Abstract: A semiconductor device includes a base member and a semiconductor chip. The base member includes a first surface, a second surface opposite to the first surface, and a protrusion at the second surface side. The semiconductor chip being mounted on the second surface of the base member. The semiconductor chip includes first and second electrodes, a control pad, and a semiconductor part. The first electrode is provided on a back surface of the semiconductor part. The second electrode and the control pad are provided on a front surface of the semiconductor part. The semiconductor chip includes a space between the second electrode and the control pad at the front surface side of the semiconductor part. The semiconductor chip is mounted so that the space between the second electrode and the control pad overlaps the protrusion of the base member.

Abstract: An attachment and detachment device that excels in responsiveness to attachment and detachment of a workpiece even when the workpiece is thin while utilizing an electrostatic chuck method is provided. The attachment and detachment device that enables suction and separation of a workpiece includes a machinable ceramic layer, an adhesion activating layer provided on the machinable ceramic layer, an electrode layer provided on the adhesion activating layer, and a dielectric layer provided on the electrode layer, wherein the electrode layer is covered with the adhesion activating layer and the dielectric layer, and the dielectric layer has a volume resistivity of 109 to 1012 ?·cm.

Abstract: An attachment and detachment device that excels in responsiveness to attachment and detachment of a workpiece even when the workpiece is thin while utilizing an electrostatic chuck method is provided. The attachment and detachment device that enables suction and separation of a workpiece includes a machinable ceramic layer, an adhesion activating layer provided on the machinable ceramic layer, an electrode layer provided on the adhesion activating layer, and a dielectric layer provided on the electrode layer, wherein the electrode layer is covered with the adhesion activating layer and the dielectric layer, and the dielectric layer has a volume resistivity of 109 to 1012 ?·cm.

Abstract: An electrostatic workpiece-holding method includes an initialization step, a static elimination step, a workpiece setting step, a workpiece attracting step, and a workpiece release step. The initialization step is a step of applying a positive voltage to electrode of the electrostatic attracting part while applying a negative voltage to electrode. The static elimination step is a step of removing the static charge on the surface of the electrostatic attracting part. The workpiece setting step is a step of placing the workpiece in contact with the surface of the electrostatic attracting part. The workpiece attracting step is a step of interrupting the application of the positive voltage to electrode of the electrostatic attracting part and the application of the negative voltage to electrode. The workpiece release step is a step of applying the positive voltage to electrode of the electrostatic attracting part while applying the negative voltage to electrode.

Abstract: An electrostatic workpiece-holding method includes an initialization step, a static elimination step, a workpiece setting step, a workpiece attracting step, and a workpiece release step. The initialization step is a step of applying a positive voltage to electrode of the electrostatic attracting part while applying a negative voltage to electrode. The static elimination step is a step of removing the static charge on the surface of the electrostatic attracting part. The workpiece setting step is a step of placing the workpiece in contact with the surface of the electrostatic attracting part. The workpiece attracting step is a step of interrupting the application of the positive voltage to electrode of the electrostatic attracting part and the application of the negative voltage to electrode. The workpiece release step is a step of applying the positive voltage to electrode of the electrostatic attracting part while applying the negative voltage to electrode.

Abstract: There is provided a compact stator coil assembly that has heat radiation increased and a cooling performance improved. A stator coil assembly includes a first coil piece, a second coil piece, and an insulating member provided with a retaining portion that catches the first coil piece and the second coil piece so that those coil pieces form a predetermined coil pattern. A coil loop is formed by the first coil piece and the second coil piece. The stator coil assembly further includes a heat-transfer member having a heat-transfer portion insulated from the first coil piece and the second coil piece and embedded in the insulating member, and a slit formed in the heat-transfer member so as to cut off the pathway of an induced current that is to flow through the heat-transfer member.

Abstract: A stator coil for an axial gap electrical rotating machine includes first coil pieces, second coil pieces, and an annular base member having recesses for arranging and holding the first and second coil pieces in back and front faces of the annular base member. The first and second coil pieces are arranged in a circumferential direction of the annular base member in the recesses in both back and front faces of the base member. The first joint portion of one first coil piece faces and is connected to the first joint portion of another first coil piece. The second joint portion of one first coil piece faces and being connected to the second joint portion of another second coil piece or the third joint portion of one second coil piece to provide a coil loop.

