Abstract: There is provided a displacement measuring apparatus capable of being used in a vacuum environment. The displacement measuring apparatus includes a scale and a detection head part disposed in such a manner as to be relatively displaceable to the scale and as to face the scale with a predetermined gap. The detection head part detects a displacement or position relative to the scale. The scale is disposed in a vacuum. The detection head part is housed in a housing holder separating an atmospheric environment side from a vacuum environment side.

Abstract: A scale attachment device configured to attach a tape scale for a linear encoder includes a fixing block and housing members. The fixing block fixes the central part of the tape scale in the lengthwise direction by pressing the central part onto a target object. The housing members include a groove to house a remaining part of the scale on both sides of the fixing block. The tape scale is inserted into the groove in the lengthwise direction with its back surface facing the bottom surface of the groove of the housing member, and thus housed in the groove. The width dimension of the opening of the groove is smaller than the width dimension of the scale.

Abstract: A scale attachment device configured to attach a tape scale for a linear encoder includes a fixing block and housing members. The fixing block fixes the central part of the tape scale in the lengthwise direction by pressing the central part onto a target object. The housing members include a groove to house a remaining part of the scale on both sides of the fixing block. The tape scale is inserted into the groove in the lengthwise direction with its back surface facing the bottom surface of the groove of the housing member, and thus housed in the groove. The width dimension of the opening of the groove is smaller than the width dimension of the scale.