Abstract: A method for manufacturing a semiconductor device that includes forming a ruthenium film on a conductive film formed on a substrate for manufacture of the semiconductor device, wherein the conductive film includes a metal that increases an electrical resistance between the conductive film and the ruthenium film by interfacial diffusion between the conductive film and the ruthenium film, and wherein the method comprises forming the ruthenium film on the conductive film by alternately repeating a plurality of times: forming a ruthenium thin film by supplying a ruthenium raw material gas to the substrate on which the conductive film is formed; and then supplying a boron compound gas to the ruthenium thin film.

Abstract: A nitrile group-containing highly saturated copolymer rubber composition containing a nitrile group-containing highly saturated copolymer rubber (A) having a Mooney viscosity [ML1+4, 100° C.] of 50 to 200, a nitrile group-containing highly saturated copolymer rubber (B) having a Mooney viscosity [ML1+4, 100° C.] of 5 to 45, and staple fibers (C) having an average fiber length of 0.1 to 12 mm is provided. According to the present invention, a nitrile group-containing highly saturated copolymer rubber composition which can give cross-linked rubber which is extremely high in tensile stress and is excellent in low heat buildup property and has good workability can be provided.

Abstract: An etching method includes: adsorbing an adsorbate based on a processing gas containing BCl3 gas onto a target object, which serves as a to-be-etched object, by: supplying H2 gas and the processing gas to a process space in which the target object is disposed; and applying power of a predetermined frequency to the process space, while supplying the H2 gas is stopped, to generate plasma in the process space; and etching the target object by generating plasma of a rare gas in the process space to activate the adsorbate.

Abstract: An etching method includes: adsorbing an adsorbate based on a processing gas containing BCl3 gas onto a target object, which serves as a to-be-etched object, by: supplying H2 gas and the processing gas to a process space in which the target object is disposed; and applying power of a predetermined frequency to the process space, while supplying the H2 gas is stopped, to generate plasma in the process space; and etching the target object by generating plasma of a rare gas in the process space to activate the adsorbate.

Abstract: A vehicular window regulator that decreases an inclination of a glass centering on a thickness direction of the glass and an inclination restraining mechanism are provided. The window regulator includes a member secured to a glass, traction member guides. At least one of the traction member guides are each disposed above and below the member, across the member. The inclination restraining mechanism is wound across the respective traction member guides, and includes a traction member having one end portion installed at the member from above, and further having another end portion installed at the member from below. An installation position to the member, of the one end portion of the traction member and an installation position to the member, of the other end portion of the traction member are offset in a horizontal direction, viewing from a thickness direction of the glass.

Abstract: A nitrile group-containing highly saturated copolymer rubber composition containing a nitrile group-containing highly saturated copolymer rubber (A) having a Mooney viscosity [ML1+4, 100° C.] of 50 to 200, a nitrile group-containing highly saturated copolymer rubber (B) having a Mooney viscosity [ML1+4, 100° C.] of 5 to 45, and staple fibers (C) having an average fiber length of 0.1 to 12 mm is provided. According to the present invention, a nitrile group-containing highly saturated copolymer rubber composition which can give cross-linked rubber which is extremely high in tensile stress and is excellent in low heat buildup property and has good workability can be provided.

Abstract: An adhesive composition containing a latex of a highly saturated nitrile rubber (A) which has ?,?-ethylenically unsaturated nitrile monomer units 10 to 55 wt %, conjugated diene monomer units 25 to 89 wt %, and ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units 1 to 20 wt % and has an iodine value of 120 or less and a polyvalent amine compound (B).

Abstract: A highly saturated nitrile rubber composition containing a carboxyl group-containing highly saturated nitrile rubber (A1) which contains ?,?-ethylenically unsaturated nitrile monomer units 15 to 60 wt % and ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units 1 to 60 wt % and has an iodine value of 120 or less, a highly saturated nitrile rubber (A2) which contains ?,?-ethylenically unsaturated nitrile monomer units 15 to 60 wt %, has a content of the ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units of 0.9 wt % or less, and has an iodine value of 120 or less, and a polyamide resin (B), a content ratio of the carboxyl group-containing highly saturated nitrile rubber (A1) and the highly saturated nitrile rubber (A2) being a weight ratio of “carboxyl group-containing highly saturated nitrile rubber (A1):highly saturated nitrile rubber (A2)” of 2:98 to 98:2, is provided.

Abstract: A vehicular window regulator that decreases an inclination of a glass centering on a thickness direction of the glass and an inclination restraining mechanism are provided. The window regulator includes a member secured to a glass, traction member guides. At least one of the traction member guides are each disposed above and below the member, across the member. The inclination restraining mechanism is wound across the respective traction member guides, and includes a traction member having one end portion installed at the member from above, and further having another end portion installed at the member from below. An installation position to the member, of the one end portion of the traction member and an installation position to the member, of the other end portion of the traction member are offset in a horizontal direction, viewing from a thickness direction of the glass.

Abstract: A nitrile group-containing copolymer rubber which has a hydroxyl group, carboxyl group, or carbon-carbon double bond at an end carbon atom or on a carbon atom which bonds with the end carbon atom is provided. The nitrile group-containing copolymer rubber is preferably obtained by a metathesis reaction. A nitrile group-containing copolymer rubber which is excellent in cross-linkability can be provided.