Abstract: A coil assembly for a rotating electric machine is a stator coil for use in the stator of a motor or the like, which includes a coil plate composed of at least two coil plate elements respectively provided with an internal peripheral portion and an external peripheral portion and having predetermined wiring patterns formed by slits. The coil plate elements are bonded together at their internal peripheral portion and external peripheral portion while leaving the medial portion lying between the internal peripheral portion and the external peripheral portion spaced apart, so as to form the predetermined coil winding patterns.

Abstract: The torque characteristic is improved using a magnetic flux efficiently, and an eddy-current loss generated in a coil is reduced. Moreover, a loss is suppressed even if a metal member having a high thermal conductivity is closely disposed or closely contacted to a coil surface exposed by a variable magnetic field to improve the heat transfer property, thereby improving the cooling capability. A coil assembly for a rotational electric apparatus has first and second coil plates having wiring patterns formed in such a way that conductive coil segments adjoin with each other via slits, magnetic-flux-transfer-member slots formed in the slits and having a wider width than such slits, a coil constituted by the stacked coil plates so that the magnetic-flux-transfer-member slots overlap with each other, and a magnetic flux transfer member inserted into the magnetic-flux-transfer-member slots of the coil.

Abstract: There is provided a compact stator coil assembly that has heat radiation increased and a cooling performance improved. A stator coil assembly includes a first coil piece, a second coil piece, and an insulating member provided with a retaining portion that catches the first coil piece and the second coil piece so that those coil pieces form a predetermined coil pattern. A coil loop is formed by the first coil piece and the second coil piece. The stator coil assembly further includes a heat-transfer member having a heat-transfer portion insulated from the first coil piece and the second coil piece and embedded in the insulating member, and a slit formed in the heat-transfer member so as to cut off the pathway of an induced current that is to flow through the heat-transfer member.

Abstract: A stator coil for an axial gap electrical rotating machine includes first coil pieces, second coil pieces, and an annular base member having recesses for arranging and holding the first and second coil pieces in back and front faces of the annular base member. The first and second coil pieces are arranged in a circumferential direction of the annular base member in the recesses in both back and front faces of the base member. The first joint portion of one first coil piece faces and is connected to the first joint portion of another first coil piece. The second joint portion of one first coil piece faces and being connected to the second joint portion of another second coil piece or the third joint portion of one second coil piece to provide a coil loop.

Abstract: Charged particle beam equipment enables the simultaneous measurement and correction of magnification errors in both X and Y directions in one measurement without requiring the elimination of displacement, if any, in rotation direction between the direction of a periodic structure pattern of a sample having a known periodic structure and the X or Y direction on an electron image of the sample. The charged particle beam equipment of the invention enables the simultaneous measurement of magnification errors in the X and Y directions by FFT transformation and coordinate transformation of an electron image, even when there is a displacement in rotation direction between the direction of the periodic structural pattern and the X or Y direction on the electron image of the sample.

Abstract: A coil assembly for a rotating electric machine is a stator coil (201) for use in the stator of a motor (10) or the like, which comprises a coil plate (211) composed of at least two coil plate elements (211-1, 211-2) respectively provided with an internal peripheral portion and an external peripheral portion and having predetermined wiring patterns (241) formed by slits. The coil plate elements are bonded together at their internal peripheral portion and external peripheral portion while leaving the medial portion lying between the internal peripheral portion and the external peripheral portion spaced apart, so as to form the predetermined coil winding patterns (241).

Abstract: The torque characteristic is improved using a magnetic flux efficiently, and an eddy-current loss generated in a coil is reduced. Moreover, a loss is suppressed even if a metal member having a high thermal conductivity is closely disposed or closely contacted to a coil surface exposed by a variable magnetic field to improve the heat transfer property, thereby improving the cooling capability. A coil assembly for a rotational electric apparatus has first and second coil plates having wiring patterns formed in such a way that conductive coil segments adjoin with each other via slits, magnetic-flux-transfer-member slots formed in the slits and having a wider width than such slits, a coil constituted by the stacked coil plates so that the magnetic-flux-transfer-member slots overlap with each other, and a magnetic flux transfer member inserted into the magnetic-flux-transfer-member slots of the coil.

