Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: A manufacturing method is used for a current sensor including a current measurement circuit configured to include magnetoelectric conversion elements, a first amplification-and-correction circuit configured to amplify an output of the current measurement circuit and correct, based on a set first correction amount, a temperature characteristic of an offset, a second amplification-and-correction circuit configured to amplify an output of the first amplification-and-correction circuit, adjust a sensitivity, and correct, based on a set second correction amount, a magnitude of the offset, and a substrate in which the current measurement circuit, the first amplification-and-correction circuit, and the second amplification-and-correction circuit are provided, wherein after the first correction amount is set based on characteristics of the magnetoelectric conversion elements, the magnetoelectric conversion elements are mounted in the substrate and the second correction amount is set.

Abstract: An electrostatic capacitance sensor 1 includes a semiconductor substrate 4. A first fixing plate 2 is joined to a one-side surface 4a of the semiconductor substrate 4, and a second fixing plate 3 is joined to other-side surface 4b of the semiconductor substrate 4, whereby a space portion S is formed. Then, static electricity suppressing means 70 for suppressing static electricity from being generated in the space portion S is provided in the electrostatic capacitance sensor 1.

Abstract: An electrical current sensor includes a magnetic detection element whose characteristics are changed by an inductive magnetic field from a current to be measured, a plurality of coils that are connected in series with each other and which are arranged in the vicinity of the magnetic detection element, and generates a canceling magnetic field for canceling the inductive magnetic field by a feedback current flowing in the coils, and a switch circuit that selects a coil electrically connected with an input terminal and/or an output terminal of the feedback current from the plurality of coils, and controls a coil for allowing the feedback current to flow.

Abstract: A current sensor includes a first current path, a second current path disposed parallel to the first current path, and a pair of first magnetic sensors. The first current path has a pair of main surfaces and includes a plate-shaped first region. The second current path has a pair of main surfaces and includes a plate-shaped second region. The first magnetic sensors are arranged on the respective main surfaces in the first region such that sensing axes of the first magnetic sensors are parallel to the respective main surfaces in the first region. The first magnetic sensors are configured to sense a magnetic field generated by a target current flowing through the first region. The second region is placed such that the main surfaces in the second region are perpendicular to the sensing axes of the first magnetic sensors.

Abstract: A current sensor includes: a first magnetic sensor and a second magnetic sensor; a first analog-to-digital converter which is connected to the first magnetic sensor and converts an output signal of the first magnetic sensor from an analog signal to a digital signal so as to be output; a second analog-to-digital converter which is connected to the second magnetic sensor and converts an output signal of the second magnetic sensor from an analog signal to a digital signal so as to be output; and an operation device which is connected to the first analog-to-digital converter and the second analog-to-digital converter, and outputs an operation value by subjecting the output signal of the first analog-to-digital converter and the output signal of the second analog-to-digital converter to differential operation.

Abstract: A manufacturing method is used for a current sensor including a current measurement circuit configured to include magnetoelectric conversion elements, a first amplification-and-correction circuit configured to amplify an output of the current measurement circuit and correct, based on a set first correction amount, a temperature characteristic of an offset, a second amplification-and-correction circuit configured to amplify an output of the first amplification-and-correction circuit, adjust a sensitivity, and correct, based on a set second correction amount, a magnitude of the offset, and a substrate in which the current measurement circuit, the first amplification-and-correction circuit, and the second amplification-and-correction circuit are provided, wherein after the first correction amount is set based on characteristics of the magnetoelectric conversion elements, the magnetoelectric conversion elements are mounted in the substrate and the second correction amount is set.

Abstract: A current sensor includes a magnetic balance sensor including a feedback coil that is disposed in the vicinity of a magnetic sensor element whose characteristics are changed by an inducted magnetic field from a current to be measured and generates a cancellation magnetic field for offsetting the inducted magnetic field, a shunt resistant that is connected in series with a current line for circulating the current to be measured, and a switch circuit that switches to magnetic balance detection at the time of a small current and switches to shunt resistance detection at the time of a large current.

