Patents by Inventor Masashi Obuchi

Masashi Obuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230340688
    Abstract: An object is to precisely grasping, in real time, film thickness of a plated film during a plating process. A plating apparatus comprises: a plating tank for storing plating liquid; a substrate holder for holding a substrate; an anode arranged in the plating tank in such a manner that it faces the substrate held by the substrate holder; an electric potential sensor constructed in such a manner that it is arranged in a position close to the substrate held by the substrate holder, and measures electric potential of the plating liquid; and a state space model constructed to estimate current density of current flowing through an outer edge part of the substrate, based on a measured value of electric potential of the plating liquid obtained by the electric potential sensor and by using a state equation and an observation equation.
    Type: Application
    Filed: February 13, 2023
    Publication date: October 26, 2023
    Inventors: Tsubasa ISHII, Masashi SHIMOYAMA, Masashi OBUCHI, Koichi MASUYA, Ryosuke HIWATASHI
  • Publication number: 20230295829
    Abstract: Provided is a technique that ensures the suppressed deterioration of plating quality of a substrate due to air bubbles that remain on a surface to be plated of the substrate. A plating apparatus 1000 includes a plating tank 10, a substrate holder 30, a rotation mechanism 40, and an elevating mechanism 50. The plating tank 10 is configured to accumulate a plating solution and include an anode 11 arranged inside the plating tank. The substrate holder 30 is arranged above the anode and configured to hold a substrate as a cathode such that a surface to be plated of the substrate faces downward. The substrate holder includes a ring 31 projecting below an outer peripheral edge of the surface to be plated of the substrate. The rotation mechanism 40 is configured to rotate the substrate holder. The elevating mechanism 50 is configured to elevate the substrate holder. The ring has a lower surface, and at least one protrusion 35 projecting toward a lower side is arranged on a part of the lower surface.
    Type: Application
    Filed: February 25, 2021
    Publication date: September 21, 2023
    Inventors: Kazuhito Tsuji, Masashi Obuchi, Masashi Shimoyama
  • Publication number: 20230279579
    Abstract: Provided is a plating apparatus capable of improving uniformity of a plating film formed on a substrate. The plating apparatus includes a plating tank, a substrate holder that holds a substrate, and an anode disposed in the plating tank to oppose the substrate held by the substrate holder. The plating apparatus also includes a conduit having a first portion including an opening end disposed in a region between the substrate held by the substrate holder and the anode, and a second portion apart from the region between the substrate held by the substrate holder and the anode, the conduit having at least a part filled with a plating solution, and a potential sensor that is disposed in the second portion of the conduit and that is configured to measure a potential of the plating solution.
    Type: Application
    Filed: December 21, 2022
    Publication date: September 7, 2023
    Inventors: Tsubasa ISHII, Masashi SHIMOYAMA, Masashi OBUCHI, Koichi MASUYA
  • Patent number: 10837462
    Abstract: A volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) rotatable together with a rotational shaft (11), and an impeller casing (5) having a suction port (3) and a volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). The impeller (1) includes a hub (13) to which the rotational shaft (11) is fixed, and a sweep-back vane (2) extending helically from the hub (13). The sweep-back vane (2) includes a leading edge portion (2a) extending helically from the hub (13), and a trailing edge portion (2b) extending helically from the leading edge portion (2a). The leading edge portion (2a) has a front-side curved surface (2e) extending from an inner end (2c) to an outer end (2d) of the leading edge portion (2a).
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: November 17, 2020
    Assignee: EBARA CORPORATION
    Inventors: Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Hiroshi Uchida, Miho Isono, Kenta Tokairin
  • Patent number: 10837456
    Abstract: The present invention relates to a volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) having a vane (2), and an impeller casing (5) which houses the impeller (1) therein. The impeller casing (5) includes a volute chamber (7), a suction port (3) and a discharge port (4) which communicate with the volute chamber (7), and a tongue portion (10) which forms a starting portion of the volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). An intersection point (B), where a terminal end of the vane (2) passes across the groove (18) as viewed from an axial direction of the impeller (1), is located at an opposite side from the tongue portion (10) with respect to a central point of the impeller (1).