Abstract: Disclosed is an adhesive composition including: a latex of a highly saturated nitrile rubber (A), which includes 10 to 55 wt % of an ?,?-ethylenically unsaturated nitrile monomer unit, 25 to 89 wt % of a conjugated diene monomer unit and 1 to 20 wt % of an ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer unit and has an iodine value of 120 or less, and a crosslinking aid (B) which has 2 or more ethylenically unsaturated groups in a molecule.

Abstract: A nitrile group-containing copolymer rubber which has a hydroxyl group, carboxyl group, or carbon-carbon double bond at an end carbon atom or on a carbon atom which bonds with the end carbon atom is provided. The nitrile group-containing copolymer rubber is preferably obtained by a metathesis reaction. A nitrile group-containing copolymer rubber which is excellent in cross-linkability can be provided.

Abstract: A nitrile rubber composition containing a carboxyl group-containing nitrile rubber and an allylamine-based polymer which contains units expressed by the following general formula (1) is provided. (In the general formula (1), R1, R2, and R3 respectively independently are one selected from a group including a hydrogen atom, alkyl group containing 1 to 4 carbon atoms which may have substituents, aryl group containing 6 to 12 carbon atoms which may have substituents, and halogen atom.).

Abstract: An adhesive composition containing a latex of a highly saturated nitrile rubber (A) which has ?,?-ethylenically unsaturated nitrile monomer units 10 to 55 wt %, conjugated diene monomer units 25 to 89 wt %, and ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units 1 to 20 wt % and has an iodine value of 120 or less and a polyvalent amine compound (B).

Abstract: A nitrile rubber composition containing a carboxyl group-containing nitrile rubber and an allylamine-based polymer which contains units expressed by the following general formula (1) is provided. (In the general formula (1), R1, R2, and R3 respectively independently are one selected from a group including a hydrogen atom, alkyl group containing 1 to 4 carbon atoms which may have substituents, aryl group containing 6 to 12 carbon atoms which may have substituents, and halogen atom.

Abstract: An adhesive composition containing a latex of highly saturated nitrile rubber (A) which has ?,?-ethylenically unsaturated nitrile monomer units 10 to 55 wt %, conjugated diene monomer units 25 to 89 wt %, and ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units 1 to 20 wt % and has an iodine value of 120 or less and a curing agent (B) is provided.

Abstract: A nitrile group-containing highly saturated copolymer rubber composition containing a nitrile group-containing highly saturated copolymer rubber (A) having a Mooney viscosity [ML1+4, 100° C.] of 50 to 200, a nitrile group-containing highly saturated copolymer rubber (B) having a Mooney viscosity [ML1+4, 100° C.] of 5 to 45, and staple fibers (C) having an average fiber length of 0.1 to 12 mm is provided. According to the present invention, a nitrile group-containing highly saturated copolymer rubber composition which can give cross-linked rubber which is extremely high in tensile stress and is excellent in low heat buildup property and has good workability can be provided.

Abstract: A highly saturated nitrile rubber composition containing a carboxyl group-containing highly saturated nitrile rubber (A1) which contains ?,?-ethylenically unsaturated nitrile monomer units 15 to 60 wt % and ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units 1 to 60 wt % and has an iodine value of 120 or less, a highly saturated nitrile rubber (A2) which contains ?,?-ethylenically unsaturated nitrile monomer units 15 to 60 wt %, has a content of the ?,?-ethylenically unsaturated dicarboxylic acid monoester monomer units of 0.9 wt % or less, and has an iodine value of 120 or less, and a polyamide resin (B), a content ratio of the carboxyl group-containing highly saturated nitrile rubber (A1) and the highly saturated nitrile rubber (A2) being a weight ratio of “carboxyl group-containing highly saturated nitrile rubber (A1):highly saturated nitrile rubber (A2)” of 2:98 to 98:2, is provided.

Abstract: A nitrile rubber composition containing a carboxyl group-containing nitrile rubber and a reactive silicone oil and cross-linked rubber obtained by using that nitrile rubber composition are provided. Further, a rubber composition for sliding member use containing a carboxyl group-containing rubber which contains carboxyl group-containing monomer units in a ratio of 0.1 to 20 wt %, a content ratio of monomer units which have unsaturated carbon-carbon double bonds of 20 wt % or less, and a content ratio of monomer units which have halogen atoms of 5 wt % or less and a reactive silicone oil is provided.

Abstract: The disclosure provides an antenna device, which includes a waveguide antenna having wall surfaces and for emitting a radio wave in a direction substantially perpendicular to an emission face that is one of wall surfaces of the waveguide antenna extending in an elongated direction of the waveguide antenna, a plate-shape two-dimensional opening slots for beam formation formed in the waveguide antenna on the emission face side, a power feed waveguide module arranged in the rear face of the waveguide antenna opposite from the emission face and for supplying electric power to the waveguide antenna, and a cylindrical radome having a substantially circular cross-section of a diameter that is substantially equal to a length of the emission face in a direction perpendicular to the long-side direction so that the waveguide antenna is contained in the radome so as to be arranged at substantially the center of the radome.