Patents by Inventor Masashi Obuchi
Masashi Obuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230340688Abstract: An object is to precisely grasping, in real time, film thickness of a plated film during a plating process. A plating apparatus comprises: a plating tank for storing plating liquid; a substrate holder for holding a substrate; an anode arranged in the plating tank in such a manner that it faces the substrate held by the substrate holder; an electric potential sensor constructed in such a manner that it is arranged in a position close to the substrate held by the substrate holder, and measures electric potential of the plating liquid; and a state space model constructed to estimate current density of current flowing through an outer edge part of the substrate, based on a measured value of electric potential of the plating liquid obtained by the electric potential sensor and by using a state equation and an observation equation.Type: ApplicationFiled: February 13, 2023Publication date: October 26, 2023Inventors: Tsubasa ISHII, Masashi SHIMOYAMA, Masashi OBUCHI, Koichi MASUYA, Ryosuke HIWATASHI
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Publication number: 20230295829Abstract: Provided is a technique that ensures the suppressed deterioration of plating quality of a substrate due to air bubbles that remain on a surface to be plated of the substrate. A plating apparatus 1000 includes a plating tank 10, a substrate holder 30, a rotation mechanism 40, and an elevating mechanism 50. The plating tank 10 is configured to accumulate a plating solution and include an anode 11 arranged inside the plating tank. The substrate holder 30 is arranged above the anode and configured to hold a substrate as a cathode such that a surface to be plated of the substrate faces downward. The substrate holder includes a ring 31 projecting below an outer peripheral edge of the surface to be plated of the substrate. The rotation mechanism 40 is configured to rotate the substrate holder. The elevating mechanism 50 is configured to elevate the substrate holder. The ring has a lower surface, and at least one protrusion 35 projecting toward a lower side is arranged on a part of the lower surface.Type: ApplicationFiled: February 25, 2021Publication date: September 21, 2023Inventors: Kazuhito Tsuji, Masashi Obuchi, Masashi Shimoyama
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Publication number: 20230279579Abstract: Provided is a plating apparatus capable of improving uniformity of a plating film formed on a substrate. The plating apparatus includes a plating tank, a substrate holder that holds a substrate, and an anode disposed in the plating tank to oppose the substrate held by the substrate holder. The plating apparatus also includes a conduit having a first portion including an opening end disposed in a region between the substrate held by the substrate holder and the anode, and a second portion apart from the region between the substrate held by the substrate holder and the anode, the conduit having at least a part filled with a plating solution, and a potential sensor that is disposed in the second portion of the conduit and that is configured to measure a potential of the plating solution.Type: ApplicationFiled: December 21, 2022Publication date: September 7, 2023Inventors: Tsubasa ISHII, Masashi SHIMOYAMA, Masashi OBUCHI, Koichi MASUYA
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Patent number: 10837462Abstract: A volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) rotatable together with a rotational shaft (11), and an impeller casing (5) having a suction port (3) and a volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). The impeller (1) includes a hub (13) to which the rotational shaft (11) is fixed, and a sweep-back vane (2) extending helically from the hub (13). The sweep-back vane (2) includes a leading edge portion (2a) extending helically from the hub (13), and a trailing edge portion (2b) extending helically from the leading edge portion (2a). The leading edge portion (2a) has a front-side curved surface (2e) extending from an inner end (2c) to an outer end (2d) of the leading edge portion (2a).Type: GrantFiled: March 24, 2016Date of Patent: November 17, 2020Assignee: EBARA CORPORATIONInventors: Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Hiroshi Uchida, Miho Isono, Kenta Tokairin
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Patent number: 10837456Abstract: The present invention relates to a volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) having a vane (2), and an impeller casing (5) which houses the impeller (1) therein. The impeller casing (5) includes a volute chamber (7), a suction port (3) and a discharge port (4) which communicate with the volute chamber (7), and a tongue portion (10) which forms a starting portion of the volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). An intersection point (B), where a terminal end of the vane (2) passes across the groove (18) as viewed from an axial direction of the impeller (1), is located at an opposite side from the tongue portion (10) with respect to a central point of the impeller (1).Type: GrantFiled: March 24, 2016Date of Patent: November 17, 2020Assignee: EBARA CORPORATIONInventors: Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Hiroshi Uchida, Miho Isono, Kenta Tokairin
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Patent number: 10718362Abstract: A vortex control device for modifying a vortex in a fluid stemming from a wall is disclosed. The device includes a rotatable hub disposed within an opening in the wall. The device also includes an inlet port and an outlet port in the rotatable hub. The inlet port forms a suction port to suction fluid from or about the vortex, and the outlet port forms an injection port to inject fluid into or about the vortex.Type: GrantFiled: November 9, 2018Date of Patent: July 21, 2020Assignees: THE FLORIDA STATE UNIVERSITY RESEARCH FOUNDATION, INC., EBARA CORPORATIONInventors: Kunihiko Taira, Qiong Liu, Byungjin An, Motohiko Nohmi, Masashi Obuchi
