Patents by Inventor Masashi Yano

Masashi Yano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200111645
    Abstract: A plasma processing method includes executing an etching process that includes supplying an etching gas into a process container in which a target substrate is supported on a second electrode serving as a lower electrode, and applying an RF power for plasma generation and an RF power for ion attraction to turn the etching gas into plasma and to subject the target substrate to etching. The etching process includes applying a negative DC voltage to a first electrode serving as an upper electrode during the etching to increase an absolute value of self-bias on the first electrode. The etching process includes releasing DC electron current generated by the negative DC voltage to ground through plasma and a conductive member disposed as a ring around the first electrode, by using a first state where the conductive member is connected to a ground potential portion.
    Type: Application
    Filed: December 10, 2019
    Publication date: April 9, 2020
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Akira KOSHIISHI, Masaru SUGIMOTO, Kunihiko HINATA, Noriyuki KOBAYASHI, Chishio KOSHIMIZU, Ryuji OHTANI, Kazuo KIBI, Masashi SAITO, Naoki MATSUMOTO, Yoshinobu OHYA, Manabu IWATA, Daisuke YANO, Yohei YAMAZAWA, Hidetoshi HANAOKA, Toshihiro HAYAMI, Hiroki YAMAZAKI, Manabu SATO
  • Patent number: 10546727
    Abstract: A plasma etching apparatus includes an upper electrode and a lower electrode, between which plasma of a process gas is generated to perform plasma etching on a wafer W. The apparatus further comprises a cooling ring disposed around the wafer, a correction ring disposed around the cooling ring, and a variable DC power supply directly connected to the correction ring, the DC voltage being preset to provide the correction ring with a negative bias, relative to ground potential, for attracting ions in the plasma and to increase temperature of the correction ring to compensate for a decrease in temperature of a space near the edge of the target substrate due to the cooling ring.
    Type: Grant
    Filed: September 7, 2016
    Date of Patent: January 28, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani, Kazuo Kibi, Masashi Saito, Naoki Matsumoto, Yoshinobu Ohya, Manabu Iwata, Daisuke Yano, Yohei Yamazawa, Hidetoshi Hanaoka, Toshihiro Hayami, Hiroki Yamazaki, Manabu Sato
  • Patent number: 10529539
    Abstract: An apparatus includes an upper electrode and a lower electrode for supporting a wafer disposed opposite each other within a process chamber. A first RF power supply configured to apply a first RF power having a relatively higher frequency, and a second RF power supply configured to apply a second RF power having a relatively lower frequency is connected to the lower electrode. A variable DC power supply is connected to the upper electrode. A process gas is supplied into the process chamber to generate plasma of the process gas so as to perform plasma etching.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: January 7, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani, Kazuo Kibi, Masashi Saito, Naoki Matsumoto, Manabu Iwata, Daisuke Yano, Yohei Yamazawa, Hidetoshi Hanaoka, Toshihiro Hayami, Hiroki Yamazaki, Manabu Sato
  • Publication number: 20190362435
    Abstract: Travel purpose determination according to the present disclosure, is provided with: a determination rule specifying date and time for allowing use of a transport system for business, a geographical area, and a destination; and a usage history acquisition unit that acquires an entry station, an exit station, usage date and time included in usage record of the transport system, user identification information, and location information. The travel purpose determination includes determining whether a purpose of travel is usage on business, based on acquired information and the determination rule.
    Type: Application
    Filed: May 22, 2019
    Publication date: November 28, 2019
    Applicant: HITACHI, LTD.
    Inventors: Youko HIRASHIMA, Kojin YANO, Masashi IMAMURA
  • Patent number: 9949371
    Abstract: The problem of the invention is to provide a resin composite electrolytic copper foil having further improved heat resistance and improved plate adhesion strength when plated after desmear treatment in the work process of an additive method. The solution is to form a roughened surface having a plurality of minute projections, a surface roughness (Rz) within a range of 1.0 pm to 3.0 pm and a lightness value of not more than 30 on one surface of an electrolytic copper foil (A), and form a layer of a resin composition (B) containing a block copolymerized polyimide resin (a) having a structure that imide oligomers of a first structural unit and a second structural unit are bonded alternately and repeatedly on the roughened surface.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: April 17, 2018
    Assignees: MITSUBISHI GAS CHEMICAL COMPANY, INC., PI R&D CO., LTD.