Abstract: Charged particle beam equipment enables the simultaneous measurement and correction of magnification errors in both X and Y directions in one measurement without requiring the elimination of displacement, if any, in rotation direction between the direction of a periodic structure pattern of a sample having a known periodic structure and the X or Y direction on an electron image of the sample. The charged particle beam equipment of the invention enables the simultaneous measurement of magnification errors in the X and Y directions by FFT transformation and coordinate transformation of an electron image, even when there is a displacement in rotation direction between the direction of the periodic structural pattern and the X or Y direction on the electron image of the sample.

Abstract: In a slotless permanent magnet rotary electric machinery, comprising a substantially cylindrical rotor (53) incorporated with a permanent magnet (52), a stator iron core (54) surrounding the rotor; and a coil (55) provided between the rotor (53) and stator core (54) in a spaced relationship with respect to the rotor (53), the coil (55) comprises a plurality of turns which are shifted from one turn to another along the circumferential direction in a mutually overlapping manner; and the coil turns are formed by a conductor (60, 60a, 60b) having an elongated cross section, a long axis of the cross section extending in a radial direction. This provides rotary electric machinery which can significantly reduce loss in a high speed range without substantially increasing copper loss.

Abstract: In a slotless permanent magnet rotary electric machinery, comprising a substantially cylindrical rotor (53) incorporated with a permanent magnet (52), a stator iron core (54) surrounding the rotor; and a coil (55) provided between the rotor (53) and stator core (54) in a spaced relationship with respect to the rotor (53), the coil (55) comprises a plurality of turns which are shifted from one turn to another along the circumferential direction in a mutually overlapping manner; and the coil turns are formed by a conductor (60, 60a, 60b) having an elongated cross section, a long axis of the cross section extending in a radial direction. This provides rotary electric machinery which can significantly reduce loss in a high speed range without substantially increasing copper loss.

Abstract: A stator winding which copes with high output and miniaturization turns formed by winding a wire sheaf of a plurality of fine wires bundled together, in an approximately rhombic shape, wherein the turns are arranged so as to be sequentially shifted in the direction of one diagonal of the rhombic shape, to thereby form an approximately rhombic shape coil segment comprising a continuous length of the wire sheaf. A plurality of coil segments are then sequentially shifted and overlapped on one diagonal to form a band shaped body, and a hollow cylindrical body is then formed by rolling the band shaped body into a circular shape. The winding is characterized in that with each turn, opposite end portions located in the direction of an other diagonal orthogonal to the direction of the one diagonal have U-shape bent back portions.

Abstract: A slotless stator assembling two divided cores which jointly define a stator core into a cylindrical shape so as to contain therebetween a cylindrically shaped stator winding, wherein the stator winding has an outer diameter larger than an inner diameter of the stator core in the uncompressed condition of the winding. The stator winding is assembled inside the stator core in a radially inward compressed condition. Since the stator winding functions as a spring pressing the inside of the stator core so as to expand in the normal direction (the radial outward direction), the winding is mechanically secured by the resilient spring force to the inner periphery of the stator core. Hence there is no longer the need for a special fixation mechanism or adhesive when assembling the stator core winding and stator core together.

Abstract: A stator of a rotating electrical machine has improved heat dissipation of a stator and end portions of a stator winding thereof which are protected from damage due to stress concentration, by inserting a silicone rubber sheet between a stator core having no slots and the stator winding which is accommodated thereinside. The silicone rubber sheet comprises a rubber type material having flexibility so as to be deformable under pressure, which is reinforced by a glass cloth or a polyester mesh cloth. Moreover, this is preferably an insulating and heat dissipating sheet which contains a filler having good thermal conductivity. More preferably, a silicone rubber sheet which contains boron nitride is used. Furthermore, a protective sheet of a resin material is further inserted between the stator core and end portions of the stator winding over the silicone rubber sheet.