Patents by Inventor Masasuke Takata

Masasuke Takata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication method and fabrication apparatus for fabricating metal oxide thin film
    Patent number: 8591991
    Abstract: A fabrication method for fabricating a metal oxide film introduces H2 gas and O2 gas or, H2O2 gas, into a catalytic reactor to make contact with a catalyst to generate H2O gas. The H2O gas that is generated is jetted from the catalytic reactor to react with a metal compound gas, to thereby deposit the metal oxide thin film on a substrate and fabricate the metal oxide thin film.
    Type: Grant
    Filed: May 16, 2008
    Date of Patent: November 26, 2013
    Assignees: National University Corporation Nagaoka University of Technology, Tokyo Electron Limited
    Inventors: Kanji Yasui, Hiroshi Nishiyama, Masatoshi Tsukichi, Yasunobu Inoue, Masasuke Takata
  • FABRICATION METHOD AND FABRICATION APPARATUS FOR FABRICATING METAL OXIDE THIN FILM
    Publication number: 20100166958
    Abstract: Object To provide a technique for efficiently forming a metal oxide thin film made of zinc oxide or the like on a substrate at a low cost, without requiring a large amount of electrical energy. Means of Solution H2 gas and O2 gas or, H2O2 gas, is introduced into a catalytic reactor to make contact with a catalyst to generate H2O gas, and the H2O gas is jetted from the catalytic reactor to react with a metal compound gas, to thereby deposit a metal oxide thin film on a substrate and fabricate the metal oxide thin film.
    Type: Application
    Filed: May 16, 2008
    Publication date: July 1, 2010
    Applicants: National University Corporation Nagaoka University of Technology, Tokyo Electron Limited
    Inventors: Kanji Yasui, Hiroshi Nishiyama, Masatoshi Tsukichi, Yasunori Inoue, Masasuke Takata