Abstract: The speed and precision in positioning a moving table in the X-axis and Y-axis directions is enhanced dramatically. An X-Y stage apparatus is provided, in which a moving table is supported relative to a stationary base, with slight displacements made possible within the XY plane, and in which a component mounted and placed on the moving table can be positioned within the XY plane. The X-Y stage apparatus includes an elastic hinge that is flexible only in one or two direction among the X-axis, Y-axis, and Z-axis directions, and rigid in directions of the other axes. The moving table is supported relative to the stationary base with slight displacements made possible in the XY plane, using an elastic deformation of each of the elastic hinges in the flexible direction. Furthermore, the moving table can be slightly displaced within the XY plane, using an X-axis linear motor, and a Y-axis linear motor.

Abstract: A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.

Abstract: The speed and precision in positioning a moving table in the X-axis and Y-axis directions is enhanced dramatically. An X-Y stage apparatus is provided, in which a moving table is supported relative to a stationary base, with slight displacements made possible within the XY plane, and in which a component mounted and placed on the moving table can be positioned within the XY plane. The X-Y stage apparatus includes an elastic hinge that is flexible only in one or two direction among the X-axis, Y-axis, and Z-axis directions, and rigid in directions of the other axes. The moving table is supported relative to the stationary base with slight displacements made possible in the XY plane, using an elastic deformation of each of the elastic hinges in the flexible direction. Furthermore, the moving table can be slightly displaced within the XY plane, using an X-axis linear motor, and a Y-axis linear motor.

Abstract: A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.