Patents by Inventor Masaomi Yamano

Masaomi Yamano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method of semiconductor device
    Publication number: 20070093068
    Abstract: A semiconductor device manufacturing method involves heating up a solution containing sulfuric acid and hydrogen peroxide solution, replenishing the solution with a predetermined quantity of sulfuric acid and a predetermined quantity of hydrogen peroxide solution at a predetermined interval, maintaining a concentration of the sulfuric acid in the solution at a predetermined concentration level or higher, immersing the semiconductor substrate in the solution, and cleaning the semiconductor substrate.
    Type: Application
    Filed: June 5, 2006
    Publication date: April 26, 2007
    Applicant: FUJITSU LIMITED
    Inventors: Junji Oh, Yuka Kase, Masatoshi Osuki, Masaomi Yamano