Patents by Inventor Masaru Itoo

Masaru Itoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of optical lithography with super resolution and projection printing apparatus
    Patent number: 5436114
    Abstract: It is possible to improve the resolution of a formed pattern by utilizing anti-dissolution surface treatment of a photoresist layer and super resolution of an optical system, thereby to print a finer pattern having a narrower width than that of the resolving power determined by the wavelength of light used and the numerical aperture of a projection optical system, and patterning in the order of submicron is made possible easily when applied to a printing technique in a manufacturing process of semiconductor integrated circuits.
    Type: Grant
    Filed: February 3, 1993
    Date of Patent: July 25, 1995
    Assignees: Hitachi, Ltd., Hitachi Maxell, Ltd.
    Inventors: Masaru Itoo, Masumi Fujita