Abstract: A production stabilizing device and a method produce a multicomponent film containing metal components such as TiAlN having greatly different melting points at high material use efficiency and in a good film quality by using a single crucible (3) and converged plasma (7). For this end, electric power required to evaporate material (4) is first supplied and then electric power stepwise increased from the first electric power is repeatedly supplied until a required maximum electric power is reached. Alternatively, plasma control is performed for converging the plasma (7) into an initial area required to evaporate the material and subsequently plasma control is performed for successively and stepwise moving and expanding the plasma from the initial plasma area up to a maximum plasma area to gradually melt a non-melted portion (4b) of the material. The material is a sintered compact or a green compact (4).

Abstract: A production device and a method produce a multicomponent film containing metal components such as TiAlN having greatly different melting points by a melting-evaporation type ion plating method which has high material use efficiency and provides a good film quality. For this end, electric power required to evaporate material (4) is first supplied and then electric power stepwise increased from the first electric power is repeatedly supplied until a required maximum electric power is reached. At the same time, plasma control is performed for converging plasma (7) into an initial area required to evaporate the material and then plasma control is performed for successively and stepwise moving and expanding the plasma from the initial plasma area up to a maximum plasma area to gradually melt a non-melted portion of the material.

Abstract: The process of the present invention comprises adding an alkaline earth metal hydroxide such as barium hydroxide to a radioactive liquid waste containing sodium sulfate as the main component to convert the latter into an insoluble alkaline earth metal salt such as barium sulfate, adding silicic acid to by-product sodium hydroxide to prepare water glass and solidifying the radioactive insoluble alkaline earth metal salt with the water glass. According to this process, exudation of radioactive substances from the solid can be prevented and the solid having a high durability can be obtained at a low cost.