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: November 17, 2020
    Assignee: EBARA CORPORATION
    Inventors: Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Hiroshi Uchida, Miho Isono, Kenta Tokairin
  • Patent number: 10718362
    Abstract: A vortex control device for modifying a vortex in a fluid stemming from a wall is disclosed. The device includes a rotatable hub disposed within an opening in the wall. The device also includes an inlet port and an outlet port in the rotatable hub. The inlet port forms a suction port to suction fluid from or about the vortex, and the outlet port forms an injection port to inject fluid into or about the vortex.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: July 21, 2020
    Assignees: THE FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION, INC., EBARA CORPORATION
    Inventors: Kunihiko Taira, Qiong Liu, Byungjin An, Motohiko Nohmi, Masashi Obuchi
  • Patent number: 10626880
    Abstract: An impeller assembly for centrifugal pumps has two disk members that have different diameters, are arranged coaxially to a rotation axis and face each other so as to form an interspace; blades are radially arranged in the interspace; the two disk members are also centrally provided with a fastening means for fastening to a transmission shaft, which rotates about the rotation axis. The particularity of the present invention resides in having contoured vanes that protrude radially from the peripheral region of the disk member that has the smallest diameter and are arranged substantially at the blades.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: April 21, 2020
    Assignee: Ebara Corporation
    Inventors: Masashi Obuchi, So Kuroiwa, Dai Sakihama, Renato Groppo, Fabio Balbo, Mariano Matteazzi, Lucio Cardillo, Alessandro Corsini, Giovanni Delibra, Franco Rispoli
  • Publication number: 20190145442
    Abstract: A vortex control device for modifying a vortex in a fluid stemming from a wall is disclosed. The device includes a rotatable hub disposed within an opening in the wall. The device also includes an inlet port and an outlet port in the rotatable hub. The inlet port forms a suction port to suction fluid from or about the vortex, and the outlet port forms an injection port to inject fluid into or about the vortex.
    Type: Application
    Filed: November 9, 2018
    Publication date: May 16, 2019
    Inventors: Kunihiko Taira, Qiong Liu, Byungjin An, Motohiko Nohmi, Masashi Obuchi
  • Patent number: 10054120
    Abstract: The present invention relates to a volute pump and particularly provides a volute pump for delivering a liquid containing fibrous substances and solid substances, while preventing these substances from obstructing the pump. The volute pump includes a pump casing (10) having a protrusion (14) projecting into a flow passage (11) and separating a starting end of a volute from a terminal end of a volute. The protrusion (14) faces a liquid outlet (23) of an impeller (20). A radius of curvature (Rb) of a cross section of a distal edge of the protrusion (14) at its one side end (14b) is larger than a radius of curvature (Ra) of the cross section of the distal edge of the protrusion (14) at other side end (14a). The other side end (14a) faces a main plate (20a), while the one side end (14b) is located opposite to the main plate (20a).
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: August 21, 2018
    Assignee: EBARA CORPORATION
    Inventors: Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Hiroshi Uchida, Miho Isono
  • Publication number: 20180051718
    Abstract: A volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) rotatable together with a rotational shaft (11), and an impeller casing (5) having a suction port (3) and a volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). The impeller (1) includes a hub (13) to which the rotational shaft (11) is fixed, and a sweep-back vane (2) extending helically from the hub (13). The sweep-back vane (2) includes a leading edge portion (2a) extending helically from the hub (13), and a trailing edge portion (2b) extending helically from the leading edge portion (2a). The leading edge portion (2a) has a front-side curved surface (2e) extending from an inner end (2c) to an outer end (2d) of the leading edge portion (2a).
    Type: Application
    Filed: March 24, 2016
    Publication date: February 22, 2018
    Inventors: Masahito KAWAI, Hiromi SAKACHO, Masashi OBUCHI, Hiroshi UCHIDA, Miho ISONO, Kenta TOKAIRIN
  • Publication number: 20180051708
    Abstract: The present invention relates to a volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) having a vane (2), and an impeller casing (5) which houses the impeller (1) therein. The impeller casing (5) includes a volute chamber (7), a suction port (3) and a discharge port (4) which communicate with the volute chamber (7), and a tongue portion (10) which forms a starting portion of the volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). An intersection point (B), where a terminal end of the vane (2) passes across the groove (18) as viewed from an axial direction of the impeller (1), is located at an opposite side from the tongue portion (10) with respect to a central point of the impeller (1).
    Type: Application
    Filed: March 24, 2016
    Publication date: February 22, 2018
    Inventors: Masahito KAWAI, Hiromi SAKACHO, Masashi OBUCHI, Hiroshi UCHIDA, Miho ISONO, Kenta TOKAIRIN
  • Publication number: 20180045213
    Abstract: An impeller for centrifugal pumps has a first disk element, functionally arranged toward the inlet, which is coaxial to and faces a second disk element, which is functionally arranged toward the delivery and is connected rigidly to the first disk element by virtue of a series of angularly spaced vanes and is provided centrally with a means for fixing to a transmission shaft. The particularity of the present invention resides in that the impeller includes a series of openings formed in the substantially peripheral region of the second disk element, between pairs of adjacent vanes, substantially at the areas subjected to the greatest axial thrust.
