Patents by Inventor Masato SHINI
Masato SHINI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230037861Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor includes first and second diffusion regions in a substrate, a first gate insulating film over the substrate, a first gate electrode over the first gate insulating film; first and second silicide layers on the first and second diffusion regions, respectively; and a first gate silicide layer on the first gate electrode. The second transistor includes third and fourth diffusion regions in the substrate; a second gate insulating film over the substrate; a second gate electrode over the second gate insulating film; and a second gate silicide layer on the second gate electrode. The second gate insulating film is thicker than the first gate insulating film, and at least a part of the third diffusion region and at least a part of the fourth diffusion region are covered by the second gate insulating film.Type: ApplicationFiled: February 17, 2022Publication date: February 9, 2023Applicant: Kioxia CorporationInventor: Masato SHINI
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Patent number: 11527477Abstract: A semiconductor device including a plurality of wirings and an insulating space is described. The insulating space is disposed between adjacent wirings of the plurality of wirings. An insulating material surrounds the insulating space. The insulating space is filled with air at a pressure no more than an atmospheric pressure.Type: GrantFiled: September 2, 2020Date of Patent: December 13, 2022Assignee: KIOXIA CORPORATIONInventors: Masato Shini, Yasunori Okayama
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Publication number: 20220302056Abstract: A semiconductor storage device includes a first substrate, a second substrate, a first stacked body, and a second stacked body. The first stacked body is provided between the first substrate and the second substrate and includes a first trace, a first pad connected to the first trace, and a first insulator. The second stacked body is provided between the first stacked body and the second substrate and includes a second trace, a second pad connected to the second trace, and a second insulator. The first pad includes a plurality of first electrode portions connected to the first trace. The first insulator is provided between the plurality of first electrode portions. The plurality of first electrode portions are bonded to the second pad.Type: ApplicationFiled: August 31, 2021Publication date: September 22, 2022Applicant: Kioxia CorporationInventors: Yuanting WANG, Masato SHINI, Minoru ODA
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Publication number: 20220302147Abstract: A semiconductor device that can be downsized more than ever before is provided. A semiconductor device 10 includes: an insulating layer 21 provided on an upper side of a substrate 20; a conductor 110 provided within the insulating layer 21; a conductor 120 provided within the insulating layer 21 and facing the conductor 110 in a first direction parallel with a surface of the substrate 20; and an insulating film 130 provided between the conductor 110 and the conductor 120. A thickness of the insulating film 130 in the first direction is smaller than both of a thickness of the conductor 110 in the first direction and a thickness of the conductor 120 in the first direction. A relative permittivity of the insulating film 130 is higher than a relative permittivity of the insulating layer 21. The conductor 110 and the conductor 120 extend in a second direction intersecting the first direction and parallel with the substrate 20.Type: ApplicationFiled: September 10, 2021Publication date: September 22, 2022Inventor: Masato SHINI
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Patent number: 11170855Abstract: A semiconductor device according to an embodiment includes first and second chips, and a first conductor. The first chip includes a first substrate, a first circuit and a first joint metal. The first circuit is provided on the first substrate. The first joint metal is connected to the first circuit. The second chip includes a second substrate, a second circuit, and a second joint metal. The second substrate includes P-type and N-type well regions. The second circuit is provided on the second substrate and includes a first transistor. The second joint metal is connected to the second circuit and the first joint metal. The first conductor is connected to the N-type well region from a top region of the second chip. The P-type well region is arranged between a gate electrode of the first transistor and the N-type well region.Type: GrantFiled: September 1, 2020Date of Patent: November 9, 2021Assignee: Kioxia CorporationInventors: Yuka Itano, Minoru Oda, Masato Shini
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Patent number: 11127711Abstract: According to one embodiment, a semiconductor device includes a first wafer, a first wiring layer, a first insulating layer, a first electrode, a second wafer, a second wiring layer, a second insulating layer, a second electrode, and a first layer. The first electrode includes a first surface, a second surface, a third surface, and a fourth surface. The second electrode includes a fifth surface, a sixth surface, a seventh surface, a second side surface, and an eighth surface. The first layer is provided between the fourth surface and a portion of the first insulating layer that surrounds the fourth surface, and is provided away from the third surface in the first direction.Type: GrantFiled: March 3, 2020Date of Patent: September 21, 2021Assignee: KIOXIA CORPORATIONInventor: Masato Shini
