Abstract: A substrate processing device reduces a surface of a substrate. The surface includes a metal layer. The substrate processing device includes a chamber body, a hot plate, a plasma supply unit, and a controller. The hot plate is accommodated in the chamber body and configured to set the substrate. The plasma supply unit is configured to supply plasma of a hydrogen gas to the chamber body. The controller is configured to execute a degassing process and a reducing process. In the degassing process, the controller drives the hot plate to remove an adsorbate from the surface before driving the plasma supply unit. In the reducing process, the controller drives the plasma supply unit after driving the hot plate to supply the plasma to the surface that has undergone the degassing process.

Abstract: A motor is provided, including: a rotor that is arranged in a rotatable manner centered on a central axis and has a shaft and a rotor core arranged around the shaft; a stator arranged so as to face the rotor in a radial direction; and a detector located on an upper side of the rotor core in an axial direction. An upper surface of the rotor core in the axial direction has a first concave portion recessed downward in the axial direction, and a portion of the detector is inserted into the first concave portion. An electrical product including the motor is also provided.

Abstract: A motor includes a bearing holder and a first bearing. The bearing holder is fixed to a casing. The first bearing is interposed between the bearing holder and a shaft. The bearing holder includes a holder main body made of a resin and a ring made of a metal. The holder main body includes, around the central axis, a first arcuate portion including one or a plurality of through-holes passing therethrough in an axial direction and a second arcuate portion that does not include a through-hole. The first arcuate portion occupies a range of about ? or more of a total circumference of the holder main body in a circumferential direction. An outer ring of the first bearing is held by the ring.

Abstract: A securing member is provided with a first, second, and third strip member, and the strip members are folded and laminated. The first strip member has a strip-shaped first substrate layer and a first adhesive layer provided on a first surface of the first substrate layer; the second strip member has a strip-shaped second substrate layer positioned between the first and third strip members, and a third adhesive layer provided on a first surface of the second substrate layer; and the third strip member has a strip-shaped third substrate layer and a third adhesive layer provided on a first surface of the third substrate layer. A portion of the first adhesive layer is detachably adhered to a second surface of the second substrate layer; a portion of the second adhesive layer is detachably adhered to a second surface of the third substrate layer; and the second substrate layer has elasticity.

Abstract: A motor includes a rotor, a stator, a housing, a bus bar assembly, a cover fixed to the housing, and a circuit board. The bus bar assembly includes a bus bar, a wiring member, and a bus bar holder. The bus bar holder includes a main body portion, a connector portion, and a connection terminal holding portion. The cover directly or indirectly contacts a second side of the main body portion. The wiring member includes a circuit board connection terminal fixed to the connection terminal holding portion and an external power-supply connection terminal. At least one other portion of the wiring member is located closer to a second side of the motor than the external power-supply connection terminal.

Abstract: A motor includes a bearing holder and a first bearing. The bearing holder is fixed to a casing. The first bearing is interposed between the bearing holder and a shaft. The bearing holder includes a holder main body made of a resin and a ring made of a metal. The holder main body includes, around the central axis, a first arcuate portion including one or a plurality of through-holes passing therethrough in an axial direction and a second arcuate portion that does not include a through-hole. The first arcuate portion occupies a range of about ? or more of a total circumference of the holder main body in a circumferential direction. An outer ring of the first bearing is held by the ring.

Abstract: A control means configured to perform flow rate control in which the control means outputs a control signal to a flow control valve to control a valve opening such that a measured flow rate of gas measured by a flow meter matches a set flow rate adjusts intensity of the control signal such that an absolute value of a change amount of the valve opening becomes larger as measured temperature of the gas measured by a thermometer becomes further higher than reference temperature, while the absolute value of the change amount of the valve opening becomes smaller as the measured temperature becomes further lower than the reference temperature. Thereby, change of response time on changing the valve opening of the flow control valve due to the difference between the measured temperature of the gas and the reference temperature can be reduced.

Abstract: A motor includes a rotor, a stator, a housing, a bus bar assembly, a cover fixed to the housing, and a circuit board. The bus bar assembly includes a bus bar, a wiring member, and a bus bar holder. The bus bar holder includes a main body portion, a connector portion, and a connection terminal holding portion. The cover directly or indirectly contacts a second side of the main body portion. The wiring member includes a circuit board connection terminal fixed to the connection terminal holding portion and an external power-supply connection terminal. At least one other portion of the wiring member is located closer to a second side of the motor than the external power-supply connection terminal.

