Abstract: A piezoelectric actuator includes, in a first direction in which pressure chambers are arranged side by side, an active portion in which a piezoelectric layer is sandwiched between a first electrode and a second electrode in a first area of a vibration plate corresponding to opposite ends of each pressure chamber and does not include the active portion in a second area of the vibration plate corresponding to a center of the pressure chamber. The vibration plate has, in the first direction, a thick-walled portion with a predetermined thickness in the first area and a thin-walled portion thinner than the thick-walled portion in the second area.

Abstract: when one of two positions in a second direction intersecting the first direction is defined as a first position and the other position is defined as a second position from which the shortest distance to the partition wall is shorter than the shortest distance from the first position to the partition wall, the vibrating plate has a first portion corresponding to the first position and a second portion corresponding to the second position, and a surface of the first portion in the first direction is, in the first direction, closer than a surface of the second portion in the first direction.

Abstract: A liquid ejecting head includes: an actuator including a piezoelectric element and a vibrating plate; and a pressure chamber substrate including a pressure chamber whose volume changes when the vibrating plate deforms, in which 0.35×FR1?FR2<1.00×FR1, where one position in a longitudinal direction of the pressure chamber is a first position, another position closer than the first position to an end of the pressure chamber in the longitudinal direction of the pressure chamber is a second position, bending rigidity of the actuator in the thickness direction at the first position is FR1, and bending rigidity of the actuator in the thickness direction at the second position is FR2.

Abstract: A liquid discharge head including a diaphragm, a pressure chamber substrate that is laminated on the diaphragm, and a piezoelectric element that includes a first active portion and a second active portion, and is laminated on the diaphragm, in which when a direction in which the first active portion and the second active portion are arranged is defined as a second direction when viewed in a lamination direction, and a direction orthogonal to the lamination direction and the second direction is defined as a third direction, and the piezoelectric element includes a first region which is a region in which both the first active portion and the second active portion are provided, and a second region which is a region in which one of the first active portion and the second active portion is provided and the other is not provided.

Abstract: A liquid discharge apparatus includes a diaphragm, a pressure chamber substrate including a partition wall partitioning a pressure chamber communicating with a nozzle discharging liquid, a piezoelectric element including a first active portion that overlaps a center of the pressure chamber and a second active portion that overlaps the pressure chamber at a position closer to an outer edge of the pressure chamber than the first active portion, and a drive signal generation portion that generates a discharge signal for discharging the liquid by being supplied to one of the first active portion and the second active portion and a correction signal that is supplied to the other of the first active portion and the second active portion, in which a potential of the discharge signal changes over time and a potential of the correction signal is constant during a discharge period for discharging the liquid.

Abstract: A liquid discharge apparatus includes a pressure chamber substrate laminated on a first surface of a diaphragm and including a partition wall partitioning a pressure chamber communicating with a nozzle for discharging liquid, a piezoelectric element laminated on a second surface of the diaphragm and including a first active portion that overlaps a center of the pressure chamber when viewed in a thickness direction of the diaphragm and a second active portion that overlaps the pressure chamber at a position closer to an outer edge of the pressure chamber than the first active portion, and a drive signal generation portion that generates a drive signal, and a shrinkage step is executed in which a first period during which a first shrinkage element is supplied to the first active portion and a second period during which a second shrinkage element is supplied to the second active portion overlap.

Abstract: A liquid ejecting head in which a first electrode layer, a piezoelectric layer, and a second electrode layer of a piezoelectric element are laminated, a pressure chamber, which is partitioned by a partition wall, has an elongated shape, in a structure including the diaphragm and the piezoelectric element including an active portion and a non-active portion lateral direction, a first position is a position on an inner side of the active portion when viewed in the thickness direction, a second position is a position on an inner side of the non-active portion and closest to a boundary between the pressure chamber and the partition wall, and EI1/EI2?40, wherein EI1 is a bending rigidity of the active portion at the first position and EI2 is a bending rigidity of the non-active portion at the second position.

Abstract: A liquid ejecting head includes a diaphragm, a first electrode, a piezoelectric layer, and a second electrode in this order in a first direction, and ejects liquid. The second electrode includes a first portion that is next to the piezoelectric layer in the first direction and is electrically conductive. A length in the first direction is defined as a thickness. One position in a second direction intersecting with the first direction is defined as a first position. Another one position is defined as a second position that is closer to an end of the second electrode in the second direction than the first position is. Given the definition, the thickness of the first portion at the second position is less than the thickness of the first portion at the first position.

Abstract: A piezoelectric actuator includes, in a first direction in which pressure chambers are arranged side by side, an active portion in which a piezoelectric layer is sandwiched between a first electrode and a second electrode in a first area of a vibration plate corresponding to opposite ends of each pressure chamber and does not include the active portion in a second area of the vibration plate corresponding to a center of the pressure chamber. The vibration plate has, in the first direction, a thick-walled portion with a predetermined thickness in the first area and a thin-walled portion thinner than the thick-walled portion in the second area.