    Inventors: Mitsuru Nozaki, Akihiro Nomoto, Norikatsu Akiyama, Eiji Nagata, Masashi Yano
  • Patent number: 9769265
    Abstract: A communication system comprising computers and a management computer, wherein the computers include a communication control unit configured to control a communication using a session of a terminal. The communication control unit manages a database storing in a plurality of pieces of session information. The management computer includes property management information for managing a property of each of the plurality of pieces of session information. The session information migration control unit is configured to: detect a migration trigger of the plurality of pieces of session information stored in a first database; select the plurality of pieces of session information from the plurality of pieces of session information stored in the first database based on the property management information; determine a migration order for the selected plurality of pieces of session information based on the property of the each of the selected plurality of pieces of session information.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: September 19, 2017
    Assignee: HITACHI, LTD.
    Inventors: Masashi Yano, Tsutomu Hirao, Michitaka Okuno, Nodoka Mimura, Daisuke Ishii, Yuta Muto
  • Publication number: 20170257259
    Abstract: To reduce a load of an inspection process on a server apparatus . A computer system includes a server apparatus, a gateway apparatus, and a plurality of devices coupled to the gateway apparatus. The gateway apparatus retains a range of a normal value of a device, calculated based on device information, for the plurality of devices, and when device information related to a certain device is not included in a range of a normal value of the device, notifies the server apparatus of the fact that an anomaly with respect to the device has been detected. When the server apparatus receives from the gateway apparatus a notification of the fact that an anomaly has been detected, the server apparatus inspects device information related to the device in which the anomaly had been detected.
    Type: Application
    Filed: October 28, 2016
    Publication date: September 7, 2017
    Inventors: Nodoka MIMURA, Masashi YANO, Masayuki TAKASE, Taisuke UETA
  • Publication number: 20160360615
    Abstract: The problem of the invention is to provide a resin composite electrolytic copper foil having further improved heat resistance and improved plate adhesion strength when plated after desmear treatment in the work process of an additive method. The solution is to form a roughened surface having a plurality of minute projections, a surface roughness (Rz) within a range of 1.0 ?m to 3.0 ?m and a lightness value of not more than 30 on one surface of an electrolytic copper foil (A), and form a layer of a resin composition (B) containing a block copolymerized polyimide resin (a) having a structure that imide oligomers of a first structural unit and a second structural unit are bonded alternately and repeatedly on the roughened surface.
    Type: Application
    Filed: August 19, 2016
    Publication date: December 8, 2016
    Applicants: MITSUBISHI GAS CHEMICAL COMPANY, INC., PI R&D CO., LTD.
    Inventors: Mitsuru NOZAKI, Akihiro NOMOTO, Norikatsu AKIYAMA, Eiji NAGATA, Masashi YANO
  • Patent number: 9420590
    Abstract: Appropriate bandwidths are allocated to base stations in response to variations in the arrangement of mobile terminals and according to the type of mobile terminals. Mobile gateways disposed between a plurality of base stations connecting a plurality of mobile terminals and a service network include a base station information acquiring unit that acquires communication capacities of the base stations; a mobile terminal information acquiring unit that acquires a communication capacity of each type of the mobile terminals; a communication bandwidth estimating unit that estimates the communication bandwidths of the base stations on the basis of the acquired communication capacities of the base stations and the acquired communication capacities of mobile terminals; and a communication bandwidth control unit that controls communication bandwidths corresponding to the base stations on the basis of the estimated communication bandwidth.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: August 16, 2016
    Assignee: Hitachi, Ltd.
    Inventors: Masashi Yano, Nodoka Mimura, Naruhito Nakahara
  • Publication number: 20160065678
    Abstract: A communication system comprising computers and a management computer, wherein the computers include a communication control unit configured to control a communication using a session of a terminal. The communication control unit manages a database storing in a plurality of pieces of session information. The management computer includes property management information for managing a property of each of the plurality of pieces of session information. The session information migration control unit is configured to: detect a migration trigger of the plurality of pieces of session information stored in a first database; select the plurality of pieces of session information from the plurality of pieces of session information stored in the first database based on the property management information; determine a migration order for the selected plurality of pieces of session information based on the property of the each of the selected plurality of pieces of session information.
    Type: Application
    Filed: June 9, 2015
    Publication date: March 3, 2016
    Applicant: Hitachi, Ltd.