Abstract: A current sensor includes a first current path, a second current path disposed parallel to the first current path, and a pair of first magnetic sensors. The first current path has a pair of main surfaces and includes a plate-shaped first region. The second current path has a pair of main surfaces and includes a plate-shaped second region. The first magnetic sensors are arranged on the respective main surfaces in the first region such that sensing axes of the first magnetic sensors are parallel to the respective main surfaces in the first region. The first magnetic sensors are configured to sense a magnetic field generated by a target current flowing through the first region. The second region is placed such that the main surfaces in the second region are perpendicular to the sensing axes of the first magnetic sensors.

Abstract: An electrostatic capacitance sensor 1 includes a semiconductor substrate 4. A first fixing plate 2 is joined to a one-side surface 4a of the semiconductor substrate 4, and a second fixing plate 3 is joined to other-side surface 4b of the semiconductor substrate 4, whereby a space portion S is formed. Then, static electricity suppressing means 70 for suppressing static electricity from being generated in the space portion S is provided in the electrostatic capacitance sensor 1.

Abstract: A current sensor includes a magnetic equilibrium sensor including a magnetic sensor element with characteristics changed by an inductive magnetic field from a measurement target current and a feedback coil provided in the vicinity of the magnetic sensor element and generating a canceling magnetic field canceling the inductive magnetic field, a shunt resistor connected to a current line through which the measurement target current flows, and a switching unit switching between shunt resistor detection of sensing and outputting a voltage difference of the shunt resistor, and magnetic equilibrium detection of sensing and outputting a current flowing in the feedback coil in an equilibrium state where current flows in the feedback coil according to the inductive magnetic field and the inductive magnetic field and the canceling magnetic field cancel each other.

Abstract: A current sensor includes a magnetic detection element having a resistance value changed by applying inductive magnetic field from measurement target current, a magnetic core provided in the vicinity of the magnetic detection element, and a coil generating magnetic field attenuating the inductive magnetic field. A constant level current in a predetermined range of output voltage of the magnetic detection element flows in the coil, and the measurement target current is detected on the basis of the output voltage of the magnetic detection element.

Abstract: A temperature control apparatus includes a resistance heater whose a resistance value changes depending on a temperature of the resistance heater; a signal generator to output a control signal having two voltage levels including a first-voltage and a second-voltage; a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater. The signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument.

Abstract: Disclosed is an temperature control apparatus including: a resistance heater a resistance value of which changes dependently on a temperature thereof; a fixed resistance connected to the resistance heater in series; a signal generator to output a control signal which has two voltage levels of a first voltage and a second voltage; a switching section to flow a current through the resistance heater and the fixed resistance when the voltage level is the first voltage, and not to flow a current through the resistance heater and the fixed resistance when the voltage level is the second voltage; and a first voltage measuring instrument to measure a voltage value across the fixed resistance at the time when the current flows through the fixed resistance, wherein the signal generator controls the temperature of the resistance heater based on the measured voltage by the first voltage measuring instrument.

Abstract: Disclosed is a reaction device that includes a reaction device main body that includes a first reaction unit and a second reaction unit, a container to house the reaction device main body and a first region that corresponds to at least the first reaction unit and a second region that corresponds to the second reaction unit, the first and second regions being provided to the container or internal side of the container. The first reaction unit is set to a temperature higher than that of the second reaction unit, and the first region has a higher reflectivity than that of the second region, with respect to a heat ray that is radiated from the reaction device main body.

Abstract: A stack structure is formed by stacking and bonding a plurality of substrates. The stack structure includes bonding films each of which is interposed in a bonding region between, adjacent glass substrates, and bonded to oxygen atoms in the glass of the substrate by anodic bonding.

Abstract: Disclosed is a heat insulating container, including a heat source, a housing that houses the heat source therein and a temperature detection unit that is formed on a surface of the housing and reflects radiation.

Abstract: A current sensor includes a magnetic equilibrium sensor including a magnetic sensor element with characteristics changed by an inductive magnetic field from a measurement target current and a feedback coil provided in the vicinity of the magnetic sensor element and generating a canceling magnetic field canceling the inductive magnetic field, a shunt resistor connected to a current line through which the measurement target current flows, and a switching unit switching between shunt resistor detection of sensing and outputting a voltage difference of the shunt resistor, and magnetic equilibrium detection of sensing and outputting a current flowing in the feedback coil in an equilibrium state where current flows in the feedback coil according to the inductive magnetic field and the inductive magnetic field and the canceling magnetic field cancel each other.