Abstract: An evacuating valve includes a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump; a valve casing defining a passage connecting the chamber port structure and the pump port structure, and a valve mechanism for opening and closing the chamber port structure. At least two expended parts are formed by expanding an end part of the inside surface of the chamber port structure, and the valve element has a large part capable of being pressed against the valve seat with the sealing member held between the large part and the valve seat, and at least two small parts capable of being fitted in the expanded parts of the chamber port structure.

Abstract: Disclosed is a two-port valve in which a fluid passage between two ports is gradually openable without a rapid flow rate, by stepwise lifting a valve member off a valve sent using two pistons, to open the valve in a phased manner. A cylinder portion 2 for driving a valve member 4 has a first piston 24 through which a valve shaft 11 slidably extends, a sleeve 35 movably disposed in a second pressure chamber 27 to limit an operating stroke of the first piston 24, and a second piston 37 slidably disposed in the sleeve 35 and connected to the shaft 11. In an initial phase of opening of the valve, the pistons 24, 37 acting like a unit are together moved to a position at which the first piston 24 contacts the sleeve 35, to slightly open the valve member 4. Thereafter, the valve member 4 is moved by the second piston 37 to its fully open position.

Abstract: A vacuum regulating valve which is simplified in structure and where the flow rate characteristic in evacuating a vacuum vessel is improved, comprises (i) a main valve 1A of a large size which has: a principal body 4 having two main ports 11, 12 connected to a vacuum vessel 7 and a vacuum pump 8, respectively, a valve seat 14 disposed in a fluid passage connecting the ports 11, 12, a valve element 15 seated on and separated from the valve seat 14, and a shaft 20 extending from the valve element 15; and a valve element operating unit 5 for operating the valve element 15 via the shaft 20, and (ii) a sub valve 2A of a small size similar in structure to the main valve 1A. The sub valve 2A is attached to an outer side surface of a casing 10 of the main valve 1A.

Abstract: A vacuum regulating valve has high controllability, wherein the opening of a valving member can be quickly and accurately controlled by using a small and inexpensive electric motor. In accordance with a signal indicative of a pressure set value and a pressure signal from the pressure sensor, the main controller in the valve control section outputs a signal for setting the opening of the valving member to a motor controller that controls the electric motor, and performs control to cause a pilot fluid to be supplied to a pressure receiving chamber of the piston, thereby causing the piston to move to the position of abutment with the stopper.

Abstract: A vacuum regulating valve includes a valve casing provided with two main ports, a passage connecting the two main ports, a valve seat formed in the passage, a valve element capable of being seated on the valve seat, a valve stem extending from the valve element, and a piston attached to the free end of the valve stem. A valve opening setting unit includes a valve opening setting shaft having a free end held in contact with the back surface of the piston, and a driving mechanism capable of continuously axially moving the valve opening setting shaft to a desired position to set the piston at an operating position corresponding to a desired valve opening.

Abstract: An annular valve seat is formed in a connecting path connecting a first main port and a second main port, a circular flow path wall having a diameter greater than a seat diameter is formed around the valve seat so as to surround the valve seat, a circular outer peripheral wall having a diameter greater than the seat diameter and smaller than a diameter of the flow path wall is formed at a disc-shaped valve member, and a restricted flow path is formed between the flow path wall and the outer peripheral wall when the valve member is fitted in the flow path wall.

Abstract: A vacuum regulating valve is capable of precisely controlling the flow of a fluid so that the flow rate may increase gradually in an initial stage of a valve opening operation. The vacuum regulating valve includes a valve casing having a valve chamber and provided with a first opening connected to a vacuum vessel and a second opening connected to a vacuum pump, a valve seat, a valve element seated on the valve seat, a valve stem connected to the valve element, a bellows sealing the valve stem therein, and a baffle member attached to the back surface of the valve element and surrounding the bellows. The baffle member is formed in an axial length such that the baffle member is able to cover the second opening entirely when the valve element is seated on the valve seat.

Abstract: A vacuum regulating valve has high controllability, wherein the opening of a valving member can be quickly and accurately controlled by using a small and inexpensive electric motor. In accordance with a signal indicative of a pressure set value and a pressure signal from the pressure sensor, the main controller in the valve control section outputs a signal for setting the opening of the valving member to a motor controller that controls the electric motor, and performs control to cause a pilot fluid to be supplied to a pressure receiving chamber of the piston, thereby causing the piston to move to the position of abutment with the stopper.

Abstract: Disclosed is a two-port valve in which a fluid passage between two ports is gradually openable without a rapid flow rate, by stepwise lifting a valve member off a valve sent using two pistons, to open the valve in a phased manner. A cylinder portion 2 for driving a valve member 4 has a first piston 24 through which a valve shaft 11 slidably extends, a sleeve 35 movably disposed in a second pressure chamber 27 to limit an operating stroke of the first piston 24, and a second piston 37 slidably disposed in the sleeve 35 and connected to the shaft 11. In an initial phase of opening of the valve, the pistons 24, 37 acting like a unit are together moved to a position at which the first piston 24 contacts the sleeve 35, to slightly open the valve member 4. Thereafter, the valve member 4 is moved by the second piston 37 to its fully open position.

