Abstract: The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

Abstract: The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

Abstract: A processing apparatus includes a height measurement device configured to perform first measurement of measuring a height of at least one measurement point of a measurement target region and second measurement of measuring heights of a plurality of measurement points of the measurement target region, a pressure measurement device configured to measure an air pressure that influences results of the first measurement and the second measurement by the height measurement device, and a calculator configured to obtain shape information representing a shape of the measurement target region by correcting the result of the second measurement by the height measurement device based on the result of the first measurement by the height measurement device and a result of measurement of the air pressure by the pressure measurement device.

Abstract: The present invention provides a measurement method including while driving a measurement target region of a surface of a substrate in a first direction with respect to a measurement unit, obtaining first measurement information indicating a height of the measurement target region in each of a plurality of first measurement lines parallel to the first direction and different from each other by measuring each measurement line by the measurement unit, and while driving the measurement target region with respect to the measurement unit in a second direction crossing all of the plurality of first measurement lines, obtaining second measurement information indicating a height of the measurement target region in one second measurement line parallel to the second direction by measuring the second measurement line by the measurement unit.

Abstract: A small and light helical antenna, with a high gain, includes arranging the dielectric cylinder with a helix conductor on the conductive plate and arranging a thin rectangular conductive plate between the lower end of the helix conductor and the feed point in a predetermined position of the conductive plate. The impedance matching is between the input impedance of the helix conductor and a power feeder. The upper and lower conductive plates constitute parallel plate waveguide space, and the probe which comes into the parallel plate waveguide space is in the lower conductive plate side, and the lower end of a thin rectangular conductive plate is connected with the lower end of a probe.

Abstract: A small and light helical antenna, with high gain, can be realized by arranging the dielectric cylinder 1 with a helix conductor 2 on the conductive plate 3, and by arranging a thin rectangular conductive plate 5 between the lower end of helix conductor 2, and the feed point in the predetermined position of the conductive plate 3.