Abstract: A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; a first coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to each of the top plate and the base plate; and a second coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.

Abstract: A temperature regulation device includes: a first temperature regulation unit that regulates a temperature of a liquid; and a second temperature regulation unit that regulates a temperature of the liquid supplied from the first temperature regulation unit. The first temperature regulation unit includes: a first flow path module having a first flow path of the liquid; and a base module that regulates a temperature of the liquid of the first flow path. The second temperature regulation unit includes: a second flow path module having a second flow path in which the liquid from the first flow path flows; and a Peltier module that regulates a temperature of the liquid of the second flow path. The base module regulates a temperature of the Peltier module.

Abstract: A thermoelectric module of the invention includes: first and second thermoelectric elements; a first electrode having a plate-shaped body whose first surface is bonded to a first end surface of the first thermoelectric element and a first end surface of the second thermoelectric element; a second electrode bonded to a second end surface of the first thermoelectric element; and a third electrode bonded to a second end surface of the thermoelectric element. The first electrode includes: a first cutout formed at a first side in a width direction; and a second cutout formed at a second side in the width direction. In the width direction, at least one of the first cutout or the second cutout is present in a section between the first side and the second side of the first electrode.

Abstract: A temperature regulation device includes: a first temperature regulation unit that regulates a temperature of a liquid; and a second temperature regulation unit that regulates a temperature of the liquid supplied from the first temperature regulation unit. The first temperature regulation unit includes: a first flow path module having a first flow path of the liquid; and a base module that regulates a temperature of the liquid of the first flow path. The second temperature regulation unit includes: a second flow path module having a second flow path in which the liquid from the first flow path flows; and a Peltier module that regulates a temperature of the liquid of the second flow path. The base module regulates a temperature of the Peltier module.

Abstract: A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; and a sealing member that comes into contact with each of the top plate and the base plate.

Abstract: A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; a first coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to each of the top plate and the base plate; and a second coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.

Abstract: A thermoelectric module of the invention includes: first and second thermoelectric elements; a first electrode having a plate-shaped body whose first surface is bonded to a first end surface of the first thermoelectric element and a first end surface of the second thermoelectric element; a second electrode bonded to a second end surface of the first thermoelectric element; and a third electrode bonded to a second end surface of the thermoelectric element. The first electrode includes: a first cutout formed at a first side in a width direction; and a second cutout formed at a second side in the width direction. In the width direction, at least one of the first cutout or the second cutout is present in a section between the first side and the second side of the first electrode.