Patents by Inventor Masaya Kadono

Masaya Kadono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5366579
    Abstract: An industrial diamond thin film coating on an object and a method of manufacturing the same are described. A diamond film is first formed on a substrate other than the object to be coated. The diamond film is then joined to the object by means of an adhesive. Finally, the substrate may be removed from the diamond film which is already fixed to the object to provide a hard surface for the same.
    Type: Grant
    Filed: March 7, 1991
    Date of Patent: November 22, 1994
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masaya Kadono
  • Patent number: 5360477
    Abstract: A process for fabricating diamond from a starting powder material containing carbon as the principal component, and said process comprising bringing said powder material under high pressure, wherein, said powder material containing carbon as the principal component is a powder material containing C.sub.60 and/or carbon microtubules as the principal component, andsaid powder material is brought under high pressure by applying a gradient pressure to the material, while the portion of the powder material to which maximum pressure is applied is irradiated by a laser beam optionally through a diamond window material. An apparatus for fabricating diamond is also described.
    Type: Grant
    Filed: March 2, 1993
    Date of Patent: November 1, 1994
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Tohru Inoue, Masaya Kadono, Akiharu Miyanaga
  • Patent number: 5302226
    Abstract: A microwave-assisted plasma processing apparatus has a reaction chamber in which a substrate holder is provided to support a substrate to be treated. The holder is formed congruent with the inside of reaction chamber and located to substantially separate a reaction space in the reaction chamber save for a narrow clearance therebetween through which exhausted gas passes from said reaction space into said auxiliary space. By this structure, high density plasmas can be formed in the reaction chamber without substantial loss of input microwave energy.
    Type: Grant
    Filed: May 29, 1992
    Date of Patent: April 12, 1994
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Naoki Hirose, Masaya Kadono, Kenji Itoh, Toru Takayama, Yasuyuki Arai, Noriya Ishida
  • Patent number: 5254141
    Abstract: An industrial diamond coating on an object and a method of manufacturing the same are described. A diamond coating is first formed on a substrate other than the object to be coated. The diamond coating is then joined to the object by means of an adhesive. One of features of an industrial diamond coating of the present invention is heat resistance. This feature can be realized by subjecting a diamond coating to etching in order to eliminate carbon in the form other than diamond structure from the coating followed by filling void spaces occurring in the coating after the elimination with a heat resistant material. The substrate may be removed from the diamond film which is already fixed to the object to provide a hard surface for the object.
    Type: Grant
    Filed: May 22, 1991
    Date of Patent: October 19, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masaya Kadono
  • Patent number: 5225367
    Abstract: A method of manufacturing an electronic device using boron nitrides comprises the steps of adding impurities in boron nitrides by ion implantation to form a doped region and directing a laser beam onto the doped region while the boron nitrides are placed in a vacuum or a non-oxidizing atmosphere.
    Type: Grant
    Filed: August 15, 1990
    Date of Patent: July 6, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Kenji Itoh, Masaya Kadono, Naoki Hirose
  • Patent number: 5196366
    Abstract: A method of manufacturing electric devices is described. Discrete single crystals are formed on a substrate to be coated. The formation of these crystals is carried out by forming discrete crystallization centers in the surface of the substrate and growing a single crystal from each center. The spaces separating these crystals are filled with an insulating material in order not to form short current paths therein. The top surfaces of the crystals are exposed in order to make contact with an upper electrode.
    Type: Grant
    Filed: August 15, 1990
    Date of Patent: March 23, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Kenji Itoh, Masaya Kadono, Naoki Hirose
  • Patent number: 5185179
    Abstract: Carbonaceous films are coated on a surface by chemical vapor reation. In advance of the deposition of carbonaceous film, a silicon nitride film as coated on the surface to prevent interdiffusion between the carbonaceous film and the underlying surface.
    Type: Grant
    Filed: October 5, 1989
    Date of Patent: February 9, 1993
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Shigenori Hayashi, Noriya Ishida, Mari Sasaki, Junichi Takeyama, Kenji Itou, Masahiro Kojima, Masaya Kadono
  • Patent number: 5106452
    Abstract: A method of depositing high quality diamond films and a light emitting device are described. The deposition is carried out in a reaction chamber. After disposing a substrate to be coated in the chamber, a carbon compound gas including a C--OH bond is introduced together with hydrogen thereinto. Then, deposition of diamond takes place in a magnetic field by inputting microwave energy. The present invention is particularly characterized in that the volume ratio of the carbon compound to hydrogen introduced into the reaction chamber is 0.4 to 2; the pressure in said reaction chamber is 0.01 to 3 Torr; the temperature of the substrate is kept between 200.degree. to 1000.degree. C. during deposition; and the input energy of the microwave is no lower than 2 KW. By this method, uniform and high quality diamond films can be formed.
    Type: Grant
    Filed: May 15, 1990
    Date of Patent: April 21, 1992
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Masaya Kadono, Shunpei Yamazaki