction gratings each ruled with lines oriented in a direction different from the other; an illumination optical system that illuminates an area of the mask with light emitted from a light source; a light splitter that splits the light from the pattern transmitted through the to-be-tested optical system; an image pickup unit that takes an image of interference fringes produced by the split light, the image being used in measuring wavefront aberration of the to-be-tested optical system; a detector that detects respective light quantities of respective diffracted beams from the respective illuminated diffraction gratings; and a control unit that controls alignment of the illuminated area of the mask and the pattern in accordance with a detection result.

Abstract: A wavefront aberration measuring device includes a mask placed in an object plane of a to-be-tested optical system and having a pattern including a pinhole producing a spherical wave and adjoining diffraction gratings each ruled with lines oriented in a direction different from the other; an illumination optical system that illuminates an area of the mask with light emitted from a light source; a light splitter that splits the light from the pattern transmitted through the to-be-tested optical system; an image pickup unit that takes an image of interference fringes produced by the split light, the image being used in measuring wavefront aberration of the to-be-tested optical system; a detector that detects respective light quantities of respective diffracted beams from the respective illuminated diffraction gratings; and a control unit that controls alignment of the illuminated area of the mask and the pattern in accordance with a detection result.

Abstract: A measuring apparatus for irradiating measuring light and for measuring optical performance of a target optical system includes a barrel for housing the target optical system, the barrel being rotatable around an optical axis of the target optical system, and an illumination optical system for introducing the measuring light into the barrel, the illumination optical system being movable along a direction perpendicular to the optical axis of the target optical system. The measuring apparatus controls an illumination area of the measuring light in the target optical system using a polar coordinate determined by a rotational angle of the barrel and a moving amount of the illumination optical system.

Abstract: A measuring apparatus includes a first measuring system for measuring optical performance of a target optical system using a light splitting optical element, and a second measuring system for measuring optical performance of the optical element.

Abstract: A surface position detection apparatus of this invention includes a position detection section having a plurality of electrodes opposing the object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and object surface.

Abstract: A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device into divided light, wherein one of the divided light beams produces an intermediate image, and light from the intermediate image is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the intermediate image, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on th

Abstract: A measuring apparatus includes a first measuring system for measuring optical performance of a target optical system using a light splitting optical element, and a second measuring system for measuring optical performance of the optical element.

Abstract: A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device into divided light, wherein one of the divided light beams produces an intermediate image, and light from the intermediate image is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the intermediate image, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on th

Abstract: A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device into divided light, wherein one of the divided light beams produces an intermediate image, and light from the intermediate image is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the intermediate image, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on th

Abstract: A measuring apparatus includes a first mask having a pinhole for generating a spherical wave as measuring light, a second mask provided subsequent to the first mask in a light traveling direction, the second mask having a selecting window that allows the measuring light that has passed a target optical system to transmit through the selecting window, and a two-dimensional light divider, located between the first and second masks, for two-dimensionally dividing light, wherein the measuring apparatus calculating optical performance of the target optical system from an interference fringe formed by the measuring light that has passed the selecting window.

Abstract: An alignment method for aligning first and second objects, in an exposure apparatus for transferring a pattern of the first object onto the second object as being coated with a resist, includes a process of producing an alignment offset value related to an alignment mark forming region on the second object, after formation of the resist coating thereon, and a process of aligning the first object with the second object as being coated with the resist, in the exposure apparatus, on the basis of the offset value as produced.

Abstract: A surface position detection apparatus includes a position detection section having a plurality of electrodes opposing an object surface to be measured, and a measurement device for selecting at least one electrode of the plurality of electrodes in accordance with the shape of the object surface, supplying an AC current to the selected electrode, and measuring the current flowing to the electrode, thereby measuring the distance between the electrode and the object surface.