Abstract: A pressure sensor module and a dispensing apparatus improving accuracy of pressure measurement are provided. A pressure sensor module includes: a flow channel substrate in which a flow channel and a branch channel are formed; and a distortion detection unit configured to detect a pressure. The branch channel is branched from the flow channel and is connected to the distortion detection unit at one end of the branch channel. The distortion detection unit is disposed at least partially via a bond layer to block the one end of the branch channel. A protrusion is provided to surround the one end of the branch channel.

Abstract: Provided is a highly reliable optical filtering device used as a spatial filter for an optical inspection apparatus and configured to prevent a shutter from sticking to a wall surface of a shutter opening. The optical filtering device includes the shutter openable and closeable by voltage control and a substrate having the shutter opening serving as a movable range of the shutter, in which the substrate includes a sticking prevention part configured to prevent the shutter from sticking to the wall surface of the shutter opening when the shutter is opened.

Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.

Abstract: There are provided a process for fabricating MEMS device that includes a plurality of through-holes capable being arranged at a high density, the through-holes having a tapered end portion. Through-holes having vertical side surfaces and tapered bottoms are provided by a processing method including the steps of: disposing quadrilateral patterning having desired dimensions on a silicon substrate having a flat surface of a crystal plane, etching the substrate to a desired depth by dry etching that can realize a high aspect ratio etching, and anisotropic wet etching the dry etched substrate with a KOH aqueous solution containing isopropyl alcohol mixed thereinto.

Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.

Abstract: There are provided a process for fabricating MEMS device that includes a plurality of through-holes capable being arranged at a high density, the through-holes having a tapered end portion. Through-holes having vertical side surfaces and tapered bottoms are provided by a processing method including the steps of: disposing quadrilateral patterning having desired dimensions on a silicon substrate having a flat surface of a crystal plane, etching the substrate to a desired depth by dry etching that can realize a high aspect ratio etching, and anisotropic wet etching the dry etched substrate with a KOH aqueous solution containing isopropyl alcohol mixed thereinto.

Abstract: Disclosed is a structure for raising the Q-value of a near-field antenna used by a non-contact power transmission device that utilizes magnetic field coupling in the near field in a manner improving the efficiency of power transmission. The near-field antenna used by the non-contact power transmission device galvanically isolates a resonant circuit including a resonant first inductor 31 and a first capacitor 32 from a transmission circuit or a reception circuit and, through electromagnetic coupling or inductive coupling established between the transmission or reception circuit and the near-field antenna using a second inductor 33 or a second capacitor 34, maintains a high Q even if the coupling between the antennas weakens due to an extended distance the antennas.

Abstract: A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.

Abstract: A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.

Abstract: A deflector array in which a plurality of deflectors, which deflect charged particle beams, are arrayed on a substrate. The plurality of deflectors include respective openings different from each other formed on the substrate. Each of the plurality of deflectors includes a pair of electrodes opposing each other through a corresponding opening, and the plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors which are located nearest to each other.

Abstract: An optical switch includes an input optical fiber, first and second output optical fibers, a movable mirror for switching over an optical path between the input optical fiber and an output optical fiber, and collimator lenses disposed on optical paths formed between the input optical fiber and the output optical fibers. When drive force is applied, the movable mirror assumes a first or second position to form an optical path between the input optical fiber and the first or second output optical fiber. When drive force is not applied to the movable mirror, an optical path is formed between the optical path in the first position and that in the second position. In the first position, a first part of the movable mirror comes in contact with a substrate. In the second position, a part of the movable mirror different from the first part comes in contact with the substrate.

Abstract: In an optical head, if a lens is reduced in size so that it can be integrated with a light source and a photodetector, other optical components as well as the lens must be reduced in size, which would result in greater difficulties in handling for assembly and adjustment purposes. The invention allows large quantities of ultra-small optical heads to be produced accurately and at low cost, the optical heads being easy to adjust and not requiring the handling of minute components for adjustment purposes. A first substrate includes lenses for focusing light on an information storage medium, a second substrate includes detectors and disposed on the surface thereof, and a layer, which is disposed between the first and second substrates, includes prisms and mirrors. The layer also includes cavities in which light sources are disposed. The individual substrates are formed in the form of wafers with the lenses, mirrors, prisms, light sources, and photodetectors disposed thereon.

Abstract: A vehicle headlight having a light source to emit light and a reflector for illuminating forward the light emitted from the light source, wherein the reflector is comprising a plurality of movable mirrors to be operated independently and optionally and a fixed mirror disposed outside these movable mirrors, whereby the light emitted from the light source to the movable mirrors are not blocked mutually so that a distribution of light illuminated from the vehicle headlight is minutely and quickly controlled.

Abstract: This invention discloses a deflector array in which a plurality of deflectors which deflect charged particle beams are arrayed on a substrate. Each deflector includes an opening formed on the substrate, and a pair of electrodes opposing each other through the opening. The length of the pair of electrodes in the longitudinal direction is not less than the distance between the centers of two deflectors equivalent to the plurality of deflectors, which are located nearest to each other.

Abstract: A process for fabricating a mold for an aspherical microlens having a desired aspherical and smooth surface, the lens having an effective diameter of 1 mm or smaller and a thickness of 0.5 mm or greater. A double-layer mask layer is formed on a single crystal silicon substrate, and anisotropic etching and isotropic etching are carried out using a first mask layer so as to form a concave portion that is a little smaller than the size of a desired microlens mold. Isotropic etching is then carried out using a second mask layer so as to enlarge the concave portion, thereby obtaining a microlens mold having desired dimensions.

Abstract: A method of manufacturing an optical head includes joining of a first substrate on which a plurality of lenses are formed in an array, a second substrate on which a plurality of prisms and mirrors are formed in an array, and a third substrate on which a plurality of detectors and light sources are formed in an array, after positioning of the individual substrates, and cutting the joined substrates along the rows and columns of the array.