Abstract: There is provided an image-capturing device for an environment forming apparatus used for the environment forming apparatus. The environment forming apparatus includes an environment forming chamber configured to be adjusted to a predetermined environment, and a through-hole configured to connect the environment forming chamber to an outside. The image-capturing device for the environment forming apparatus includes: a camera; an inner tubular member; an outer tubular member configured to cover the inner tubular member; and an air blower. A first ventilation space is formed by an inside of the inner tubular member, and a second ventilation space is formed between the inner tubular member and the outer tubular member. Air is blown toward the camera by the air blower via one of the first ventilation space and the second ventilation space, and is exhausted via the other of the first ventilation space and the second ventilation space.

Abstract: According to one embodiment, first a guide pattern is formed above an object to processing, and then surface modification is performed on the guide pattern. Then a solution including a block copolymer is coated over the object to processing having the guide pattern formed thereon, and the block copolymer is made to phase separate over the object to processing. Subsequently, one component of the phase-separated block copolymer is removed by development. And with the guide pattern coated with other component of the block copolymer as a mask, the object to processing is patterned.

Abstract: According to one embodiment, first a guide pattern is formed above an object to processing, and then surface modification is performed on the guide pattern. Then a solution including a block copolymer is coated over the object to processing having the guide pattern formed thereon, and the block copolymer is made to phase separate over the object to processing. Subsequently, one component of the phase-separated block copolymer is removed by development. And with the guide pattern coated with other component of the block copolymer as a mask, the object to processing is patterned.

Abstract: A coater apparatus that coats a substrate with a chemical liquid includes a chemical liquid nozzle, a solvent nozzle, a solvent bath, a dummy dispense port, and an ionizer. The chemical liquid nozzle dispenses the chemical liquid onto the substrate. The solvent nozzle dispenses a solvent onto the substrate. The solvent bath contains a solvent and stores a tip of the chemical liquid nozzle when the chemical liquid nozzle is in standby such that the tip is exposed to a solvent vapor. The dummy dispense port exhausts the chemical liquid being dummy dispensed from the chemical liquid nozzle and stores the solvent nozzle when the solvent nozzle is in standby. The ionizer ionizes an atmosphere around the dummy dispense port.

Abstract: A testboard provides an interface between an IC tester and a device (16) being tested has a base unit (21) and a DUT unit (22). The base unit (21) has a plurality of connectors (24) each on a separate base card (25) which are to engage respective connectors (23) on a pin card (3) of the IC tester and a plurality cable harnesses (27) each having a connector (26) for the wires at one of its ends to be connected to a selected one of the connector (24). The DUT unit (22) has a socket board (14) with an IC socket (15) to accept the IC device (16) being tested and a plurality of connectors (29) engaged by separate second connectors (28) on the other end of the wires of a cable harness (27). A post housing and post connector (26a, 26b) can be provided at the connector of each base card to interchange the electrical connections between the connector at the end of a cable harness and the connector of a base card.

Abstract: The present invention relates to a device testing apparatus used for screening testing of semiconductor devices and the like, and having a constant temperature oven in which a through hole is formed passing from an outer wall to an inner wall, for maintaining an inner space at a constant temperature, and a test burn-in board on which a plurality of devices to be tested are mounted, provided inside the constant temperature oven. A first card has a plurality of first signal lines for inputting a signal to be supplied to the device to be tested, formed on a surface thereof, and there is provided a first male connector attached to one edge of the first card and connected to the plurality of first signal lines.