Abstract: An automatic both sides exposing apparatus 1 is provided, and includes a first exposing mechanism 10 having a first mask and the second exposing mechanism 20 having a second mask; a carrying-in portion 2 and a carrying-out portion 30; an optical system for exposing the substrate; and a first holder A and a second holder B for holding the substrate and delivering the substrate from the first holder A to the second holder B with reversal of sides at a spot located in an interval between the first and second exposing mechanisms where both holders meet each other. Accordingly, a frequency at which the substrate is delivered is minimized, the substrate can be turned over without the reversing mechanism, the substrate can be transferred (and delivered) at good efficiency in limited space and exposed accurately, any inconvenient origin for the substrate may be minimized, and the apparatus is made compact.

Abstract: To provide the automatic both sides exposing apparatus 1 comprising: the first exposing mechanism 10 and the second exposing mechanism 20; a carrying in portion 2 and a carrying out potion 30; an optical system, through which either side of the substrate contacted closely with the mask is exposed; the first holder A and the second holder B, wherein each of the first holder A and the second holder B has a holding means for holding the substrate and the substrate is delivered to the second holder B from the first holder A with reversal of two sides at a spot which is located in an interval of the first exposing mechanism and the second exposing mechanism and where both holders meet each other to provide an automatic both sides exposing apparatus, wherein a frequency that the substrate is delivered is minimized, where the substrate can be turned over without the reversing mechanism, where the substrate can be transferred (and delivered) at good efficiency in limited space, and exposed accurately, further any inc