Abstract: A cutting apparatus for dividing a wafer that is stuck to an adhesive tape in which the adhesive layer is cured by ultraviolet light and that is supported by an annular frame through the adhesive tape, into individual chips, includes: a holding unit having a frame support section that supports the annular frame, and a wafer table that is formed of a transparent body and supports the wafer; a cutting unit including, in a rotatable manner, a cutting blade for cutting the wafer; and an ultraviolet light applying unit that applies ultraviolet light, the ultraviolet light applying unit being disposed facing the cutting blade in such a manner that the wafer table is interposed therebetween. The ultraviolet light applying unit applies ultraviolet light to a region where the wafer is to be cut by the cutting blade, to form a cured region where the adhesive layer is cured.

Abstract: Recessed spaces are formed along a circumferential direction on the front side and the rear side of an axial direction of a cutting blade. At the time of cutting a workpiece, a cutting liquid supplied from a cutting liquid supply nozzle to an outer circumferential part of the cutting blade enters the recessed spaces and is splashed back by an outer circumferential surface, to be supplied to a cutting region of an upper surface of the workpiece. As a result, the cutting liquid can efficiently be made to flow toward and collide against burrs of electrodes, the burrs being generated by cutting, so that the burrs can be separated and removed from the upper surface of the workpiece.

Abstract: Provided is a blade fixture for fixing an annular cutting blade that has an opening portion and is used in a state of being supplied with a cutting liquid to a mount flange including a cylindrical boss portion having a screw thread disposed on an outer peripheral surface thereof. The blade fixture includes an annular nut that has an opening portion into which the boss portion is inserted and has a screw thread disposed on an inner circumferential surface of the opening portion, the screw thread corresponding to the screw thread of the boss portion. The blade fixture further includes a disk-shaped cutting liquid return plate that has an opening portion into which the boss portion is inserted and has an outside diameter larger than that of the nut.