Abstract: when one of two positions in a second direction intersecting the first direction is defined as a first position and the other position is defined as a second position from which the shortest distance to the partition wall is shorter than the shortest distance from the first position to the partition wall, the vibrating plate has a first portion corresponding to the first position and a second portion corresponding to the second position, and a surface of the first portion in the first direction is, in the first direction, closer than a surface of the second portion in the first direction.

Abstract: A liquid ejecting head includes: an actuator including a piezoelectric element and a vibrating plate; and a pressure chamber substrate including a pressure chamber whose volume changes when the vibrating plate deforms, in which 0.35×FR1?FR2<1.00×FR1, where one position in a longitudinal direction of the pressure chamber is a first position, another position closer than the first position to an end of the pressure chamber in the longitudinal direction of the pressure chamber is a second position, bending rigidity of the actuator in the thickness direction at the first position is FR1, and bending rigidity of the actuator in the thickness direction at the second position is FR2.

Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and the plurality of layers include a compressive film that has compressive stress and a tensile film that has tensile stress. The compressive film and the tensile film are two layers adjacent to each other that have a largest tension difference among the plurality of layers, and an absolute value of the tension difference between the compressive film and the tensile film is 400 [N/m] or smaller.

Abstract: A liquid ejecting head includes a diaphragm, a first electrode, a piezoelectric layer, and a second electrode in this order in a first direction, and ejects liquid. The second electrode includes a first portion that is next to the piezoelectric layer in the first direction and is electrically conductive. A length in the first direction is defined as a thickness. One position in a second direction intersecting with the first direction is defined as a first position. Another one position is defined as a second position that is closer to an end of the second electrode in the second direction than the first position is. Given the definition, the thickness of the first portion at the second position is less than the thickness of the first portion at the first position.

Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and d/D?0.25 is satisfied where D is a thickness of the diaphragm and d is a distance between a neutral axis of the diaphragm and an interface between two adjacent layers in which a tension difference is the largest in the plurality of layers.

Abstract: A liquid ejecting head including a vibration plate that forms a wall surface of a pressure chamber filled with a liquid; and a piezoelectric element that vibrates the vibration plate to eject the liquid in the pressure chamber from nozzles, in which the vibration plate includes a first layer formed of silicon oxide, a second layer formed of zirconium oxide on a side opposite to the pressure chamber when viewed from the first layer, a ratio of a film thickness of the second layer to a film thickness of the first layer is 0.16 or more, and the film thickness of the second layer is 300 nm or more.

Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and the plurality of layers include a compressive film that has compressive stress and a tensile film that has tensile stress. The compressive film and the tensile film are two layers adjacent to each other that have a largest tension difference among the plurality of layers, and an absolute value of the tension difference between the compressive film and the tensile film is 400 [N/m] or smaller.

Abstract: A liquid ejecting head including a diaphragm constituting a portion of a wall surface of a pressure chamber that accommodates a liquid, and a piezoelectric element that vibrates the diaphragm. In the liquid ejecting head, the diaphragm includes a plurality of layers, and d/D?0.25 is satisfied where D is a thickness of the diaphragm and d is a distance between a neutral axis of the diaphragm and an interface between two adjacent layers in which a tension difference is the largest in the plurality of layers.

Abstract: A liquid ejecting head including a vibration plate that forms a wall surface of a pressure chamber filled with a liquid; and a piezoelectric element that vibrates the vibration plate to eject the liquid in the pressure chamber from nozzles, in which the vibration plate includes a first layer formed of silicon oxide, a second layer formed of zirconium oxide on a side opposite to the pressure chamber when viewed from the first layer, a ratio of a film thickness of the second layer to a film thickness of the first layer is 0.16 or more, and the film thickness of the second layer is 300 nm or more.

Abstract: An electronic device includes a plurality of substrates joined together in a stacked state, a space formed in one substrate out of the plurality of substrates, and a movable region configured by one face out of faces bounding the space. The movable region includes a recess indented from a space side to partway along a thickness direction of the movable region. An internal dimension of the recess in a direction perpendicular to a substrate stacking direction is larger than an internal dimension of the space in the direction perpendicular to the substrate stacking direction, and a wall bounding the space in the one substrate, and at least a portion of a bottom face of the recess, are adhered together by an adhesive.

Abstract: A MEMS device includes a protective substrate on which is mounted a driving circuit that drives a piezoelectric actuator and on which is formed an interconnect pattern electrically connected to the driving circuit, and a sealing substrate that includes a first opening and that is bonded to the protective substrate using an adhesive so that part of the interconnect pattern is located between the protective substrate and the sealing substrate. The interconnect pattern includes a connection portion that extends from a bonding region where the protective substrate and the sealing substrate are bonded by the adhesive to the first opening, and that has a connection region electrically connected to the driving circuit. A groove is formed in the connection portion between the connection region and a border between the bonding region and the connection portion.