Abstract: A technique to suppress a remote procedure call from a client by a server is provided. An information processing system is provided that includes a client component and a server component, wherein a program of the client component makes an RPC for a function of the server component. The client component includes a holding unit that holds return value information of the function, and a calling unit that receives an RPC request for the function from the program. The server component includes an execution unit that returns a return value of the function to set return value information. When the return value information has not been set in the holding unit, the calling unit makes an RPC for the function. When the return value information has been set in the holding unit, the calling unit returns the return value included in the return value information without making an RPC.

Abstract: A technique to suppress a remote procedure call from a client by a server is provided. An information processing system is provided that includes a client component and a server component, wherein a program of the client component makes an RPC for a function of the server component. The client component includes a holding unit that holds return value information of the function, and a calling unit that receives an RPC request for the function from the program. The server component includes an execution unit that returns a return value of the function to set return value information. When the return value information has not been set in the holding unit, the calling unit makes an RPC for the function. When the return value information has been set in the holding unit, the calling unit returns the return value included in the return value information without making an RPC.

Abstract: An apparatus comprises a grouping unit dividing substrates into groups, and determining reference and non-reference substrates for each group, a measurement unit measuring a first number of points for the reference substrate, and measuring a second number, smaller than the first number, of points for the non-reference substrate, a correction value determining unit determining a first correction value to position the reference substrate, and a second correction value to position the non-reference substrate, and an exposure unit exposing the reference substrate by positioning it based on the first correction value, and exposing the non-reference substrate by positioning it based on the second correction value, the correction value determining unit determining the first correction value based on the measurement of the reference substrate, and determining the second correction value based on the measurement of the non-reference substrate, and the measurement of the reference substrate or the first correction valu

Abstract: An apparatus comprises a grouping unit dividing substrates into groups, and determining reference and non-reference substrates for each group, a measurement unit measuring a first number of points for the reference substrate, and measuring a second number, smaller than the first number, of points for the non-reference substrate, a correction value determining unit determining a first correction value to position the reference substrate, and a second correction value to position the non-reference substrate, and an exposure unit exposing the reference substrate by positioning it based on the first correction value, and exposing the non-reference substrate by positioning it based on the second correction value, the correction value determining unit determining the first correction value based on the measurement of the reference substrate, and determining the second correction value based on the measurement of the non-reference substrate, and the measurement of the reference substrate or the first correction valu

Abstract: A technique to suppress a remote procedure call from a client by a server is provided. An information processing system is provided that includes a client component and a server component, wherein a program of the client component makes an RPC for a function of the server component. The client component includes a holding unit that holds return value information of the function, and a calling unit that receives an RPC request for the function from the program. The server component includes an execution unit that returns a return value of the function to set return value information. When the return value information has not been set in the holding unit, the calling unit makes an RPC for the function. When the return value information has been set in the holding unit, the calling unit returns the return value included in the return value information without making an RPC.

Abstract: An apparatus comprises a grouping unit dividing substrates into groups, and determining reference and non-reference substrates for each group, a measurement unit measuring a first number of points for the reference substrate, and measuring a second number, smaller than the first number, of points for the non-reference substrate, a correction value determining unit determining a first correction value to position the reference substrate, and a second correction value to position the non-reference substrate, and an exposure unit exposing the reference substrate by positioning it based on the first correction value, and exposing the non-reference substrate by positioning it based on the second correction value, the correction value determining unit determining the first correction value based on the measurement of the reference substrate, and determining the second correction value based on the measurement of the non-reference substrate, and the measurement of the reference substrate or the first correction valu