Patents by Inventor Masatsugu Shigeno
Masatsugu Shigeno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11391755Abstract: Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.Type: GrantFiled: March 16, 2021Date of Patent: July 19, 2022Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Hiroyoshi Yamamoto, Yoshiteru Shikakura, Kunihito Higa
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Publication number: 20210293849Abstract: Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.Type: ApplicationFiled: March 16, 2021Publication date: September 23, 2021Inventors: Masatsugu SHIGENO, Hiroyoshi YAMAMOTO, Yoshiteru SHIKAKURA, Kunihito HIGA
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Patent number: 10837982Abstract: To avoid applying overload on both a probe and a sample surface, and to reduce time for measuring irregular shapes on the sample surface in performing an intermittent measurement method, provided is a scanning probe microscope including: a cantilever having a probe attached thereto, the scanning probe microscope being configured to scan a sample surface by intermittently bringing the probe into contact with the sample surface; and a control device configured to perform a first operation of bringing the probe and the sample surface into contact with each other, and a second operation of separating the probe and the sample surface from each other after the first operation. The control device executes the second operation by thermally deforming the cantilever.Type: GrantFiled: March 22, 2019Date of Patent: November 17, 2020Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Hiroyoshi Yamamoto, Kazutoshi Watanabe
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Publication number: 20190293681Abstract: To avoid applying overload on both a probe and a sample surface, and to reduce time for measuring irregular shapes on the sample surface in performing an intermittent measurement method, provided is a scanning probe microscope including: a cantilever having a probe attached thereto, the scanning probe microscope being configured to scan a sample surface by intermittently bringing the probe into contact with the sample surface; and a control device configured to perform a first operation of bringing the probe and the sample surface into contact with each other, and a second operation of separating the probe and the sample surface from each other after the first operation. The control device executes the second operation by thermally deforming the cantilever.Type: ApplicationFiled: March 22, 2019Publication date: September 26, 2019Inventors: Masatsugu SHIGENO, Hiroyoshi YAMAMOTO, Kazutoshi WATANABE
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Patent number: 10345335Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.Type: GrantFiled: March 27, 2018Date of Patent: July 9, 2019Assignee: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Kazutoshi Watanabe, Hiroyoshi Yamamoto
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Patent number: 10161958Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.Type: GrantFiled: July 9, 2015Date of Patent: December 25, 2018Assignee: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Kazutoshi Watanabe, Masafumi Watanabe
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Patent number: 10151773Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.Type: GrantFiled: March 24, 2017Date of Patent: December 11, 2018Assignee: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Kazutoshi Watanabe, Masafumi Watanabe, Hiroyoshi Yamamoto, Kazuo Chinone
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Publication number: 20180284151Abstract: A scanning probe microscope has a cantilever having a probe at a tip of the cantilever, a driving unit that performs a separating operation for separating one of the sample and the probe from the other at a speed exceeding a response speed of the cantilever from a state where the probe is in contact with the surface of the sample, a determination unit that determines that the probe is separated from the surface of the sample when vibration of the cantilever at a predetermined amplitude is detected at a resonant frequency of the cantilever during the separating operation, and a driving control unit that stops the separating operation when the determination unit determines that the probe is separated from the surface of the sample and relatively moves the probe and the sample to a position where the probe is located on a next measuring point of the sample.Type: ApplicationFiled: March 27, 2018Publication date: October 4, 2018Applicant: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Kazutoshi Watanabe, Hiroyoshi Yamamoto
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Patent number: 9921241Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.Type: GrantFiled: March 31, 2016Date of Patent: March 20, 2018Assignee: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Publication number: 20170285067Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.Type: ApplicationFiled: March 24, 2017Publication date: October 5, 2017Applicant: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Kazutoshi Watanabe, Masafumi Watanabe, Hiroyoshi Yamamoto, Kazuo Chinone
