Abstract: There is provided a technique that includes: forming a film containing an element and nitrogen on a substrate by performing a cycle including: (a) forming a first layer by supplying a source gas containing the element and a halogen element to the substrate; (b) generating a first active species by plasma-exciting and supplying an elemental gas containing the first active species to the substrate; and (c) forming a second layer by generating a second active species by plasma-exciting a reactive gas containing nitrogen and supplying the reactive gas containing the second active species to the substrate, wherein (b) includes generating a third active species by plasma-exciting and supplying a compound gas containing the third active species to the substrate, and a ratio of a supply amount of the compound gas to that of the elemental gas is set to be lower than ½ in (b).

Abstract: There is included (a) loading a substrate into a process container; (b) performing a process of forming a film on the substrate in the process container by alternately or simultaneously performing, a predetermined number of times, supplying a precursor gas from a first supplier to the substrate, and supplying a reaction gas from a second supplier to the substrate; (c) unloading the processed substrate from an interior of the process container; and (d) oxidizing at least one part of a film formed inside the process container in (b) so as to change the at least one part into an oxide film in a state in which the processed substrate is unloaded from the interior of the process container, wherein in (d), an oxygen-containing gas and a hydrogen-containing gas are supplied into the process container and at that time, the hydrogen-containing gas is supplied toward the first supplier.

Abstract: A composition for aqueous ink contains water and a coloring material, wherein the calcium ion content x (ppm) and the oxalate ion content y (ppm) in the composition for aqueous ink jet satisfy the relation of y?3491.8x?3.386.

Abstract: A substrate processing apparatus includes a discharge part including a nozzle configured to discharge a processing liquid onto a substrate; a liquid feeder configured to feed the processing liquid to the discharge part; a replenishment part configured to replenish the liquid feeder with the processing liquid to be fed to the discharge part; a connector including a switching valve configured to open/close a flow path between the replenishment part and the liquid feeder; a filter configured to remove foreign matters contained in the processing liquid; a replenishment preparation part configured to open the switching valve after reducing a pressure difference between the inside of the replenishment part and the liquid feeder; and a replenishment controller configured to start replenishment of the processing liquid from the replenishment part to the liquid feeder in a state in which the switching valve is opened by the replenishment preparation part.

Abstract: A substrate processing apparatus includes a discharge part including a nozzle configured to discharge a processing liquid onto a substrate; a liquid feeder configured to feed the processing liquid to the discharge part; a replenishment part configured to replenish the liquid feeder with the processing liquid to be fed to the discharge part; a connector including a switching valve configured to open/close a flow path between the replenishment part and the liquid feeder; a filter configured to remove foreign matters contained in the processing liquid; a replenishment preparation part configured to open the switching valve after reducing a pressure difference between the inside of the replenishment part and the liquid feeder; and a replenishment controller configured to start replenishment of the processing liquid from the replenishment part to the liquid feeder in a state in which the switching valve is opened by the replenishment preparation part.

Abstract: Image data is provided which has image conversion parameters recorded in an image format in an unphotographed area of an annular image, the annular image being shot by an omnidirectional camera. Thus the image conversion parameters are stored or transmitted along with the annular image in the same format.

Abstract: Method for producing a sputtering target with a lowered oxygen content by providing an alloy selected from the group consisting of NiFe, CoCrPt, CoCrPtB, CoPt, PtMn, FeAlSi, FeCo, and FeMn; adding an oxygen scavenger element to the molten alloy selected from the group consisting of Group 4A, 3B and 4B elements; melting the alloy and the oxygen scavenger; reacting the oxygen scavenger element with oxygen in the melt to reduce the oxygen content of the alloy to a level of not more than 50 ppm and achieving a residual oxygen scavenger element content of not more than 100 ppm.

Abstract: A sputtering target with a lowered oxygen content is provided which can prevent a deterioration in properties of a magnetic film caused by unavoidably included oxygen present in an alloy material system. The sputtering target contains an oxygen scavenger comprising an element capable of reducing metal components constituting the sputtering target, the lowered oxygen content of the sputtering target having been achieved by the oxygen scavenger.

Abstract: The method of making the metal fiber sintered body includes making a coiled material by coiling a thin sheet of Fe--Cr--Al--La, Fe--Cr--Al--Y or Fe--Cr--Al--Ce stainless steel; making a tow of Fe--Cr--Al--La, Fe--Cr--Al--Y or Fe--Cr--Al--Ce continuous fibers by lathe turning an end face of the coiled material at a tool feed speed of from 5 to 40 .mu.m/rev; extending the tow in a width direction and cutting the tow with a roller type cutting assembly to form Fe--Cr--Al--La, Fe--Cr--Al--Y or Fe--Cr--Al--Ce stainless steel fibers having a fiber length of 20 to 200 mm; feeding the Fe--Cr--Al--La, Fe--Cr--Al--Y or Fe--Cr--Al--Ce stainless steel fibers having the fiber length of 20 to 200 mm to a conveyor; dropping the stainless steel fibers onto the conveyor and dispersing the stainless steel fibers by making an air current act on the stainless steel fibers; transporting the resulting sheet-shaped accumulation on the conveyor and compressing it to form a web and sintering the web.

Abstract: A filter is provided for treating carbon-based particles in exhaust gas discharged from a diesel internal combustion engine, etc., said filter providing in addition to a high throughput capacity, excellent durability, and good economic and maintenance properties, and a device for treating carbon-based particles in exhaust gas having a high throughput capacity, the regeneration of which is easy. This filter is obtained by cutting an end face of a coiled material that is obtained by winding a sheet of a high-temperature resistant stainless steel having resistance heat-generating properties to produce fibers, gathering the thus-produced fibers to form a web, sintering the web, heat-treating the sintered web to form an alumina film on the surface of the sintered fibers, and optionally supporting a catalyst on the alumina film.

Abstract: An improved process is provided for preparing a porous ceramic product. By this process, a mixture of metal grains, ceramic grains, and short glass fibers is molded by a slurry casting method and dried and then sintered by heating in an oxidizing or nitriding gaseous atmosphere.