Patents by Inventor Masao Nakayama

Masao Nakayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240173976
    Abstract: A piezoelectric element includes a substrate, a first electrode, a thin-film piezoelectric body containing potassium, sodium, and niobium, and a second electrode. When the thin-film piezoelectric body is divided into two equal parts in a film formation direction, a first electrode side is defined as a first region, and a second electrode side is defined as a second region, a value A obtained by dividing a total value of an XRD peak intensity of a (111) plane and an XRD peak intensity of a (011) plane in the first region by a total value of an XRD peak intensity of a (100) plane, the XRD peak intensity of the (111) plane, and the XRD peak intensity of the (011) plane is smaller than a value B obtained by dividing a total value of an XRD peak intensity of a (111) plane and an XRD peak intensity of a (011) plane in the thin-film piezoelectric body by a total value of an XRD peak intensity of a (100) plane, the XRD peak intensity of the (111) plane, and the XRD peak intensity of the (011) plane.
    Type: Application
    Filed: November 22, 2023
    Publication date: May 30, 2024
    Inventors: Tomohiro SAKAI, Masao NAKAYAMA, Kazuya KITADA
  • Patent number: 11938731
    Abstract: A substrate, a diaphragm, and a piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a second layer disposed between the first layer and the piezoelectric actuator, and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer disposed between the second layer and the piezoelectric actuator and containing zirconium as a constituent element, and a fourth layer containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer on a piezoelectric actuator side.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: March 26, 2024
    Assignee: Seiko Epson Corporation
    Inventors: Harunobu Koike, Masao Nakayama, Toshihiro Shimizu, Yasushi Yamazaki, Osamu Tonomura, Tatsuo Sawasaki, Chihiro Nishi
  • Patent number: 11878526
    Abstract: A liquid ejecting head includes a pressure chamber, a vibration plate including a first vibration plate, a second vibration plate, and a third vibration plate, and a piezoelectric actuator, being stacked in this order. A portion where the piezoelectric layer and the third vibration plate are stacked in a first direction on the first vibration plate and the second vibration plate, and a portion where the piezoelectric layer and the third vibration plate are not stacked are provided. One of the first vibration plate and the second vibration plate has a compressive stress and another one of the first vibration plate and the second vibration plate has a tensile stress. A Young's modulus of the third vibration plate is larger than Young's moduli of the first vibration plate and the second vibration plate.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: January 23, 2024
    Assignee: Seiko Epson Corporation
    Inventors: Osamu Tonomura, Masao Nakayama
  • Patent number: 11858270
    Abstract: A liquid ejection head includes: a piezoelectric body; an vibration plate to be vibrated by a drive of the piezoelectric body; and a pressure chamber substrate including a pressure chamber which applies a pressure to a liquid by an vibration of the vibration plate; the pressure chamber substrate, the vibration plate, and the piezoelectric body are laminated in this order; and the vibration plate includes: a first layer containing silicon as a constituent element, a second layer which is disposed between the first layer and the piezoelectric body and which contains as a constituent element, a metal element selected from chromium, titanium, and aluminum, and a third layer which is disposed between the second layer and the piezoelectric body and which contains zirconium as a constituent element.
    Type: Grant
    Filed: May 17, 2021
    Date of Patent: January 2, 2024
    Assignee: Seiko Epson Corporation
    Inventors: Toshihiro Shimizu, Harunobu Koike, Takanori Aimono, Masao Nakayama, Tatsuo Sawasaki, Chihiro Nishi, Noritaka Mochizuki, Yasushi Yamazaki, Osamu Tonomura
  • Publication number: 20230339229
    Abstract: A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.
    Type: Application
    Filed: June 27, 2023
    Publication date: October 26, 2023
    Inventors: Harunobu KOIKE, Tatsuo SAWASAKI, Masao NAKAYAMA, Chihiro NISHI, Toshihiro SHIMIZU, Yasushi YAMAZAKI
  • Publication number: 20230311506
    Abstract: A droplet ejection head includes a nozzle plate having a nozzle, a pressure chamber forming substrate having a pressure chamber, a vibration plate, and a piezoelectric element containing potassium, sodium, and niobium and formed on the vibration plate. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric layer located between the first electrode and the second electrode. A total thickness of the piezoelectric layer, the first electrode, and the second electrode is larger than a thickness of the vibration plate.
    Type: Application
    Filed: March 29, 2023
    Publication date: October 5, 2023
    Inventors: Yasuaki HAMADA, Yasuhiro ITAYAMA, Koji OHASHI, Kazuya KITADA, Yoshiki YANO, Masao NAKAYAMA
  • Patent number: 11766864
    Abstract: A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.
