Abstract: An input tool has: an I/O unit having a digimatic interface; a first signal conversion unit that converts a measurement signal in a signal format according to an HID keyboard protocol capable of being processed by an HID driver; a second signal conversion unit that converts the measurement signal into a signal format according to a virtual serial port protocol capable of being processed by a VCP driver; a conversion controller that makes one of the first signal conversion unit and the second signal conversion unit to convert a signal format of the measurement signal; and a USB communicator having a USB interface that is connectable with a PC, the USB communicator outputting the measurement signal.

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: In profiling control of a contact type probe in which a contact point is moved along a surface of an object to be measured, while being in contact with the object by a constant measurement force F, a contact determination level is provided for detecting a predetermined force smaller than a target measurement force is applied to the contact point, contact determination is performed at the time when force applied to the contact point reaches the contact determination level during approach, and the contact point is shifted from position control to force control for bringing the contact point into contact with the object by the target measurement force. Thereby contact trace is prevented from occurring on the object to be measured without reducing approach speed as much as possible and lowering measurement efficiency.

Abstract: A method of measuring a front surface profile and a back surface profile of a target object includes: mounting the target object in such a posture that a first measuring surface (front surface) is measurable by a probe; first measuring a contour of the target object; measuring the first measuring surface of the target object; reversing the target object; second measuring the contour of the target object with the reversed posture of the target object being maintained; obtaining a measurement position of a second measuring surface by comparison of contour data obtained through the first and second measuring of the contour, the measurement position of the second measuring surface corresponding to a measurement position of the first measuring surface at which the measuring of the first measuring surface is conducted; and measuring a profile of the second measuring surface along the obtained measurement position of the second measuring surface.

Abstract: A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.

Abstract: A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.

Abstract: A method of measuring a front surface profile and a back surface profile of a target object includes: mounting the target object in such a posture that a first measuring surface (front surface) is measurable by a probe; first measuring a contour of the target object; measuring the first measuring surface of the target object; reversing the target object; second measuring the contour of the target object with the reversed posture of the target object being maintained; obtaining a measurement position of a second measuring surface by comparison of contour data obtained through the first and second measuring of the contour, the measurement position of the second measuring surface corresponding to a measurement position of the first measuring surface at which the measuring of the first measuring surface is conducted; and measuring a profile of the second measuring surface along the obtained measurement position of the second measuring surface.

Abstract: A probe straightness measuring method includes: placing a measurement jig having a measurement reference surface with a known profile error on a stage surface of an XY stage so that the measurement reference surface is slanted in a moving direction of the XY stage; measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position of the measurement piece obtained in the measuring, a nominal position of the measurement piece obtained by a calculation and a slant angle of the measurement reference surface.

Abstract: A form measuring mechanism 100 which measures a form of an object 102 to be measured by bringing a probe 124 into direct contact with the object 102, includes a plurality of reference spheres 130a and 130b for calibrating the form of the probe 124, a judging means 154 for judging form abnormal values common in position and size to each other and form abnormal values not common to each other obtained by measuring the reference spheres 130a and 130b, and a notifying means 156 for notifying at least anyone of a contamination or dust adhering state of the probe 124 judged from the common form abnormal values and a worn state and contamination or dust adhering states of the reference spheres 130a and 130b judged from the form abnormal values not common to each other.

Abstract: In profiling control of a contact type probe in which a contact point is moved along a surface of an object to be measured, while being in contact with the object by a constant measurement force F, a contact determination level is provided for detecting a predetermined force smaller than a target measurement force is applied to the contact point, contact determination is performed at the time when force applied to the contact point reaches the contact determination level during approach, and the contact point is shifted from position control to force control for bringing the contact point into contact with the object by the target measurement force. Thereby contact trace is prevented from occurring on the object to be measured without reducing approach speed as much as possible and lowering measurement efficiency.

Abstract: Provided are a measuring section (210) including a vibrating contact-type probe having a measuring force detection circuit (219) which detects a measuring force acting to the contact portion (212); a moving unit (a three-dimensional drive mechanism (300), a vertical movement drive mechanism (220)) that moves the measuring section (210) relative to a workpiece surface (S); and a drive control unit (400) that controls the moving unit based on the magnitude of the measuring force output from the measuring force detection circuit (219).

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: Provided are a measuring section (210) including a vibrating contact-type probe having a measuring force detection circuit (219) which detects a measuring force acting to the contact portion (212); a moving unit (a three-dimensional drive mechanism (300), a vertical movement drive mechanism (220)) that moves the measuring section (210) relative to a workpiece surface (S); and a drive control unit (400) that controls the moving unit based on the magnitude of the measuring force output from the measuring force detection circuit (219).

Abstract: A gage inspecting apparatus includes a jog dial 56A for controlling an amount of displacement of a measuring spindle 22 at a time when the position of the measuring spindle 22 is finely adjusted, and a shuttle ring 56B for controlling the driving direction and driving speed of the measuring spindle 22 at a time when the position of the measuring spindle 22 is roughly adjusted. The relationship between the amount of rotation of the jog dial 56A and the amount of displacement of the measuring spindle 22 can be set in correspondence with a scale interval of the gage.

Abstract: A linear measuring machine is provided, the linear measuring machine having a base (11), a column (12) disposed on the base, a slider (14) elevatable along the column and an elevation driving mechanism (44) including a motor for lifting and lowering the slider. The linear measuring machine further includes a touch-and-back mechanism for driving the elevation driving mechanism in a direction for a probe (13) to move away from a measurement surface of the workpiece after fetching a detection value of a displacement sensor (45) when the probe touches the measurement surface of the workpiece and for stopping the elevation driving mechanism.

Abstract: A gage inspecting apparatus includes a jog dial 56A for controlling an amount of displacement of a measuring spindle 22 at a time when the position of the measuring spindle 22 is finely adjusted, and a shuttle ring 56B for controlling the driving direction and driving speed of the measuring spindle 22 at a time when the position of the measuring spindle 22 is roughly adjusted. The relationship between the amount of rotation of the jog dial 56A and the amount of displacement of the measuring spindle 22 can be set in correspondence with a scale interval of the gage.