Abstract: Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.

Abstract: An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

Abstract: An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a ? axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a ? axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

Abstract: A double cone stylus includes a shank and a double cone-shaped tip attached to the tip end of the shank, the double cone-shaped tip being a rotationally symmetric body obtained by rotating a triangle having a base extending along the shank around the shank as the symmetric rotation axis. The double cone stylus allows the shape of an inner wall surface of a measurement object with the inner wall surface retracted from an upper reference plane to be measured from above.

Abstract: A surface roughness measuring unit according to the present invention includes a contact pin unit having a contact pin and a displacement detector, the contact pin being provided so as to project and retract through a through-hole of a skid and scanning and moving along a surface of a work piece, the displacement detector detecting displacement of the contact pin in a direction perpendicular to the work piece surface; a driver moving the contact pin unit forward and backward along the surface of the work piece; and a joint coupling the contact pin unit and the driver to a measurement head holder of a coordinate measuring system. The surface roughness measuring unit further includes a contact detector that detects contact of the skid on the surface of the work piece.

Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.

Abstract: A surface roughness measuring unit according to the present invention includes a contact pin unit having a contact pin and a displacement detector, the contact pin being provided so as to project and retract through a through-hole of a skid and scanning and moving along a surface of a work piece, the displacement detector detecting displacement of the contact pin in a direction perpendicular to the work piece surface; a driver moving the contact pin unit forward and backward along the surface of the work piece; and a joint coupling the contact pin unit and the driver to a measurement head holder of a coordinate measuring system. The surface roughness measuring unit further includes a contact detector that detects contact of the skid on the surface of the work piece.

Abstract: A double cone stylus includes a shank and a double cone-shaped tip attached to the tip end of the shank, the double cone-shaped tip being a rotationally symmetric body obtained by rotating a triangle having a base extending along the shank around the shank as the symmetric rotation axis. The double cone stylus allows the shape of an inner wall surface of a measurement object with the inner wall surface retracted from an upper reference plane to be measured from above.

Abstract: A coordinates measuring head unit is provided, which is compact, inexpensive, and capable of performing high-precision measurements at high speeds, and facilitates, for example, measurements conducted on machine tools or in-situ measurements on transport lines. The head unit includes: drive means (an X-axis drive section, a Y-axis drive section, and a Z-axis drive section), an integrated housing for accommodating the drive means, and fixture means (fixture surface). The drive means allows a probe to be moved by computer numerical control along a plurality of drive axis, which are orthogonal to each other, and abut against a measuring target to measure the dimensions of the measuring target. The fixture means is provided on one of side surfaces of the housing to attach one of the drive means to a support (a support on a stand secured to a base).

Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.

Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.

Abstract: A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.

Abstract: A coordinates measuring head unit is provided, which is compact, inexpensive, and capable of performing high-precision measurements at high speeds, and facilitates, for example, measurements conducted on machine tools or in-situ measurements on transport lines. The head unit includes: drive means (an X-axis drive section, a Y-axis drive section, and a Z-axis drive section), an integrated housing for accommodating the drive means, and fixture means (fixture surface). The drive means allows a probe to be moved by computer numerical control along a plurality of drive axis, which are orthogonal to each other, and abut against a measuring target to measure the dimensions of the measuring target. The fixture means is provided on one of side surfaces of the housing to attach one of the drive means to a support (a support on a stand secured to a base).

Abstract: An optical measuring instrument captures an image of an object to be measured mounted on a table by moving an objective lens relative to the table and measures a dimension of the object based on the captured image of the object. The optical measuring instrument includes a reflective photoelectric sensor provided around the objective lens for detecting the approach of the object to the objective lens, and a collision avoidance unit for avoiding collision of the objective lens with the object when the reflective photoelectric sensor detects the approach of the objective lens to the object.

Abstract: An image measuring instrument includes: a CCD camera having an objective lens; an orientation changer that changes an imaging direction; a movement mechanism that relatively moves the CCD camera and a workpiece for auto-focusing the objective lens; and a position detector for detecting a position of the CCD camera. A calibration method includes: a preparation step for preparing a reference gauge having a sphere of which radius is sized not more than a focus depth of the objective lens, a surface of the sphere defining a reference surface; an orientation-changing step for changing the imaging direction; a focus-adjusting step for focusing the objective lens on the reference surface using the auto-focusing of the movement mechanism; and a position-detecting step for detecting the position information of the imaging unit by the position detector, thereby calibrating the position of the CCD camera.

Abstract: A screw measuring apparatus comprising: an internal-dimension measuring unit for obtaining internal-dimension information Dw of a female screw placed on a coordinate measuring machine when the stylus-tip sphere having the diameter selected according to the pitch of the female screw is butted against the screw groove of the female screw; and an effective-diameter calculating unit for obtaining effective-diameter information De of the female screw from the internal-dimension information Dw obtained by the internal-dimension measuring unit, diameter information 2r of the stylus-tip sphere, and thread angle information ? and pitch information P of the female screw, by using an effective-diameter calculation expression De=Dw+2r×cosec(?/2)?(P/2)×cot(?/2).