Abstract: A sensor detection error at a joint of a robot arm is correctly detected. A joint structure that joins links and of a robot arm includes a sensor for determining force acting between the links. A driving apparatus that generates a driving force of a joint includes first and second driving parts. A constraining part that constrains the joint movable in a driving direction of the joint and be unmovable in another direction includes first and second supporting parts that are movable relative to each other in the driving direction of the joint. The driving part of the driving apparatus is fixed to the link, and the supporting part of the constraining part is fixed to the link. Also, the supporting part of the constraining part is fixed to the driving part of the driving apparatus. The sensor is fixed so as to link the supporting part and the link.

Abstract: A sensor detection error at a joint of a robot arm is correctly detected. A joint structure that joins links and of a robot arm includes a sensor for determining force acting between the links. A driving apparatus that generates a driving force of a joint includes first and second driving parts. A constraining part that constrains the joint movable in a driving direction of the joint and be unmovable in another direction includes first and second supporting parts that are movable relative to each other in the driving direction of the joint. The driving part of the driving apparatus is fixed to the link, and the supporting part of the constraining part is fixed to the link. Also, the supporting part of the constraining part is fixed to the driving part of the driving apparatus. The sensor is fixed so as to link the supporting part and the link.

Abstract: A robot includes a first link, a driving device configured to cause the first link to rotate, a transmission member configured to transmit a rotation of the driving device, a first stopper provided on the first link, and a second stopper provided on the transmission member, wherein the first stopper and the second stopper are brought into contact with each other by a relative movement between the first link and the transmission member.

Abstract: A method of controlling a robot having a plurality of joints includes measuring load torque applied to a driving-force transmission system of each of the plurality of joints while moving a hand of the robot along a predetermined path, comparing a measurement value of the load torque and an allowable range of each of the joints, and controlling a rate of change in acceleration of the driving-force transmission system of each of the joints, depending on a comparison result, in a next operation in which the hand of the robot is moved along the predetermined path.

Abstract: A sensor detection error at a joint of a robot arm is correctly detected. A joint structure that joins links and of a robot arm includes a sensor for determining force acting between the links. A driving apparatus that generates a driving force of a joint includes first and second driving parts. A constraining part that constrains the joint movable in a driving direction of the joint and be unmovable in another direction includes first and second supporting parts that are movable relative to each other in the driving direction of the joint. The driving part of the driving apparatus is fixed to the link, and the supporting part of the constraining part is fixed to the link. Also, the supporting part of the constraining part is fixed to the driving part of the driving apparatus. The sensor is fixed so as to link the supporting part and the link.

Abstract: A sensor detection error at a joint of a robot arm is correctly detected. A joint structure that joins links and of a robot arm includes a sensor for determining force acting between the links. A driving apparatus that generates a driving force of a joint includes first and second driving parts. A constraining part that constrains the joint movable in a driving direction of the joint and be unmovable in another direction includes first and second supporting parts that are movable relative to each other in the driving direction of the joint. The driving part of the driving apparatus is fixed to the link, and the supporting part of the constraining part is fixed to the link. Also, the supporting part of the constraining part is fixed to the driving part of the driving apparatus. The sensor is fixed so as to link the supporting part and the link.

Abstract: A driving mechanism includes a first link, a second link that relatively swings or rotates with respect to the first link, a driving portion that is supported by the first link and that applies a driving force for driving the second link, a sensor that is disposed between the driving portion and the second link and that outputs displacements of the driving portion and the second link, and a wiring member that is supported by the first link, the second link, and the driving portion.

Abstract: A displacement measurement device includes a first structure, a second structure, and a coupling portion configured to couple the first structure with the second structure. The first structure includes a first sensor configured to generate an electrical signal corresponding to displacement between a first attachment portion of the first structure and a second attachment portion of the second structure in the at least one first direction. The second structure includes a second sensor configured to generate an electrical signal corresponding to displacement between the first attachment portion and the second attachment portion in the at least one second direction.

Abstract: A method of controlling a robot having a plurality of joints includes measuring load torque applied to a driving-force transmission system of each of the plurality of joints while moving a hand of the robot along a predetermined path, comparing a measurement value of the load torque and an allowable range of each of the joints, and controlling a rate of change in acceleration of the driving-force transmission system of each of the joints, depending on a comparison result, in a next operation in which the hand of the robot is moved along the predetermined path.

Abstract: The present invention allows a joint driving apparatus of a robot apparatus to measure joint driving torque with high accuracy and perform joint torque control accurately and reliably using a simple, inexpensive, small, lightweight and sturdy configuration without being affected by cross-axis disturbance forces. A joint driving apparatus includes a housing unit fixed to a first link; a bearing mounted in the housing unit and adapted to rotatably support a second link; a driving unit housed in the housing unit and adapted to rotationally drive the second link; a supporting unit installed between the driving unit and the housing unit and adapted to support the driving unit on the housing unit; and a sensor adapted to detect torque generated on the supporting unit.

Abstract: A driving mechanism includes a first link, a second link that relatively swings or rotates with respect to the first link, a driving portion that is supported by the first link and that applies a driving force for driving the second link, a sensor that is disposed between the driving portion and the second link and that outputs displacements of the driving portion and the second link, and a wiring member that is supported by the first link, the second link, and the driving portion.

