Patents by Inventor Masanori Idesawa

Masanori Idesawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of projecting a beam of charged particles
    Patent number: 4112305
    Abstract: Disclosed is a method of projecting on selected areas of a target a variety of charged particles each having a different shape of cross-section. The charged particle projecting method according to this invention is suitable for production of micro-circuits.A microcircuit is formed on a wafer in the form of patchwork by repeatedly exposing a selected area of the wafer to each of a variety of charged particle beams, thus shortening the time involved for production compared with the time which would be taken if a similar microcircuit is produced by blotting selected areas of the wafer with beam spot.
    Type: Grant
    Filed: October 15, 1976
    Date of Patent: September 5, 1978
    Assignee: Rikagaku Kenkyusho
    Inventors: Eiichi Goto, Takashi Soma, Masanori Idesawa