Patents by Inventor Masateru Doi
Masateru Doi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11473904Abstract: A measurement probe of the present disclosure that scans a surface of a measurement object to measure a three-dimensional shape or the like of the surface of the measurement object includes a first movable portion having a stylus, a second movable portion that is connected to the first movable portion to be movable in a Z direction, a third movable portion that is connected to the second movable portion to be movable in the Z direction, a first position measurer that measures a first position of the first movable portion in the Z direction, a second position measurer that measures a second position of the second movable portion in the Z direction, and a third position measurer that measures a third position of the third movable portion in the Z direction. A first relative position is calculated based on the first position and the second position. A second relative position is calculated based on the first position and the third position.Type: GrantFiled: October 22, 2020Date of Patent: October 18, 2022Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Keishi Kubo, Takashi Inoue, Masateru Doi, Makoto Okazaki, Yukiya Usui, Takanori Funabashi
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Publication number: 20210123725Abstract: A measurement probe of the present disclosure that scans a surface of a measurement object to measure a three-dimensional shape or the like of the surface of the measurement object includes a first movable portion having a stylus, a second movable portion that is connected to the first movable portion to be movable in a Z direction, a third movable portion that is connected to the second movable portion to be movable in the Z direction, a first position measurer that measures a first position of the first movable portion in the Z direction, a second position measurer that measures a second position of the second movable portion in the Z direction, and a third position measurer that measures a third position of the third movable portion in the Z direction. A first relative position is calculated based on the first position and the second position. A second relative position is calculated based on the first position and the third position.Type: ApplicationFiled: October 22, 2020Publication date: April 29, 2021Inventors: KEISHI KUBO, TAKASHI INOUE, MASATERU DOI, MAKOTO OKAZAKI, YUKIYA USUI, TAKANORI FUNABASHI
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Patent number: 8006402Abstract: A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle ? of the stylus displacement vector D that is caused by a frictional force between a stylus 32 and the measuring surface 5a during scanning of the measuring surface 5a by the stylus 32. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylus 32 relative to the probe 5. Movement of an XY-stage 7 is controlled so that the probe 6 moves in accordance with the moving vector M.Type: GrantFiled: June 2, 2009Date of Patent: August 30, 2011Assignee: Panasonic CorporationInventors: Keiichi Yoshizumi, Masateru Doi, Takayuki Kurata
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Publication number: 20090299692Abstract: A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle ? of the stylus displacement vector D that is caused by a frictional force between a stylus 32 and the measuring surface 5a during scanning of the measuring surface 5a by the stylus 32. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylus 32 relative to the probe 5. Movement of an XY-stage 7 is controlled so that the probe 6 moves in accordance with the moving vector M.Type: ApplicationFiled: June 2, 2009Publication date: December 3, 2009Inventors: Keiichi YOSHIZUMI, Masateru Doi, Takayuki Kurata
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Patent number: 7178393Abstract: A measuring apparatus including a fixed stator, a rotor to rotate in the state of being disposed outside the center of rotation of the stator, a retaining mechanism for retaining a thin board on the rotor, and a measuring section to measure physical properties of the thin board. This construction makes it possible to avoid wind generated by rotation of the rotor in the vicinity of the thin board, and to suppress vibration of the thin board. Further, since a portion exposed to the thin board can be minimized, safe measurement can be implemented.Type: GrantFiled: October 27, 2004Date of Patent: February 20, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Keishi Kubo, Masateru Doi, Naofumi Hino, Hiroyuki Mochizuki, Syojiro Satake
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Patent number: 7065893Abstract: A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.Type: GrantFiled: December 20, 2004Date of Patent: June 27, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Takaaki Kassai, Keishi Kubo, Masateru Doi, Hiroyuki Mochizuki, Keiichi Yoshizumi
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Patent number: 7012680Abstract: A method for a quantitative evaluation of a substrate such as wafer defines a number of sequential first regions so that each of the first regions overlaps the adjacent region. A surface data (e.g., thickness data) in each of the first regions is used to determine a normal vector representing a surface configuration (e.g., thickness variation) of the first region. Then, an angular difference between the normal vectors is determined for each combination of adjacent two first regions. Subsequently, the determined angular difference is compared with a reference to evaluate a quality of a second region including at least one of the first regions, e.g., chip region, strip-like region and/or the entire of the wafer.Type: GrantFiled: July 15, 2003Date of Patent: March 14, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Keishi Kubo, Masateru Doi, Hiroyuki Motizuki, Keiichi Yoshizumi
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Publication number: 20050223791Abstract: In the present invention, there are provided a fixed stator, a rotor to rotate in the state of being disposed outside the center of rotation of the stator, a retaining mechanism for retaining the thin board on the rotor, and a measuring section to measure physical properties of the thin board, which makes it possible to avoid wind generated by rotation of the rotor in the vicinity of the thin board, and to suppress vibration of the thin board. Further, since a portion exposed to the thin board can be minimized, safe measurement can be implemented.Type: ApplicationFiled: October 27, 2004Publication date: October 13, 2005Inventors: Keishi Kubo, Masateru Doi, Naofumi Hino, Hiroyuki Mochizuki, Syojiro Satake
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Publication number: 20050204573Abstract: A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.Type: ApplicationFiled: December 20, 2004Publication date: September 22, 2005Inventors: Takaaki Kassai, Keishi Kubo, Masateru Doi, Hiroyuki Mochizuki, Keiichi Yosizumi
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Publication number: 20040090639Abstract: A method for a quantitative evaluation of a substrate such as wafer defines a number of sequential first regions so that each of the first regions overlaps the adjacent region. A surface data (e.g., thickness data) in each of the first regions is used to determine a normal vector representing a surface configuration (e.g., thickness variation) of the first region. Then, an angular difference between the normal vectors is determined for each combination of adjacent two first regions. Subsequently, the determined angular difference is compared with a reference to evaluate a quality of a second region including at least one of the first regions, e.g., chip region, strip-like region and/or the entire of the wafer.Type: ApplicationFiled: July 15, 2003Publication date: May 13, 2004Inventors: Keishi Kubo, Masateru Doi, Hiroyuki Motizuki, Keiichi Yoshizumi
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Patent number: 5616916Abstract: Substantially collimated displacement detection light is led to a first lens and condensed by the first lens to proximities to a reflecting surface of a probe. The reflected light is displaced by an atomic force acting against a surface of a sample, where the reflected light varies in reflection angle according to the displacement. The displaced light is lead to the first lens, changed in direction by a mirror, and detected by magnifying the displacement of the probe.Type: GrantFiled: November 27, 1995Date of Patent: April 1, 1997Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Koji Handa, Keishi Kubo, Masateru Doi, Keiichi Yoshizumi