Abstract: A displacement measurement device includes a first structure, a second structure, and a coupling portion configured to couple the first structure with the second structure. The first structure includes a first sensor configured to generate an electrical signal corresponding to displacement between a first attachment portion of the first structure and a second attachment portion of the second structure in the at least one first direction. The second structure includes a second sensor configured to generate an electrical signal corresponding to displacement between the first attachment portion and the second attachment portion in the at least one second direction.

Abstract: A sensor detection error at a joint of a robot arm is correctly detected. A joint structure that joins links and of a robot arm includes a sensor for determining force acting between the links. A driving apparatus that generates a driving force of a joint includes first and second driving parts. A constraining part that constrains the joint movable in a driving direction of the joint and be unmovable in another direction includes first and second supporting parts that are movable relative to each other in the driving direction of the joint. The driving part of the driving apparatus is fixed to the link, and the supporting part of the constraining part is fixed to the link. Also, the supporting part of the constraining part is fixed to the driving part of the driving apparatus. The sensor is fixed so as to link the supporting part and the link.

Abstract: The present invention allows a joint driving apparatus of a robot apparatus to measure joint driving torque with high accuracy and perform joint torque control accurately and reliably using a simple, inexpensive, small, lightweight and sturdy configuration without being affected by cross-axis disturbance forces. A joint driving apparatus includes a housing unit fixed to a first link; a bearing mounted in the housing unit and adapted to rotatably support a second link; a driving unit housed in the housing unit and adapted to rotationally drive the second link; a supporting unit installed between the driving unit and the housing unit and adapted to support the driving unit on the housing unit; and a sensor adapted to detect torque generated on the supporting unit.

Abstract: A robot apparatus comprises: a robot body having a multi joint arm including a plurality of joints; a motor provided as a driving source of at least a part of the plurality of joints; and a controlling system capable of controlling the motor. The controlling system comprises a motion controlling unit configured to input a current to the motor to rotate the motor, a heat generation controlling unit configured to input the current to the motor to generate heat, without rotating the motor, and a controlling unit configured to calculate a temperature raising current necessary to rise up to a predetermined temperature without rotating the motor, to generate a current instruction for temperature raising to set the heat generation controlling unit to output the temperature raising current, and to transmit the current instruction for temperature raising to the heat generation controlling unit at stopping the robot body.

Abstract: A robot apparatus comprises: a robot body having a multi joint arm including a plurality of joints; a motor provided as a driving source of at least a part of the plurality of joints; and a controlling system capable of controlling the motor. The controlling system comprises a motion controlling unit configured to input a current to the motor to rotate the motor, a heat generation controlling unit configured to input the current to the motor to generate heat, without rotating the motor, and a controlling unit configured to calculate a temperature raising current necessary to rise up to a predetermined temperature without rotating the motor, to generate a current instruction for temperature raising to set the heat generation controlling unit to output the temperature raising current, and to transmit the current instruction for temperature raising to the heat generation controlling unit at stopping the robot body.

Abstract: An exposure apparatus for illuminating a reticle with exposing light from an exposing light source via a light-source lens system, and projecting a pattern, which has been formed on the reticle, onto a wafer via a projection lens system, thereby exposing the wafer to the pattern. The apparatus includes vessels for hermetically sealing the light-source lens system and the projection lens system disposed on the optical path of the exposing light from the exposing light source to the reticle, a gas supply unit for supplying the vessels with a specific gas, a vacuum source for evacuating the interior of the vessels, a vacuum-pressure controller for exercising control to hold the internal pressure of the vessels constant, and an escape valve for reducing the differential pressure between the internal pressure of the vessels and atmospheric pressure to a value below a predetermined pressure.

Abstract: Disclosed is an exposure apparatus for illuminating a reticle with exposing light from an exposing light source via a light-source lens system constituting illumination optics, and projecting a pattern, which has been formed on the reticle, onto a wafer via a projection lens system constituting projection optics, thereby exposing the wafer to the patter. The apparatus includes vessels for hermetically sealing the light-source lens system and the projection lens system disposed on the optical path of the exposing light from the exposing light source to the reticle, means for supplying the vessels with a specific gas, a vacuum source for evacuating the interior of the vessels, a vacuum-pressure controller for exercising control to hold the internal pressure of the vessels constant, and an escape valve for reducing the differential pressure between the internal pressure of the vessels and atmospheric pressure to a value below a predetermined pressure.

Abstract: Glass fiber non-woven fabric for base material of laminate comprising binder binding glass fibers to each other and having glass transition temperature of higher than 120.degree. C.

Abstract: A method and apparatus for producing a hydrogen adsorption alloy, the apparatus comprising a high speed ball mill in the form of a planetary ball mill mounted to a rotatable main shaft, wherein the planetary ball mill includes a plurality of mill pots each mounted for rotation on its own axis, a planetary gear disposed on the periphery of each mill pot, a fixed sun gear meshing with the planetary gears, and an atmosphere adjusting device connected to each mill pot. A drive rotates the main shaft causing each mill pot to revolve around the main shaft which results in the planetary gears traveling around the sun gear to rotate each mill pot on its own axis, the rotation of each mill pot being in the same direction as the rotation of the main shaft.