Patents by Inventor Masanori Hioki

Masanori Hioki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MARK DETECTING APPARATUS, MARK LEARNING APPARATUS, SUBSTRATE PROCESSING APPARATUS, MARK DETECTING METHOD, AND MANUFACTURING METHOD OF ARTICLE
    Publication number: 20220365454
    Abstract: A mark detecting apparatus includes an imaging unit configured to generate an alignment mark image by imaging of an alignment mark on an object, a detecting unit configured to detect the alignment mark in the alignment mark image, and an adjusting unit configured to adjust a parameter relating to the imaging, based on a learning model generated by learning using the alignment mark image in which the alignment mark could not be detected and a first parameter as the parameter for the imaging of the alignment mark image in which the alignment mark could be detected. The adjusting unit acquires a second parameter as a result of inference processing based on the learning model. The imaging unit performs the imaging in a state where the parameter is adjusted to the second parameter.
    Type: Application
    Filed: May 4, 2022
    Publication date: November 17, 2022
    Inventors: Masashi Yamamoto, Tohru Suzuki, Hisatoshi Neya, Yoshiaki Kurosawa, Shingo Yoneda, Masanori Hioki