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Patent number: 10626880Abstract: An impeller assembly for centrifugal pumps has two disk members that have different diameters, are arranged coaxially to a rotation axis and face each other so as to form an interspace; blades are radially arranged in the interspace; the two disk members are also centrally provided with a fastening means for fastening to a transmission shaft, which rotates about the rotation axis. The particularity of the present invention resides in having contoured vanes that protrude radially from the peripheral region of the disk member that has the smallest diameter and are arranged substantially at the blades.Type: GrantFiled: October 8, 2015Date of Patent: April 21, 2020Assignee: Ebara CorporationInventors: Masashi Obuchi, So Kuroiwa, Dai Sakihama, Renato Groppo, Fabio Balbo, Mariano Matteazzi, Lucio Cardillo, Alessandro Corsini, Giovanni Delibra, Franco Rispoli
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Publication number: 20190145442Abstract: A vortex control device for modifying a vortex in a fluid stemming from a wall is disclosed. The device includes a rotatable hub disposed within an opening in the wall. The device also includes an inlet port and an outlet port in the rotatable hub. The inlet port forms a suction port to suction fluid from or about the vortex, and the outlet port forms an injection port to inject fluid into or about the vortex.Type: ApplicationFiled: November 9, 2018Publication date: May 16, 2019Inventors: Kunihiko Taira, Qiong Liu, Byungjin An, Motohiko Nohmi, Masashi Obuchi
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Patent number: 10054120Abstract: The present invention relates to a volute pump and particularly provides a volute pump for delivering a liquid containing fibrous substances and solid substances, while preventing these substances from obstructing the pump. The volute pump includes a pump casing (10) having a protrusion (14) projecting into a flow passage (11) and separating a starting end of a volute from a terminal end of a volute. The protrusion (14) faces a liquid outlet (23) of an impeller (20). A radius of curvature (Rb) of a cross section of a distal edge of the protrusion (14) at its one side end (14b) is larger than a radius of curvature (Ra) of the cross section of the distal edge of the protrusion (14) at other side end (14a). The other side end (14a) faces a main plate (20a), while the one side end (14b) is located opposite to the main plate (20a).Type: GrantFiled: January 14, 2014Date of Patent: August 21, 2018Assignee: EBARA CORPORATIONInventors: Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Hiroshi Uchida, Miho Isono
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Publication number: 20180051718Abstract: A volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) rotatable together with a rotational shaft (11), and an impeller casing (5) having a suction port (3) and a volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). The impeller (1) includes a hub (13) to which the rotational shaft (11) is fixed, and a sweep-back vane (2) extending helically from the hub (13). The sweep-back vane (2) includes a leading edge portion (2a) extending helically from the hub (13), and a trailing edge portion (2b) extending helically from the leading edge portion (2a). The leading edge portion (2a) has a front-side curved surface (2e) extending from an inner end (2c) to an outer end (2d) of the leading edge portion (2a).Type: ApplicationFiled: March 24, 2016Publication date: February 22, 2018Inventors: Masahito KAWAI, Hiromi SAKACHO, Masashi OBUCHI, Hiroshi UCHIDA, Miho ISONO, Kenta TOKAIRIN
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Publication number: 20180051708Abstract: The present invention relates to a volute pump for delivering a liquid containing fibrous substances. The volute pump includes an impeller (1) having a vane (2), and an impeller casing (5) which houses the impeller (1) therein. The impeller casing (5) includes a volute chamber (7), a suction port (3) and a discharge port (4) which communicate with the volute chamber (7), and a tongue portion (10) which forms a starting portion of the volute chamber (7). A groove (18), extending from the suction port (3) to the volute chamber (7), is formed in an inner surface of the impeller casing (5). An intersection point (B), where a terminal end of the vane (2) passes across the groove (18) as viewed from an axial direction of the impeller (1), is located at an opposite side from the tongue portion (10) with respect to a central point of the impeller (1).Type: ApplicationFiled: March 24, 2016Publication date: February 22, 2018Inventors: Masahito KAWAI, Hiromi SAKACHO, Masashi OBUCHI, Hiroshi UCHIDA, Miho ISONO, Kenta TOKAIRIN
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Publication number: 20180045213Abstract: An impeller for centrifugal pumps has a first disk element, functionally arranged toward the inlet, which is coaxial to and faces a second disk element, which is functionally arranged toward the delivery and is connected rigidly to the first disk element by virtue of a series of angularly spaced vanes and is provided centrally with a means for fixing to a transmission shaft. The particularity of the present invention resides in that the impeller includes a series of openings formed in the substantially peripheral region of the second disk element, between pairs of adjacent vanes, substantially at the areas subjected to the greatest axial thrust.Type: ApplicationFiled: March 18, 2016Publication date: February 15, 2018Applicant: Ebara CorporationInventors: Renato GROPPO, Fabio BALBO, Mariano MATTEAZZI, Masashi OBUCHI, Dai SAKIHAMA, So KUROIWA
