Patents by Inventor Masashi Tezuka

Masashi Tezuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus wherein temperature can be controlled
    Patent number: 4771730
    Abstract: A vacuum processing apparatus has a vacuum vessel within which a work to be processed is drawn and held fixed on a specimen table by an electrode functioning doubly as an electrostatic chuck, to which is connected a gas feeding pipe for feeding a gas affording good heat transmission between the mutually contacting surfaces of the work and the electrode thereby to control the temperature of the work.
    Type: Grant
    Filed: September 9, 1987
    Date of Patent: September 20, 1988
    Assignee: Kabushiki Kaisha Tokuda Seisakusho
    Inventor: Masashi Tezuka