Abstract: A vacuum regulating valve is capable of precisely controlling the flow of a fluid so that the flow rate may increase gradually in an initial stage of a valve opening operation. The vacuum regulating valve includes a valve casing having a valve chamber and provided with a first opening connected to a vacuum vessel and a second opening connected to a vacuum pump, a valve seat, a valve element seated on the valve seat, a valve stem connected to the valve element, a bellows sealing the valve stem therein, and a baffle member attached to the back surface of the valve element and surrounding the bellows. The baffle member is formed in an axial length such that the baffle member is able to cover the second opening entirely when the valve element is seated on the valve seat.

Abstract: A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure fluid. The maximum outer diameter of the nose is smaller than the inner circumferential diameter of the chamber port. The nose is detached through the chamber port.

Abstract: A vacuum regulating valve includes a valve casing provided with two main ports, a passage connecting the two main ports, a valve seat formed in the passage, a valve element capable of being seated on the valve seat, a valve stem extending from the valve element, and a piston attached to the free end of the valve stem. A valve opening setting unit includes a valve opening setting shaft having a free end held in contact with the back surface of the piston, and a driving mechanism capable of continuously axially moving the valve opening setting shaft to a desired position to set the piston at an operating position corresponding to a desired valve opening.

Abstract: A vacuum regulating valve which is simplified in structure and where the flow rate characteristic in evacuating a vacuum vessel is improved, comprises (i) a main valve 1A of a large size which has: a principal body 4 having two main ports 11, 12 connected to a vacuum vessel 7 and a vacuum pump 8, respectively, a valve seat 14 disposed in a fluid passage connecting the ports 11, 12, a valve element 15 seated on and separated from the valve seat 14, and a shaft 20 extending from the valve element 15; and a valve element operating unit 5 for operating the valve element 15 via the shaft 20, and (ii) a sub valve 2A of a small size similar in structure to the main valve 1A. The sub valve 2A is attached to an outer side surface of a casing 10 of the main valve 1A.

Abstract: An evacuating valve includes: a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump, a valve casing defining a passage connecting the chamber port structure and the pump port structure, and a valve mechanism for opening and closing the chamber port structure. The valve mechanism includes a valve seat placed on an end surface, facing the passage, of the chamber port structure, a valve element capable of moving along an axis of the chamber port structure to close and open the chamber port structure, and a sealing member creating a nonleaking union between the valve seat and the valve element.

Abstract: An annular valve seat is formed in a connecting path connecting a first main port and a second main port, a circular flow path wall having a diameter greater than a seat diameter is formed around the valve seat so as to surround the valve seat, a circular outer peripheral wall having a diameter greater than the seat diameter and smaller than a diameter of the flow path wall is formed at a disc-shaped valve member, and a restricted flow path is formed between the flow path wall and the outer peripheral wall when the valve member is fitted in the flow path wall.

Abstract: A first piston and a second piston are accommodated in a piston chamber of a cylinder. The first piston is connected to a main valve member which opens and closes a main flow passage. The second piston is connected to a second rod having a stopper whose position can be adjusted. Pressure fluid is supplied to the second pressure chamber to move the second piston forward to a position where the stopper abuts against the abutting portion. In this state, pressure fluid is supplied to the first pressure chamber to move the first piston to a position where the first piston abuts against the second piston, thereby opening the main valve member by a stroke of the first piston.

Abstract: A fluid pressure regulator has a program controller, a PID controller, a second PID controller, a drive controller, a solenoid-operated valve for supplying a fluid, a solenoid-operated valve for discharging a fluid, a diaphragm, a main valve, and a pressure sensor. Based on a desired preset value and/or a desired control program inputted from an external source, the fluid pressure regulator regulates the pressure or flow rate of the fluid discharged from a discharge port of the main valve. A detecting mechanism is combined with a controlled object for supplying a controlled variable in the controlled object to the second PID controller through a feedback loop.

Abstract: A first piston and a second piston are accommodated in a piston chamber of a cylinder. The first piston is connected to a main valve member which opens and closes a main flow passage. The second piston is connected to a second rod having a stopper whose position can be adjusted. Pressure fluid is supplied to the second pressure chamber to move the second piston forward to a position where the stopper abuts against the abutting portion. In this state, pressure fluid is supplied to the first pressure chamber to move the first piston to a position where the first piston abuts against the second piston, thereby opening the main valve member by a stroke of the first piston.

Abstract: A chamber port to which a vacuum chamber is connected and a pump port to which a vacuum pump Is connected are formed on a valve body of a vacuum regulating valve. A valve plug includes a plate and a nose which is connected to the plate by screw members, and closes the chamber port by a pressure fluid. The maximum outer diameter of the nose is smaller than the inner circumferential diameter of the chamber port. The nose is detached through the chamber port.

Abstract: A main valve mechanism for opening and closing a main flow path between a first port and a second port has a main valve body, a large-diameter first piston for opening the main valve body, a main pressure operating chamber for driving the first piston, and first spring means for closing the first piston. An auxiliary valve mechanism for opening and closing an auxiliary flow path has an auxiliary valve body, a small-diameter second piston for opening the auxiliary valve body, an auxiliary pressure operating chamber for driving the second piston, and second spring means for closing the second piston. The main pressure operating chamber and the auxiliary pressure operating chamber are connected to each other through a connecting hole. There are such relationships between piston diameters of both the pistons and repulsing forces of both the spring means that the second piston is actuated by lower fluid pressure than the first piston.