Abstract: A method of manufacturing a piezoelectric vibrator comprises forming a gettering metal film on a surface of a piezoelectric vibrator piece and forming a frequency-adjusting weight, separate from the gettering metal film, on the piezoelectric vibrator piece. The piezoelectric vibrator piece is then placed in a hermetic container after which the hermetic container is hermetically sealed. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the frequency-adjusting weight to adjust the frequency of vibration of the piezoelectric vibrator piece.

Abstract: A piezoelectric vibrator has an airtight terminal including leads each having a plane portion. A vibrating piece includes a first part having a preselected thickness and a second part having a thickness smaller than the preselected thickness. The plane portion of each of the leads is connected to the second part of the vibrating piece. A case covers a periphery of the vibrating piece and is sealed on an outer circumference of the airtight terminal.

Abstract: A method of manufacturing a piezoelectric vibrator comprises providing a piezoelectric vibrator piece inside a hermetic container. A gettering metal film is formed inside the hermetic container on an inner surface of the container or on a surface of the piezoelectric vibrator piece, and a weight is formed separate from the metal film on the piezoelectric vibrator piece. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the weight to adjust the frequency of vibration of the piezoelectric vibrator piece.

Abstract: A small piezoelectric vibrator having low equivalent series resistance is realized. In the piezoelectric vibrator of the invention, a gettering substance for gettering inner gas is provided in a sealed space formed by a hermetic container where a piezoelectric vibrator piece is arranged. The gettering substance is formed on a surface of the piezoelectric vibrator piece or an inside wall of the hermetic container. A manufacturing process for the piezoelectric vibrator includes a process in which the gettering substance is provided inside the hermetic container which contains the piezoelectric vibrator piece inside the hermetic container, a process in which the hermetic container is hermetic-sealed so that the piezoelectric vibrator piece is sealed in the hermetic container, and a process in which the gettering substance is heated by a laser beam from outside to perform gettering of the inner gas of the hermetic container.

Abstract: There is provided a piezoelectric vibrator which achieves the stabilization of the vibrating characteristics by improving the mount accuracy and mount strength to lead of the vibrating piece as well as be more miniaturized without damaging the electrical insulation. A piezoelectric vibrator includes an airtight terminal having two leads, a vibrating piece connected to the lead and a case covering a periphery of the vibrating piece and sealed on an outer circumference of the airtight terminal, wherein a level difference is provided in a mount part of the vibrating piece fixed to the lead. Accordingly, the mount position of the vibrating piece approaches the center of the case, and the large clearance between the case and the vibrating piece can be obtained as well as there is obtained the distance between the lead and the case.

Abstract: A small piezoelectric vibrator having low equivalent series resistance is realized. In the piezoelectric vibrator of the invention, a gettering substance for gettering inner gas is provided in a sealed space formed by a hermetic container where a piezoelectric vibrator piece is arranged. The gettering substance is formed on a surface of the piezoelectric vibrator piece or an inside wall of the hermetic container. A manufacturing process for the piezoelectric vibrator includes a process in which the gettering substance is provided inside the hermetic container which contains the piezoelectric vibrator-piece inside the hermetic container, a process in which the hermetic container is hermetic-sealed so that the piezoelectric vibrator piece is sealed in the hermetic container, and a process in which the gettering substance is heated by a laser beam from outside to perform gettering of the inner gas of the hermetic container.

Abstract: A piezoelectric vibrator has a container having a hermetically sealed cavity and a transparent portion for transmitting therethough a laser beam into the hermetically sealed cavity. A piezoelectric vibrator piece is disposed in the hermetically sealed cavity. A gettering substance is disposed directly on a surface of the piezoelectric vibrator piece so that when a laser beam is irradiated on the metal film through the transparent portion of the container the metal film is vaporized to absorb any gases contained in the hermetically sealed cavity of the container to thereby increase a degree of vacuum within the hermetically sealed cavity.

Abstract: A piezoelectric vibrator has a piezoelectric vibrating piece having a base portion, a free end, and an intermediate portion disposed therebetween. Each of a pair of covers has a main surface and at least two recesses formed in the main surface. The covers are connected together so that the recesses of the covers form a hermetically sealed cavity into which the piezoelectric vibrating piece of the piezoelectric vibrating plate extends in a state in which the piezoelectric vibrating piece is capable of undergoing oscillating movement. The recesses of each of the covers extend to different depths from the main surface thereof so that during oscillating movement of the piezoelectric vibrating piece, the free end of the piezoelectric vibrating piece is prevented from contacting any one of the covers by contact between the intermediate portion of the piezoelectric vibrating piece and the main surface of the one cover.

Abstract: A small piezoelectric vibrator having low equivalent series resistance is realized. In the piezoelectric vibrator of the invention, a gettering substance for gettering inner gas is provided in a sealed space formed by a hermetic container where a piezoelectric vibrator piece is arranged. The gettering substance is formed on a surface of the piezoelectric vibrator piece or an inside wall of the hermetic container. A manufacturing process for the piezoelectric vibrator includes a process in which the gettering substance is provided inside the hermetic container which contains the piezoelectric vibrator piece inside the hermetic container, a process in which the hermetic container is hermetic-sealed so that the piezoelectric vibrator piece is sealed in the hermetic container, and a process in which the gettering substance is heated by a laser beam from outside to perform gettering of the inner gas of the hermetic container.

Abstract: A piezoelectric vibrator of a high impact resistance is attained. The piezoelectric vibrator according to the present invention has a piezoelectric vibrating plate formed so that a vibrating portion thereof be integral with a frame, and covers disposed on upper and lower surfaces of the frame and sealing the piezoelectric vibrating plate air-tightly. The covers have first recesses in the sections thereof which are opposed to such a section of the vibrating member that is between a base section thereof and a free end section thereof and have spaces between inner surfaces of the same recesses and a surface of the vibrating member, and second recesses having in the vicinity of the free end a space of a width greater than a distance between the first recesses and vibrating member.