Abstract: A processing liquid supply system includes a tank that stores a processing liquid supplied from a processing liquid supply, a circulation passage that is connected to the tank, a plurality of supply passages that is connected to the circulation passage and supplies the processing liquid to each of a plurality of liquid processing units that perform a liquid processing on a substrate, a first pump filter set that is a combination of a first pump and a plurality of first filters provided downstream of the first pump, and a second pump filter set that is a combination of a second pump and a plurality of second filters provided downstream of the second pump. The first pump filter set and the second pump filter set are arranged in series in the circulation passage such that the first pump filter set is located upstream of the second pump filter set.

Abstract: Provided is a comparator configured to compare input voltages, which are input to a first dynamic comparator and a second dynamic comparator, with a reference voltage, select either an output signal of the first dynamic comparator or an output signal of the second dynamic comparator based on the comparison result, output the selected output signal, and control clock signals, which are input to the first dynamic comparator and the second dynamic comparator respectively, based on the comparison result, so as to stop the operation of the dynamic comparator of which output signal is not selected.

Abstract: Provided is a comparator configured to compare input voltages, which are input to a first dynamic comparator and a second dynamic comparator, with a reference voltage, select either an output signal of the first dynamic comparator or an output signal of the second dynamic comparator based on the comparison result, output the selected output signal, and control clock signals, which are input to the first dynamic comparator and the second dynamic comparator respectively, based on the comparison result, so as to stop the operation of the dynamic comparator of which output signal is not selected.

Abstract: When an object to be cleaned is vapor cleaned in the prior art, a tubular cleaning tube is arranged on the top face of the cover plate, at the outer periphery of the outlet, so that the cleaning vapor can accumulate, allowing very little pushing out the air in the working chamber. In the present invention, an outlet is provided in a cover plate through which cleaning vapor flows out into an ordinary pressure working chamber thereabove; condensation of this outflowing cleaning vapor at a low position in the ordinary pressure working chamber is made possible by a condensation unit; and a tubular cleaning tube is arranged at the outer periphery of the outlet on the top face of a cover plate, whereby the cleaning vapor rises up in the cleaning tube so that an object to be cleaned can be vapor cleaned by receiving it in this cleaning tube.