    Type: Grant
    Filed: September 27, 2021
    Date of Patent: September 26, 2023
    Assignee: Seiko Epson Corporation
    Inventors: Harunobu Koike, Tatsuo Sawasaki, Masao Nakayama, Chihiro Nishi, Toshihiro Shimizu, Yasushi Yamazaki
  • Patent number: 11701885
    Abstract: The interface region may include a region in which first intensity is higher than second intensity and in which the first intensity is higher than third intensity, where a degree of orientation of the (?211) crystal face of the second layer is denoted as the first intensity, the degree of orientation of the (?111) crystal face of the second layer is denoted as the second intensity, and the degree of orientation of the (002) crystal face of the second layer is denoted as the third intensity. The surface-layer region may include a region in which the first intensity is higher than the third intensity and in which the second intensity is higher than the third intensity.
    Type: Grant
    Filed: September 27, 2021
    Date of Patent: July 18, 2023
    Assignee: Seiko Epson Corporation
    Inventors: Harunobu Koike, Masao Nakayama, Toshihiro Shimizu, Yasushi Yamazaki
  • Patent number: 11691416
    Abstract: An electric current based on electric charge produced on the piezoelectric body changes by going through a first path, a second path, a third path, and a fourth path in this order. On the first path, the electric current becomes larger as the voltage becomes higher. On the second path, the electric current becomes smaller as the voltage becomes higher. On the third path, the electric current becomes larger as the voltage becomes higher. On the fourth path, the electric current becomes smaller as the voltage becomes higher.
    Type: Grant
    Filed: May 20, 2021
    Date of Patent: July 4, 2023
    Inventors: Yasuaki Hamada, Shunsuke Yoshida, Yasuhiro Itayama, Toshihiro Shimizu, Masao Nakayama
  • Publication number: 20230202173
    Abstract: A piezoelectric substrate includes: a substrate; a first electrode formed on the substrate; and a piezoelectric layer formed on the first electrode and containing potassium, sodium, and niobium. A full width at half maximum of an X-ray intensity peak on a plane (100) of the piezoelectric layer in a Psi axis-direction scan result of an X-ray diffraction measurement in which a surface of the piezoelectric layer is irradiated with X-rays at an angle of 54.74° from a direction perpendicular to the surface is more than 0° and 1.2° or less.
    Type: Application
    Filed: December 21, 2022
    Publication date: June 29, 2023
    Inventors: Yasuaki HAMADA, Tomohiro SAKAI, Toshihiro SHIMIZU, Masao NAKAYAMA
  • Publication number: 20230210011
    Abstract: A piezoelectric element includes: a first electrode; an oxide layer formed on the first electrode; a piezoelectric layer formed on the oxide layer and containing potassium, sodium, and niobium; and a second electrode formed on the piezoelectric layer. When a potential difference of 10 V is applied between the first electrode and the second electrode, a current density of a leak current differs by 10,000 times or more between a case in which the first electrode is set at a high potential and a case in which the second electrode is set at a high potential.
    Type: Application
    Filed: December 21, 2022
    Publication date: June 29, 2023
    Inventors: Yasuaki HAMADA, Tomohiro SAKAI, Toshihiro SHIMIZU, Masao NAKAYAMA
  • Patent number: 11571891
    Abstract: A recording head includes a pressure chamber and a piezoelectric actuator configured to change a volume of the pressure chamber. The piezoelectric actuator includes a vibration plate forming one wall surface of the pressure chamber, a lower electrode formed on the vibration plate, a piezoelectric body formed on the lower electrode, and an upper electrode formed on the piezoelectric body and the vibration plate. When viewed from a ±Z direction orthogonal to the vibration plate, the lower electrode and the piezoelectric body do not overlap a central portion of the pressure chamber, when viewed from the ±Z direction, the lower electrode, the piezoelectric body, and the upper electrode overlap an end portion of the pressure chamber, and when viewed from the ±Z direction, the upper electrode overlaps the central portion of the pressure chamber.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: February 7, 2023
    Inventors: Harunobu Koike, Koji Sumi, Masao Nakayama
  • Patent number: 11565524
    Abstract: A plurality of wall surfaces that constitute inner walls of the pressure compartment includes a surface of the recessed portion and the first wall surface, and an angle formed by the first surface and the first wall surface is greater than 90° and less than 180°.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: January 31, 2023
    Assignee: Seiko Epson Corporation
    Inventors: Takanori Aimono, Eiju Hirai, Masao Nakayama, Junichi Karasawa, Yoshihiro Hokari
  • Publication number: 20220363057
    Abstract: The diaphragm includes a first layer containing silicon as a constituent element, a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a second layer disposed between the first layer and the third layer and containing at least one selected from the group consisting of a metal other than iron, silicon, and zirconium, a metalloid, and a semiconductor, as a constituent element, in the second layer and the third layer, a position with a highest concentration of impurities other than the constituent elements of the second layer and the third layer is in the second layer, a position with a highest concentration of zirconium is in the third layer, and a position with a highest concentration of silicon is in the first layer.
