Abstract: A plasma processing apparatus includes a stage disposed in a processing chamber for mounting a wafer, a plasma generation chamber disposed above the processing chamber for plasma generation using process gas, a plate member having multiple introduction holes, made of a dielectric material, disposed above the stage and between the processing chamber and the plasma generation chamber, and a lamp disposed around the plate member for heating the wafer. The plasma processing apparatus further includes an external IR light source, an emission fiber arranged in the stage, that outputs IR light from the external IR light source toward a wafer bottom, and a light collection fiber for collecting IR light from the wafer. Data obtained using only IR light from the lamp is subtracted from data obtained also using IR light from the external IR light source during heating of the wafer. Thus, a wafer temperature is determined.

Abstract: A coil device includes two core members, one of which is E-shaped. The E-shaped core member has left and right side faces, and a center leg that extends in a vertical direction. A conducting wire is wound around a core, the core being composed of the two core members arranged to face each other in the vertical direction with a gap between the two core members. The conducting wire is wound around the center leg. First and second heat-sinking plates made of metal are bent so as to be in contact with upper and side faces of the core. The first and second plates are arranged so that first edges of the plates are placed left-right symmetrically with respect to the core with a gap between the edges. Second edges of the plates are in contact with a metal heat-sinking board where the core is placed.

Abstract: A coil device includes two core members, one of which is E-shaped. The E-shaped core member has left and right side faces, and a center leg that extends in a vertical direction. A conducting wire is wound around a core, the core being composed of the two core members arranged to face each other in the vertical direction with a gap between the two core members. The conducting wire is wound around the center leg. First and second heat-sinking plates made of metal are bent so as to be in contact with upper and side faces of the core. The first and second plates are arranged so that first edges of the plates are placed left-right symmetrically with respect to the core with a gap between the edges. Second edges of the plates are in contact with a metal heat-sinking board where the core is placed.

Abstract: A first inlet is formed in the front portion of the box of an indoor unit, and a second inlet is formed in the upper portion of the box of the indoor unit. Openable/closable covers are provided to the second inlet. The covers are closed when a silent operation mode is set by an operation unit. When the covers are closed, the second inlet is closed, and the sound caused by a hissing indoor fan in the indoor unit and the sound of the refrigerant flowing in the indoor heat exchanger of the indoor unit will not leak to the outside of the indoor unit.

Abstract: An automatic original conveying apparatus in which originals loaded on an original stacking unit are conveyed to a predetermined position one by one. Abnormal stacking of the original on the original stacking unit is detected, and continuation of operation is prohibited in response to the detection of such abnormal stacking of the originals.

Abstract: A defibrillation system including a high voltage metallized plastic film capacitor which is charged to a high voltage and is discharged to the body of the patient by way of a paddle. The defibrillation system includes a charge abnormality detection circuit for detecting dielectronic breakdown of the capacitor, a notifier for notifying the operator of the system of detection of charge abnormality in response to the detection signal produced by the detection circuit, and a switch circuit for inhibiting the feeding of high voltage to the capacitor in a high voltage generating cirucit, in response to a detection signal. Other aspects of the present invention include a metallized plastic film capacitor construction including a plurality of capacitor elements each of which is formed from wound-up metallized plastic films and to which metallic contacts and capacitor terminals are provided along with external resistances, as to reduce the production of loud noise during dielectric breakdown, in particular.