Abstract: An exposure device in which a device for insertion or removal of the microscope for mask marks is not necessary, and in which the arrangement of the device is simplified is achieved by the provision of a microscope for mask marks in a workpiece carrier which can move in unison with the workpiece carrier. Furthermore, a reference mark is provided in the light incidence part of the microscope for determining the mask marks. The relation between the positions of the microscope for workpiece marks, the microscope for mask marks and the workpiece carrier is confirmed beforehand using this reference mark. In the positioning of the mask relative to the workpiece, the workpiece carrier is moved and the microscope for workpiece marks determines the position of the workpiece mark. Then, the workpiece carrier is moved and the microscope for mask marks determines the projection position of the mask mark. The workpiece carrier is driven such that the two agree with one another.

Abstract: An exposure device in which a device for insertion or removal of the microscope for mask marks is not necessary, and in which the arrangement of the device is simplified is achieved by the provision of a microscope for mask marks in a workpiece carrier which can move in unison with the workpiece carrier. Furthermore, a reference mark is provided in the light incidence part of the microscope for determining the mask marks. The relation between the positions of the microscope for workpiece marks, the microscope for mask marks and the workpiece carrier is confirmed beforehand using this reference mark. In the positioning of the mask relative to the workpiece, the workpiece carrier is moved and the microscope for workpiece marks determines the position of the workpiece mark. Then, the workpiece carrier is moved and the microscope for mask marks determines the projection position of the mask mark. The workpiece carrier is driven such that the two agree with one another.

Abstract: A first a confocal optical microscope in which a good image with high contrast can be observed with which a bright image can be observed over a long time interval. The confocal optical microscope has a quarter wave plate arranged in an optical path between an imaging lens and an objective such that it is inclined relative to a reference optics axis extending between the imaging lens and the objective. Furthermore, the confocal optical microscope has a shortwave radiation attenuator for attenuating light radiated from the light source with wavelengths of less than or equal to 340 nm. The confocal optical microscope can form part of a length measuring device which can take a length measurement of a sample to be measured with high measurement accuracy and high reproducibility. The length measuring device also has a movable carrier, a carrier device for a sample to be measured, a computing device, a display device and a control device.

Abstract: A waste gas in treated by the sequence of discharge treatment and catalytic oxidation. A microbe-containing gas is disinfected by first mixing it with ozone, then subjecting the gas to discharge treatment and catalytic reaction successively.