    Type: Application
    Filed: May 10, 2022
    Publication date: November 17, 2022
    Inventors: Harunobu KOIKE, Tatsuo SAWASAKI, Masao NAKAYAMA, Toshihiro SHIMIZU, Chihiro NISHI
  • Publication number: 20220324231
    Abstract: A substrate having a recessed portion, a diaphragm, and a piezoelectric actuator are provided, the diaphragm includes a first layer containing silicon as a constituent element, and a third layer disposed between the first layer and the piezoelectric actuator and containing zirconium as a constituent element, and a laminated side surface of the first layer and the third layer is covered with a moisture-resistant protective film containing at least one selected from the group made of oxide, nitride, metal, and diamond-like carbon.
    Type: Application
    Filed: March 28, 2022
    Publication date: October 13, 2022
    Inventors: Harunobu KOIKE, Tatsuo SAWASAKI, Masao NAKAYAMA, Toshihiro SHIMIZU
  • Publication number: 20220314621
    Abstract: A substrate, a diaphragm, and a piezoelectric actuator are laminated in this order in a first direction, the diaphragm includes a first layer containing silicon as a constituent element, a second layer disposed between the first layer and the piezoelectric actuator, and containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element, and a third layer disposed between the second layer and the piezoelectric actuator and containing zirconium as a constituent element, and a fourth layer containing any one or both of at least one metal element selected from the group made of chromium, titanium, aluminum, tantalum, hafnium, and iridium, and silicon nitride, as a constituent element is provided on the third layer on a piezoelectric actuator side.
    Type: Application
    Filed: March 28, 2022
    Publication date: October 6, 2022
    Inventors: Harunobu KOIKE, Masao NAKAYAMA, Toshihiro SHIMIZU, Yasushi YAMAZAKI, Osamu TONOMURA, Tatsuo SAWASAKI, Chihiro NISHI
  • Publication number: 20220263010
    Abstract: A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.
    Type: Application
    Filed: May 4, 2022
    Publication date: August 18, 2022
    Inventors: Harunobu KOIKE, Takanori AIMONO, Masao NAKAYAMA, Motoki TAKABE, Koji SUMI, Yasuhiro ITAYAMA, Toshihiro SHIMIZU
  • Publication number: 20220242121
    Abstract: A liquid ejecting head includes a pressure chamber, a vibration plate including a first vibration plate, a second vibration plate, and a third vibration plate, and a piezoelectric actuator, being stacked in this order. A portion where the piezoelectric layer and the third vibration plate are stacked in a first direction on the first vibration plate and the second vibration plate, and a portion where the piezoelectric layer and the third vibration plate are not stacked are provided. One of the first vibration plate and the second vibration plate has a compressive stress and another one of the first vibration plate and the second vibration plate has a tensile stress. A Young's modulus of the third vibration plate is larger than Young's moduli of the first vibration plate and the second vibration plate.
    Type: Application
    Filed: January 27, 2022
    Publication date: August 4, 2022
    Inventors: Osamu TONOMURA, Masao NAKAYAMA
  • Patent number: 11331916
    Abstract: A liquid ejecting head including a flow path forming substrate in which a pressure chamber is formed, a diaphragm, and a piezoelectric actuator. The piezoelectric actuator includes an active portion in which a piezoelectric layer is interposed between a first electrode and a second electrode. The active portion, in plan view, overlaps at least a portion of the pressure chamber and is provided so as to extend to an outside of the pressure chamber. The pressure chamber is formed so that, the closer to the piezoelectric actuator in a layered direction of the flow path forming substrate and the diaphragm, a width of the pressure chamber in a direction intersecting the layered direction becomes smaller.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: May 17, 2022
    Inventors: Harunobu Koike, Masao Nakayama, Toshihiro Shimizu
  • Publication number: 20220097374
    Abstract: The interface region may include a region in which first intensity is higher than second intensity and in which the first intensity is higher than third intensity, where a degree of orientation of the (?211) crystal face of the second layer is denoted as the first intensity, the degree of orientation of the (?111) crystal face of the second layer is denoted as the second intensity, and the degree of orientation of the (002) crystal face of the second layer is denoted as the third intensity. The surface-layer region may include a region in which the first intensity is higher than the third intensity and in which the second intensity is higher than the third intensity.
    Type: Application
    Filed: September 27, 2021
    Publication date: March 31, 2022
    Inventors: Harunobu KOIKE, Masao NAKAYAMA, Toshihiro SHIMIZU, Yasushi YAMAZAKI