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Publication number: 20210287995Abstract: A semiconductor device including a plurality of wirings and an insulating space is described. The insulating space is disposed between adjacent wirings of the plurality of wirings. An insulating material surrounds the insulating space. The insulating space is filled with air at a pressure no more than an atmospheric pressure.Type: ApplicationFiled: September 2, 2020Publication date: September 16, 2021Applicant: Kioxia CorporationInventors: Masato SHINI, Yasunori OKAYAMA
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Publication number: 20210074362Abstract: A semiconductor device according to an embodiment includes first and second chips, and a first conductor. The first chip includes a first substrate, a first circuit and a first joint metal. The first circuit is provided on the first substrate. The first joint metal is connected to the first circuit. The second chip includes a second substrate, a second circuit, and a second joint metal. The second substrate includes P-type and N-type well regions. The second circuit is provided on the second substrate and includes a first transistor. The second joint metal is connected to the second circuit and the first joint metal. The first conductor is connected to the N-type well region from a top region of the second chip. The P-type well region is arranged between a gate electrode of the first transistor and the N-type well region.Type: ApplicationFiled: September 1, 2020Publication date: March 11, 2021Applicant: KIOXIA CORPORATIONInventors: Yuka Itano, Minoru Oda, Masato Shini
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Publication number: 20210074675Abstract: According to one embodiment, a semiconductor device includes a first wafer, a first wiring layer, a first insulating layer, a first electrode, a second wafer, a second wiring layer, a second insulating layer, a second electrode, and a first layer. The first electrode includes a first surface, a second surface, a third surface, and a fourth surface. The second electrode includes a fifth surface, a sixth surface, a seventh surface, a second side surface, and an eighth surface. The first layer is provided between the fourth surface and a portion of the first insulating layer that surrounds the fourth surface, and is provided away from the third surface in the first direction.Type: ApplicationFiled: March 3, 2020Publication date: March 11, 2021Applicant: KIOXIA CORPORATIONInventor: Masato SHINI
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Patent number: 9825098Abstract: A semiconductor memory device according to an embodiment comprises: a first wiring line extending in a first direction; a second wiring line extending in a second direction, the second direction intersecting the first direction; and a memory cell disposed at an intersection of the first wiring line and the second wiring line, the memory cell including a first film whose resistance changes electrically, a second film having conductivity, and a third film having an insulating property which are stacked sequentially in a third direction that intersects the first and second directions.Type: GrantFiled: March 18, 2016Date of Patent: November 21, 2017Assignee: TOSHIBA MEMORY CORPORATIONInventor: Masato Shini
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Publication number: 20170256586Abstract: A semiconductor memory device according to an embodiment comprises: a first wiring line extending in a first direction; a second wiring line extending in a second direction, the second direction intersecting the first direction; and a memory cell disposed at an intersection of the first wiring line and the second wiring line, the memory cell including a first film whose resistance changes electrically, a second film having conductivity, and a third film having an insulating property which are stacked sequentially in a third direction that intersects the first and second directions.Type: ApplicationFiled: March 18, 2016Publication date: September 7, 2017Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Masato SHINI
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Patent number: 8765610Abstract: According to one embodiment, a method for manufacturing a semiconductor device includes forming a plurality of second core films, the second core film having a first array portion, and a second array portion which is arranged so as to be spaced at a larger second space than the first space in the first direction from the first array portion, the second space being positioned above the loop portion. The method includes processing the second film to be processed below the first array portion into a second line and space pattern which includes a second line pattern extending in the second direction, and removing the second film to be processed below the second space and the loop portion of the first film to be processed, by an etching using the second spacer film as a mask.Type: GrantFiled: August 31, 2012Date of Patent: July 1, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Masato Shini
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Publication number: 20130230988Abstract: According to one embodiment, a method for manufacturing a semiconductor device includes forming a plurality of second core films, the second core film having a first array portion, and a second array portion which is arranged so as to be spaced at a larger second space than the first space in the first direction from the first array portion, the second space being positioned above the loop portion. The method includes processing the second film to be processed below the first array portion into a second line and space pattern which includes a second line pattern extending in the second direction, and removing the second film to be processed below the second space and the loop portion of the first film to be processed, by an etching using the second spacer film as a mask.Type: ApplicationFiled: August 31, 2012Publication date: September 5, 2013Applicant: Kabushiki Kaisha ToshibaInventor: Masato SHINI