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Patent number: 9766267Abstract: A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ?M and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ?S, where A=?S/?M?2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×?S) or (S0?m×?S), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.Type: GrantFiled: March 21, 2014Date of Patent: September 19, 2017Assignee: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Shigeru Wakiyama, Masafumi Watanabe, Kazutoshi Watanabe
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Patent number: 9645170Abstract: A scanning probe microscope includes a cantilever that has a first attachment surface and a cantilever attachment portion that has a second attachment surface to which the first attachment surface of the cantilever is attached. Columnar elements including nanofibers or nanotubes are formed on the second attachment surface, and the second attachment surface adheres to the first attachment surface by using the columnar element.Type: GrantFiled: March 27, 2015Date of Patent: May 9, 2017Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventor: Masatsugu Shigeno
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Publication number: 20160291053Abstract: A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed.Type: ApplicationFiled: March 31, 2016Publication date: October 6, 2016Applicant: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Patent number: 9354248Abstract: A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.Type: GrantFiled: March 30, 2015Date of Patent: May 31, 2016Assignee: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Yoshiteru Shikakura
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Publication number: 20160011231Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.Type: ApplicationFiled: July 9, 2015Publication date: January 14, 2016Applicant: HITACHI HIGH-TECH SCIENCE CORPORATIONInventors: Masatsugu Shigeno, Kazutoshi Watanabe, Masafumi Watanabe
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Publication number: 20150276797Abstract: A scanning probe microscope includes a cantilever that has a first attachment surface and a cantilever attachment portion that has a second attachment surface to which the first attachment surface of the cantilever is attached. Columnar elements including nanofibers or nanotubes are formed on the second attachment surface, and the second attachment surface adheres to the first attachment surface by using the columnar element.Type: ApplicationFiled: March 27, 2015Publication date: October 1, 2015Inventor: Masatsugu SHIGENO
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Publication number: 20150276796Abstract: A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.Type: ApplicationFiled: March 30, 2015Publication date: October 1, 2015Inventors: Masatsugu SHIGENO, Yoshiteru SHIKAKURA
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Patent number: 8859279Abstract: A cell detachment method for detaching only a desired cell from a plurality of cells cultured on a substrate under predetermined culture environment conditions by using a scanning probe microscope having a probe, comprising: observing the plural cells; specifying the cell to be detached; moving the probe onto the specified cell; and pressing the prove against the specified cell with a predetermined force so as to detach the cell from the substrate.Type: GrantFiled: June 7, 2007Date of Patent: October 14, 2014Assignee: Hitachi High-Tech Science CorporationInventors: Amiko Nihei, Masatsugu Shigeno, Yoshiharu Shirakawabe, Akira Inoue, Osamu Matsuzawa, Naoya Watanabe
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Publication number: 20140297222Abstract: A device for calculating a position of an actuator, the actuator including a movement mechanism configured to move in one direction in proportion to a control signal generated for each minimum movement amount ?M and a movement amount detection sensor configured to detect a movement amount of the movement mechanism in a minimum resolution ?S, where A=?S/?M?2, and the device includes a position calculation unit configured to calculating a position SA of the movement mechanism at a target position from the control signal at a time point T1, at which the sensor signal becomes (S0+m×?S) or (S0?m×?S), where m is a natural number of 1 or more, the control signal at the target position of the movement mechanism is denoted by M0, and the sensor signal is denoted by S0.Type: ApplicationFiled: March 21, 2014Publication date: October 2, 2014Applicant: Hitachi High-Tech Science CorporationInventors: Masatsugu Shigeno, Shigeru Wakiyama, Masafumi Watanabe, Kazutoshi Watanabe
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Patent number: 8719959Abstract: A displacement detection portion is provided in a lever portion of a cantilever or between the lever portion and a main body portion. The displacement detection portion is provided by laminating two conductor electrodes to sandwich an insulating portion. A thickness of the insulating portion (electrode interval) is set to a value capable of detecting a variation in tunnel current due to a change in electrode interval which corresponds to a displacement of the lever portion while a predetermined voltage is applied. When the lever portion is slightly displaced, the interval between the conductor electrodes changes. Therefore, the displacement may be detected as the variation in tunnel current at high resolution with sensitivity of an exponential multiple of the change in interval.Type: GrantFiled: August 27, 2009Date of Patent: May 6, 2014Assignee: SII Nano Technology Inc.Inventor: Masatsugu Shigeno