Patents by Inventor Masao SAIDA

Masao SAIDA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle radiation device
    Patent number: 10840059
    Abstract: The purpose of the present invention is to provide a charged particle radiation device capable of performing appropriate vibration suppression control in accordance with a device condition. To achieve the purpose, proposed is a charged particle radiation device provided with: a sample stage for supporting a sample irradiated with a charged particle beam emitted from a charged particle source; and a vacuum chamber for placing the atmosphere in which the sample is disposed in a vacuum state.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: November 17, 2020
    Assignee: Hitachi High-Tech Corporation
    Inventors: Kentaro Shigeoka, Takanori Kato, Kazuhiro Morita, Motohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Masao Saida
  • Charged Particle Radiation Device
    Publication number: 20190311876
    Abstract: The purpose of the present invention is to provide a charged particle radiation device capable of performing appropriate vibration suppression control in accordance with a device condition. To achieve the purpose, proposed is a charged particle radiation device provided with: a sample stage for supporting a sample irradiated with a charged particle beam emitted from a charged particle source; and a vacuum chamber for placing the atmosphere in which the sample is disposed in a vacuum state.
    Type: Application
    Filed: July 28, 2016
    Publication date: October 10, 2019
    Inventors: Kentaro SHIGEOKA, Takanori KATO, Kazuhiro MORITA, Motohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Masao SAIDA