    Inventors: Masashi YANO, Tsutomu HIRAO, Michitaka OKUNO, Nodoka MIMURA, Daisuke ISHII, Yuta MUTO
  • Publication number: 20150302008
    Abstract: It is provided a control apparatus being configured to: calculate a number of groups to which plurality of data processing apparatus are to belong; determine an associated group of each of the plurality of data processing apparatus; determine an operational data item to be assigned to the associated group; determine as an assignment destination of the operational data item assigned to the associated group, any one of the data processing apparatus belonging to the associated group whose number is the minimum count or larger, and determine as an assignment destination of a redundant data item, the data processing apparatus that is different front the data processing apparatus corresponding to an assignment destination of the operational data item; and assign based on determination results, the group of operational data items and a group of the redundant data items to the plurality of data processing apparatus.
    Type: Application
    Filed: April 17, 2015
    Publication date: October 22, 2015
    Applicant: HITACHI, LTD.
    Inventors: Daisuke ISHII, Masashi YANO, Michitaka OKUNO, Nodoka MIMURA, Yuta MUTO
  • Publication number: 20150222515
    Abstract: A management and orchestration server which manages a plurality of types of virtualized nodes included in server group includes a scaling executing unit configured to command the server group to scale virtual machines included in each of the plurality of types of virtualized nodes, a traffic load measuring unit configured to manage a traffic load of each of the virtual machines, and a scaling amount determining unit configured to determine a number of the virtual machines to be scaled. In this case, the traffic load measuring unit acquires a traffic load for each of the traffic types to be processed by each of the plurality of types of virtualized nodes, and the scaling amount determining unit determines the type of virtualized node for which virtual machines are to be scaled and a number of machines to be scaled based on the traffic loads of the traffic types.
    Type: Application
    Filed: December 22, 2014
    Publication date: August 6, 2015
    Inventors: Nodoka MIMURA, Masashi YANO, Michitaka OKUNO, Yuta MUTO, Daisuke ISHII
  • Publication number: 20150222561
    Abstract: A scale-out of a gateway server is realized according to a rapid increase in communication volume, without incurring system down. A high-quality communication is provided to priority users even during scaling out the gateway server. A high-quality communication is continuously provided to priority users without incurring the system down even if the scale-out/in of the gateway server is repeated. A bandwidth control apparatus transmits packets to plural virtual nodes equipped in a server device, reads the packets from any high priority queue and any low priority queue which are associated with the subject apparatus, and limits the packets to an upper limit bandwidth determined for each of the virtual nodes, and changes association of the high priority queues and the low priority queues with the virtual node bandwidth limiters according to an instruction from the control server for determining the scale-out/in of the virtual node.
    Type: Application
    Filed: November 3, 2014
    Publication date: August 6, 2015
    Inventors: Michitaka OKUNO, Masashi YANO, Nodoka MIMURA, Yuta MUTO, Daisuke ISHII
  • Patent number: 9068064
    Abstract: A fluorine rubber composition that provides high tensile strength and high elongation after vulcanization mutually compatible and from which favorable mechanical characteristics are obtained even in a high-temperature environment; and a bladder for tire production, which is manufactured using the same are provided. The fluorine rubber composition includes a rubber component containing a fluorine rubber and carbon black, wherein the carbon black has a specific surface area by nitrogen adsorption (N2SA) of 25 m2/g or more and not more than 180 m2/g and a dibutyl phthalate (DBP) absorption amount of 60 mL/100 g or more and not more than 180 mL/100 g; and in a kneading step (A) of compounding the carbon black in the rubber component, an average shear rate of a rotor surface of a kneading machine is 100 (1/sec) or more, and a kneading maximum temperature Tm is 120° C. or higher and not higher than 200° C.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: June 30, 2015
    Assignees: BRIDGESTONE CORPORATION, E.I. DU PONT DE NEMOURS AND COMPANY, DAIKEN INDUSTRIES, LTD.