Abstract: A motor includes a rotor, a stator, a housing, a bus bar assembly, a cover fixed to the housing, and a circuit board. The bus bar assembly includes a bus bar, a wiring member, and a bus bar holder. The bus bar holder includes a main body portion, a connector portion, and a connection terminal holding portion. The cover directly or indirectly contacts a second side of the main body portion. The wiring member includes a circuit board connection terminal fixed to the connection terminal holding portion at a first side ahead of the end of the second side of the main body portion, and the end of the second side at the radially inner surface of the connection terminal holding portion is located at the first side ahead of the surface of the second side of the circuit board.

Abstract: A motor includes a rotor with a shaft, a stator, first and second bearings supporting the shaft, a bus bar assembly holding the second bearing, a circuit board, a sensor magnet fixed to the shaft, and a rotation sensor which is attached to the circuit board and faces a direction. The bus bar assembly includes a bus bar and a bus bar holder. The bus bar holder includes a cylindrical main body portion including an opening at a second side. The bus bar includes a coil connection portion that protrudes from an inner surface of the main body portion and is electrically connected to a coil of the stator. The end of the second side of the coil connection portion is located at a second side ahead of a surface of a first side of the circuit board.

Abstract: A control means configured to perform flow rate control in which the control means outputs a control signal to a flow control valve to control a valve opening such that a measured flow rate of gas measured by a flow meter matches a set flow rate adjusts intensity of the control signal such that an absolute value of a change amount of the valve opening becomes larger as measured temperature of the gas measured by a thermometer becomes further higher than reference temperature, while the absolute value of the change amount of the valve opening becomes smaller as the measured temperature becomes further lower than the reference temperature. Thereby, change of response time on changing the valve opening of the flow control valve due to the difference between the measured temperature of the gas and the reference temperature can be reduced.

Abstract: A flow control apparatus and a program are disclosed herein. A flow control apparatus includes a piezoelectric element coupled to a valve element configuring a flow regulating valve and that works the valve element to regulate a flow, a driving circuit that applies a voltage to the piezoelectric element to drive the piezoelectric element, an accepting means for accepting a target flow, and an output means for outputting a signal corresponding to the voltage applied to the piezoelectric element to the driving circuit, to change the flow so as to coincide with the target flow. When the target flow is changed, the output means transiently outputs a signal corresponding to a voltage value different from a target voltage value corresponding to the target flow after the change, and then the output means outputs a signal corresponding to a voltage change converging at the target voltage value.

Abstract: A motor includes a rotor, a stator, a housing, a bus bar assembly, a cover fixed to the housing, and a circuit board. The bus bar assembly includes a bus bar, a wiring member, and a bus bar holder. The bus bar holder includes a main body portion, a connector portion, and a connection terminal holding portion. The cover directly or indirectly contacts a second side of the main body portion. The wiring member includes a circuit board connection terminal fixed to the connection terminal holding portion at a first side ahead of the end of the second side of the main body portion, and the end of the second side at the radially inner surface of the connection terminal holding portion is located at the first side ahead of the surface of the second side of the circuit board.

Abstract: A motor includes a rotor with a shaft, a stator, first and second bearings supporting the shaft, a bus bar assembly holding the second bearing, a circuit board, a sensor magnet fixed to the shaft, and a rotation sensor which is attached to the circuit board and faces a direction. The bus bar assembly includes a bus bar and a bus bar holder. The bus bar holder includes a cylindrical main body portion including an opening at a second side. The bus bar includes a coil connection portion that protrudes from an inner surface of the main body portion and is electrically connected to a coil of the stator. The end of the second side of the coil connection portion is located at a second side ahead of a surface of a first side of the circuit board.

Abstract: A flow control apparatus and a program are disclosed herein. A flow control apparatus includes a piezoelectric element coupled to a valve element configuring a flow regulating valve and that works the valve element to regulate a flow, a driving circuit that applies a voltage to the piezoelectric element to drive the piezoelectric element, an accepting means for accepting a target flow, and an output means for outputting a signal corresponding to the voltage applied to the piezoelectric element to the driving circuit, to change the flow so as to coincide with the target flow. When the target flow is changed, the output means transiently outputs a signal corresponding to a voltage value different from a target voltage value corresponding to the target flow after the change, and then the output means outputs a signal corresponding to a voltage change converging at the target voltage value.