    Type: Application
    Filed: March 18, 2016
    Publication date: February 15, 2018
    Applicant: Ebara Corporation
    Inventors: Renato GROPPO, Fabio BALBO, Mariano MATTEAZZI, Masashi OBUCHI, Dai SAKIHAMA, So KUROIWA
  • Patent number: 9835168
    Abstract: A casing liner used for a sewage pump includes a surface to face an edge of a blade of an impeller when the casing liner is assembled with the impeller into the sewage pump. At least one groove with given width is formed in at least a part of the surface. The groove includes a first section with given depth, which is located on the side close to a rotational center of the impeller, a second section smaller in depth than the first section, which is located on the side far from the rotational center of the impeller, and a third section that is an inclined face connecting the first and second sections, the first to third sections being arranged in a width direction of the groove.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: December 5, 2017
    Assignee: EBARA CORPORATION
    Inventors: Hiroshi Uchida, Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Miho Isono
  • Patent number: 9811092
    Abstract: A vehicle traveling control device includes: a communication unit that communicate with preceding vehicles; a position information acquisition unit that acquires position information on the preceding vehicles and following vehicles around a host vehicle with which the host vehicle can carry out vehicle-vehicle communication; a number of vehicles calculation unit that calculates a reference number of vehicles and an estimated number of vehicles; and a traveling control unit that causes the host vehicle to travel at the traveling position behind the following vehicle if the estimated number of vehicles is larger than the reference number of vehicles.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: November 7, 2017
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Masashi Obuchi, Koji Taguchi
  • Publication number: 20170260992
    Abstract: An impeller assembly for centrifugal pumps has two disk members that have different diameters, are arranged coaxially to a rotation axis and face each other so as to form an interspace; blades are radially arranged in the interspace; the two disk members are also centrally provided with a fastening means for fastening to a transmission shaft, which rotates about the rotation axis. The particularity of the present invention resides in having contoured vanes that protrude radially from the peripheral region of the disk member that has the smallest diameter and are arranged substantially at the blades.
    Type: Application
    Filed: October 8, 2015
    Publication date: September 14, 2017
    Applicant: Ebara Corporation
    Inventors: Masashi OBUCHI, So KUROIWA, Dai SAKIHAMA, Renato GROPPO, Fabio BALBO, Mariano MATTEAZZI, Lucio CARDILLO, Alessandro CORSINI, Giovanni DELIBRA, Franco RISPOLI
  • Patent number: 9499169
    Abstract: A driving assistance device including: a preceding vehicle detection portion; a speed control portion controlling the speed adjustment to the host vehicle to obtain a target inter-vehicle distance; a preceding vehicle travel trajectory acquisition portion; an entering vehicle detection portion; an entering vehicle travel trajectory acquisition portion; a target trajectory setting portion setting the target travel trajectory of the host vehicle based on at least the travel trajectory of the preceding or the entering vehicle; a steer control portion controlling the adjustment of the steer amount calculated based on the target travel trajectory; and a location determination portion determining the location where the deviation amount between the travel trajectories of the entering and preceding vehicles becomes the predetermined value or below.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: November 22, 2016
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Masashi Obuchi
  • Publication number: 20160292998
    Abstract: A vehicle traveling control device includes: a communication unit that communicate with preceding vehicles; a position information acquisition unit that acquires position information on the preceding vehicles and following vehicles around a host vehicle with which the host vehicle can carry out vehicle-vehicle communication; a number of vehicles calculation unit that calculates a reference number of vehicles and an estimated number of vehicles; and a traveling control unit that causes the host vehicle to travel at the traveling position behind the following vehicle if the estimated number of vehicles is larger than the reference number of vehicles.
    Type: Application
    Filed: March 24, 2016
    Publication date: October 6, 2016
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Masashi OBUCHI, Koji TAGUCHI
  • Publication number: 20160108927
    Abstract: A pump impeller for a submerged pump capable of removing or reducing the radial load is provided. A non-clogging submerged pump is provided, which includes a substantially cylindrical body, an intake port provided in a center of a lower end surface of the body, a discharge port that is open in a side surface of the body, and a flow channel passing from the intake port to the discharge port within the body. The flow channel includes a plurality of flow channels, and the flow channels have their size, shape, and position defined such that fluid unbalance is reduced with respect to an axis of rotation.
    Type: Application
    Filed: April 15, 2014
    Publication date: April 21, 2016
    Applicant: EBARA CORPORATION
    Inventors: Masahito KAWAI, Hiromi SAKACHO, Masashi OBUCHI, Hiroshi UCHIDA, Miho ISONO
  • Patent number: D776166
    Type: Grant
    Filed: May 5, 2015
    Date of Patent: January 10, 2017
    Assignee: EBARA CORPORATION
    Inventors: Masashi Obuchi, So Kuroiwa, Dai Sakihama, Renato Groppo, Fabio Balbo, Mariano Matteazzi, Lucio Cardillo, Alessandro Corsini, Giovanni Delibra, Franco Rispoli
  • Patent number: D791841
    Type: Grant
    Filed: November 3, 2016
    Date of Patent: July 11, 2017
    Assignee: EBARA CORPORATION
    Inventors: Masashi Obuchi, So Kuroiwa, Dai Sakihama, Renato Groppo, Fabio Balbo, Mariano Matteazzi, Lucio Cardillo, Alessandro Corsini, Giovanni Delibra, Franco Rispoli