    Inventors: Masashi Yano, Daisuke Ota, Shuichi Okutsu
  • Patent number: 9068053
    Abstract: A fluoro rubber composition which is able to make both a high tensile strength and a high elongation at break after vulcanization compatible with each other and from which favorable mechanical characteristics are obtained even in a high-temperature environment; and a bladder for tire fabrication, which is manufactured using the same are provided. The fluoro rubber composition includes a rubber component containing a fluoro rubber and carbon black, wherein in a dynamic viscoelasticity test of an unvulcanized rubber by a rubber process analyzer (RPA) (measurement temperature: 100° C., measurement frequency: 1 Hz), a difference ?GA? (G?(1%)?G?(100%)) between a shear modulus G? (1%) at the time of a dynamic strain of 1% and a shear modulus G? (100%) at the time of a dynamic strain of 100% is 120 kPa or more and not more than 3,000 kPa.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: June 30, 2015
    Assignees: BRIDGESTONE CORPORATION, E.I. DU PONT DE NEMOURS AND COMPANY, DAIKIN INDUSTRIES, LTD.
    Inventors: Masashi Yano, Daisuke Ota, Shuichi Okutsu
  • Publication number: 20150045079
    Abstract: Appropriate bandwidths are allocated to base stations in response to variations in the arrangement of mobile terminals and according to the type of mobile terminals. Mobile gateways disposed between a plurality of base stations connecting a plurality of mobile terminals and a service network include a base station information acquiring unit that acquires communication capacities of the base stations; a mobile terminal information acquiring unit that acquires a communication capacity of each type of the mobile terminals; a communication bandwidth estimating unit that estimates the communication bandwidths of the base stations on the basis of the acquired communication capacities of the base stations and the acquired communication capacities of mobile terminals; and a communication bandwidth control unit that controls communication bandwidths corresponding to the base stations on the basis of the estimated communication bandwidth.
    Type: Application
    Filed: July 31, 2014
    Publication date: February 12, 2015
    Inventors: Masashi YANO, Nodoka MIMURA, Naruhito NAKAHARA
  • Patent number: 8848665
    Abstract: After a first base station connects to a first mobile terminal, a first GW (gateway) receives a request for connection between the first mobile terminal and a second GW and identifiers of the second GW and the first mobile terminal and transmits identifiers of the first mobile terminal and the first GW to the second GW. The second GW transmits an MPLS allocation flag to the first GW. The first GW transmits an MPLS allocation signal including an identifier of the first mobile terminal to the second GW via a second NW (network) apparatus. The first base station receives an identifier of the first GW and the MPLS allocation flag from the first GW via a management server and transmits the MPLS allocation signal including the identifier of the first mobile terminal to the first GW via a first NW apparatus.
    Type: Grant
    Filed: December 15, 2011
    Date of Patent: September 30, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Masashi Yano, Nodoka Mimura, Masahiro Takatori, Naruhito Nakahara
  • Patent number: 8831595
    Abstract: In a wireless communication system including a plurality of base station controllers different in wireless communication method, each of which accommodates a plurality of base stations, a home agent apparatus connected to the base station controllers, and a monitoring apparatus connected to each of the base stations and the base station controllers, the monitoring apparatus acquires communication quality information of each wireless terminal from each of the base stations, and selects a wireless base station having a wireless communication path suitable for the wireless terminal from among wireless base stations different in communication method to which the wireless terminal is connected.
    Type: Grant
    Filed: January 18, 2008
    Date of Patent: September 9, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Tsutomu Uchida, Seishi Hanaoka, Masashi Yano, Naruhito Nakahara
  • Patent number: 8649763
    Abstract: In order to solve the problem in that information relating to a specific purpose can be saved in the internal memory of a mobile apparatus on which a permanent memory is mounted while information relating to other purpose cannot be saved in the internal memory of the apparatus, the purpose of each telephone call is distinguished by sending a non-telephone type notice before transferring the call and thus the user can determine whether the call should be saved or not.
    Type: Grant
    Filed: July 30, 2008
    Date of Patent: February 11, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Yasuhiko Sasaki, Masashi Yano, Hideo Munehiro, Noriyuki Sugiura, Toru Ishikawa
  • Publication number: 20130336213
    Abstract: In packet communication using TCP, a gateway device for relaying communication packets between a mobile node and a correspondent node, temporarily rewrites a parameter of the receive window size of the ACK packet of the TCP communication from the mobile node, to adjust the amount of communication packets transmitted from the correspondent node. Whit this configuration, it is possible to reduce the packet loss due to error control for the existing TCP communication with respect to the mobile node, without converting the mobile node and the correspondent node.
    Type: Application
    Filed: June 18, 2013
    Publication date: December 19, 2013
    Inventors: Nodoka MIMURA, Masashi YANO, Masahiro TAKATORI, Naruhito NAKAHARA