Abstract: There is a mounting pad for placing an object, comprising: a base; and an annular outer edge portion that is provided on one surface of the base, projects in a direction intersecting a surface direction of said one surface to surround an outer edge of said one surface, and is to be in contact with the object, wherein a thickness of the outer edge portion in at least one portion of the outer edge portion is different from a thickness of the outer edge portion in the other portions of outer edge portion.

Abstract: A substrate processing system includes a vacuum transfer module, a substrate processing module, an atmospheric transfer module, a load-lock module, at least one substrate transfer robot disposed in the vacuum transfer module and the atmospheric transfer module, and having at least one end effector, and a controller configured to control a particle removal operation. The particle removal operation includes transferring said at least one end effector in any one of the vacuum transfer module, the substrate processing module, the load-lock module, and the atmospheric transfer module in a state where at least one charging member that is charged is placed on said at least one end effector.

Abstract: An optical pickup including an actuator having a holder supporting portion for movably supporting a lens holder with an objective lens via a supporting member, a base member for mounting the holding supporting portion thereon, and an electromagnetic driving section for driving the lens holder in at least the focusing direction, an optical chassis for mounting the base member thereon, a light-emitting element for emitting a light beam to a disc via the objective lens, and a light receiving element for receiving the feedback light beam from the disc. The base member has a through hole formed at a position opposing the bottom surface of the lens holder and having such a size that the lens holder can be loosely fitted therein. The optical chassis has a stopper portion opposing the bottom surface of the lens holder via the through hole so as to regulate the allowable amount of movement of the lens holder toward the side opposite from the disc in the focusing direction.

Abstract: An optical pickup moving mechanism including an optical pickup and a movement guide member. The optical pickup has a base with an objective lens mounted thereon and with a to be guided portion being projected sideways thereof. The movement guide member has a guide surface which is extended in a predetermined direction and supporting the base slidably through the to be guided portion. The base is operable to slid along the guide surface of the movement guide member, thereby allowing the optical pickup to move radially of a disc. According to this construction, it is possible to attain the reduction of cost and weight of the optical pickup moving mechanism and suppress the growth of wear caused by sliding contact of the base and the movement guide member with each other, thus ensuring high reliability.

Abstract: An optical pickup including an actuator having a holder supporting portion for movably supporting a lens holder with an objective lens via a supporting member, a base member for mounting the holding supporting portion thereon, and an electromagnetic driving section for driving the lens holder in at least the focusing direction, an optical chassis for mounting the base member thereon, a light-emitting element for emitting a light beam to a disc via the objective lens, and a light receiving element for receiving the feedback light beam from the disc. The base member has a through hole formed at a position opposing the bottom surface of the lens holder and having such a size that the lens holder can be loosely fitted therein. The optical chassis has a stopper portion opposing the bottom surface of the lens holder via the through hole so as to regulate the allowable amount of movement of the lens holder toward the side opposite from the disc in the focusing direction.

Abstract: An optical pickup moving mechanism including an optical pickup and a movement guide member. The optical pickup has a base with an objective lens mounted thereon and with a to be guided portion being projected sideways thereof. The movement guide member has a guide surface which is extended in a predetermined direction and supporting the base slidably through the to be guided portion. The base is operable to slid along the guide surface of the movement guide member, thereby allowing the optical pickup to move radially of a disc. According to this construction, it is possible to attain the reduction of cost and weight of the optical pickup moving mechanism and suppress the growth of wear caused by sliding contact of the base and the movement guide member with each other, thus ensuring high reliability.