Abstract: A monitoring apparatus for plasma process of the present invention detects the change of conditions of a plasma processing apparatus to omit the defective products in the earlier stage of the process and omits the unnecessary steps to decrease the manufacturing cost. The monitoring apparatus is to monitor the change of conditions of the plasma processing apparatus and comprises a detecting means for detecting power supplied to the plasma processing apparatus, and a detecting means for detecting the change of conditions of the plasma processing apparatus from the change of power detected by the detecting means.

Abstract: The board-writing apparatus of the present invention uses an end-having sheet member as a member for writing and indication. The sheet member is received into a receiving portion by one end thereof being taken up and is taken out for use from the receiving portion as required. The image information on the sheet member is read out by the read-out optical system of the apparatus body by the utilization of the movement of the sheet member into and out of the apparatus. The read-out image information is output as image information by a printer integral with or separate from the apparatus.

Abstract: An image processor includes a light source, a scanner for scanning an original document using the light source, an imager for forming an image on the basis of light reflected from the original document and a light from the light source, a controller having a plurality of electro-mechanical transducer elements arranged in a light path from the light source to the imager, a generator for generating image data, and a driver for driving the controller in accordance with the image data. The driver drives the light controller in accordance with the image data, thereby causing the imager to form an image corresponding to the image data. The light source is adapted for forming an image corresponding to the original document and an image corresponding to the image data.