Abstract: Provided is a sputtering device for a multilayer optical recording medium capable of suppressing the occurrence of defects in a recording region. A sputtering device for a multilayer optical recording medium includes an outer mask, wherein the outer mask is configured to be capable of covering an outer periphery of a film-forming surface of an intermediate layer without coming into contact with the film-forming surface.

Abstract: A diaphragm pump converts rotation of a motor into a reciprocating motion and drives a diaphragm. The diaphragm pump includes a partition configured to form a pump chamber together with a deformation portion of the diaphragm, a suction passage communicating with the pump chamber via a suction through hole extending through the partition, and a suction valve configured to open/close the suction passage. The valve body of the suction valve includes a leak structure configured to form a channel between the valve body and the seat surface of the partition.