Abstract: To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating. A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.

Abstract: This invention provides a firing jig for an electronic element comprising a spray coating layer made of a material less reactive to a material to be fired on a substrate made of a ceramic, wherein two or more spray coating layers are formed on the surface of the substrate, and at least a spray coating layer adjacent to the substrate and a spray coating layer adjacent to the material to be fired are made of different materials. When it is a firing jig for an electronic element comprising a ceramic substrate, a surface adjacent to the substrate is a spray coating layer and the surface of the spray coating layer is a flame coating layer. The firing jig for an electronic element has a longer life and can be produced with a lower cost.

Abstract: This invention provides a firing jig for an electronic element comprising a spray coating layer made of a material less reactive to a material to be fired on a substrate made of a ceramic, wherein two or more spray coating layers are formed on the surface of the substrate, and at least a spray coating layer adjacent to the substrate and a spray coating layer adjacent to the material to be fired are made of different materials. When it is a firing jig for an electronic element comprising a ceramic substrate, a surface adjacent to the substrate is a spray coating layer and the surface of the spray coating layer is a flame coating layer. The firing jig for an electronic element has a longer life and can be produced with a lower cost.