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Patent number: 9835168Abstract: A casing liner used for a sewage pump includes a surface to face an edge of a blade of an impeller when the casing liner is assembled with the impeller into the sewage pump. At least one groove with given width is formed in at least a part of the surface. The groove includes a first section with given depth, which is located on the side close to a rotational center of the impeller, a second section smaller in depth than the first section, which is located on the side far from the rotational center of the impeller, and a third section that is an inclined face connecting the first and second sections, the first to third sections being arranged in a width direction of the groove.Type: GrantFiled: May 28, 2015Date of Patent: December 5, 2017Assignee: EBARA CORPORATIONInventors: Hiroshi Uchida, Masahito Kawai, Hiromi Sakacho, Masashi Obuchi, Miho Isono
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Patent number: 9811092Abstract: A vehicle traveling control device includes: a communication unit that communicate with preceding vehicles; a position information acquisition unit that acquires position information on the preceding vehicles and following vehicles around a host vehicle with which the host vehicle can carry out vehicle-vehicle communication; a number of vehicles calculation unit that calculates a reference number of vehicles and an estimated number of vehicles; and a traveling control unit that causes the host vehicle to travel at the traveling position behind the following vehicle if the estimated number of vehicles is larger than the reference number of vehicles.Type: GrantFiled: March 24, 2016Date of Patent: November 7, 2017Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Masashi Obuchi, Koji Taguchi
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Publication number: 20170260992Abstract: An impeller assembly for centrifugal pumps has two disk members that have different diameters, are arranged coaxially to a rotation axis and face each other so as to form an interspace; blades are radially arranged in the interspace; the two disk members are also centrally provided with a fastening means for fastening to a transmission shaft, which rotates about the rotation axis. The particularity of the present invention resides in having contoured vanes that protrude radially from the peripheral region of the disk member that has the smallest diameter and are arranged substantially at the blades.Type: ApplicationFiled: October 8, 2015Publication date: September 14, 2017Applicant: Ebara CorporationInventors: Masashi OBUCHI, So KUROIWA, Dai SAKIHAMA, Renato GROPPO, Fabio BALBO, Mariano MATTEAZZI, Lucio CARDILLO, Alessandro CORSINI, Giovanni DELIBRA, Franco RISPOLI
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Patent number: 9499169Abstract: A driving assistance device including: a preceding vehicle detection portion; a speed control portion controlling the speed adjustment to the host vehicle to obtain a target inter-vehicle distance; a preceding vehicle travel trajectory acquisition portion; an entering vehicle detection portion; an entering vehicle travel trajectory acquisition portion; a target trajectory setting portion setting the target travel trajectory of the host vehicle based on at least the travel trajectory of the preceding or the entering vehicle; a steer control portion controlling the adjustment of the steer amount calculated based on the target travel trajectory; and a location determination portion determining the location where the deviation amount between the travel trajectories of the entering and preceding vehicles becomes the predetermined value or below.Type: GrantFiled: September 18, 2014Date of Patent: November 22, 2016Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventor: Masashi Obuchi
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Publication number: 20160292998Abstract: A vehicle traveling control device includes: a communication unit that communicate with preceding vehicles; a position information acquisition unit that acquires position information on the preceding vehicles and following vehicles around a host vehicle with which the host vehicle can carry out vehicle-vehicle communication; a number of vehicles calculation unit that calculates a reference number of vehicles and an estimated number of vehicles; and a traveling control unit that causes the host vehicle to travel at the traveling position behind the following vehicle if the estimated number of vehicles is larger than the reference number of vehicles.Type: ApplicationFiled: March 24, 2016Publication date: October 6, 2016Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Masashi OBUCHI, Koji TAGUCHI
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Publication number: 20160108927Abstract: A pump impeller for a submerged pump capable of removing or reducing the radial load is provided. A non-clogging submerged pump is provided, which includes a substantially cylindrical body, an intake port provided in a center of a lower end surface of the body, a discharge port that is open in a side surface of the body, and a flow channel passing from the intake port to the discharge port within the body. The flow channel includes a plurality of flow channels, and the flow channels have their size, shape, and position defined such that fluid unbalance is reduced with respect to an axis of rotation.Type: ApplicationFiled: April 15, 2014Publication date: April 21, 2016Applicant: EBARA CORPORATIONInventors: Masahito KAWAI, Hiromi SAKACHO, Masashi OBUCHI, Hiroshi UCHIDA, Miho ISONO
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Patent number: D776166Type: GrantFiled: May 5, 2015Date of Patent: January 10, 2017Assignee: EBARA CORPORATIONInventors: Masashi Obuchi, So Kuroiwa, Dai Sakihama, Renato Groppo, Fabio Balbo, Mariano Matteazzi, Lucio Cardillo, Alessandro Corsini, Giovanni Delibra, Franco Rispoli
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Patent number: D791841Type: GrantFiled: November 3, 2016Date of Patent: July 11, 2017Assignee: EBARA CORPORATIONInventors: Masashi Obuchi, So Kuroiwa, Dai Sakihama, Renato Groppo, Fabio Balbo, Mariano Matteazzi, Lucio Cardillo, Alessandro Corsini, Giovanni Delibra, Franco Rispoli