Abstract: In an angular velocity sensor, driven mass portions are disposed on a surface of a base plate at point-symmetrical locations with respect to a central point O. The driven mass portions are connected to a coupling beam to be interconnected. The coupling beam is flexibly supported through connecting portions and driven beam. Detecting mass portions are disposed inside the driven mass portions, and the detecting mass portions are supported by detecting beams to be displaceable in the Z-axis direction. Two adjacent ones of the driven mass portions in the circumferential direction are vibrated by vibration generation portions in opposite phases to each other. When angular velocities are exerted in such a state, the detecting mass portions are caused to displace and vibrate in the direction of thickness of the base plate. Displacement detecting portions detect displacements of the detecting mass portions in the direction of the thickness.

Abstract: A left-handed filter of the present invention includes an interstage coupling element connected to a first capacitor and a ground, a second capacitor connected to the interstage coupling element, a third capacitor connected to the second capacitor, a first inductor connected to the connection point of a fourth capacitor and the second capacitor, and the ground, a second inductor connected to a fifth capacitor and the ground, a first input and output coupling element connected to a sixth capacitor, and a second input and output coupling element connected to the third capacitor. The first and second capacitors, the third and sixth capacitors, the first and second inductors, and third and fourth inductors are respectively arranged in symmetrical positions with respect to an interstage coupling element.

Abstract: The resonator includes first high-impedance wiring plate-like, arranged parallel to top-surface ground electrode; second high-impedance wiring plate-like, arranged so as to face first high-impedance wiring; first columnar conductor electrically connecting first high-impedance wiring to second high-impedance wiring; first low-impedance wiring arranged between first high-impedance wiring and second high-impedance wiring; second columnar conductor electrically connecting first high-impedance wiring to first low-impedance wiring; second low-impedance wiring arranged between first low-impedance wiring and second high-impedance wiring; and third columnar conductor electrically connecting second high-impedance wiring to second low-impedance wiring, to reduce the area size the resonator.

Abstract: A transmission line type resonator having a low-loss characteristic. In order to realize the low-loss characteristic, the transmission line type resonator in the present invention includes a laminate body formed of a plurality of dielectric sheets, a transmission line of complex right hand left hand system disposed between the plurality of dielectric sheets, and an external connection terminal disposed at the end face of the transmission line type resonator and connected with the transmission line of complex right hand left hand system.

Abstract: A composite filter downsized without degrading its characteristics is disclosed. The filter includes a surface acoustic wave filter and a LC filter coupled to the surface acoustic wave filter. The LC filter is formed by combining a ?-shaped LC filter formed of two capacitors and an inductor coupled together in a ?-shape with a capacitor coupled in parallel to the inductor. The two capacitors of the ?-shaped LC filter are placed on a piezoelectric substrate with their comb-shaped electrodes opposed to each other. This opposing direction differs from an opposing direction of comb-shaped electrodes of a surface acoustic wave resonator.

Abstract: An antenna switch module includes a filter which reduces transmission loss so as to achieve high attenuation in a wide band at harmonic frequencies. This antenna switch module includes the filter, an antenna switch circuit and an adjustment line. The filter passes fundamental frequencies and has an attenuation pole. The antenna switch circuit switches antennas. The adjustment line is connected between the filter and the antenna switch circuit. The adjustment line adjusts its length, and when the filter and the antenna switch circuit are directly connected with each other at a connection point, prevents the impedance when the filter is seen from the connection point and the impedance when the antenna switch circuit is seen from the connection point from becoming complex conjugates of each other at the harmonic frequencies.

Abstract: An antenna switch module includes a filter which reduces transmission loss so as to achieve high attenuation in a wide band at harmonic frequencies. This antenna switch module includes the filter, an antenna switch circuit and an adjustment line. The filter passes fundamental frequencies and has an attenuation pole. The antenna switch circuit switches antennas. The adjustment line is connected between the filter and the antenna switch circuit. The adjustment line adjusts its length, and when the filter and the antenna switch circuit are directly connected with each other at a connection point, prevents the impedance when the filter is seen from the connection point and the impedance when the antenna switch circuit is seen from the connection point from becoming complex conjugates of each other at the harmonic frequencies.

Abstract: A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam can be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ?E of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes.

Abstract: An electrostatic actuator includes a movable piece provided on a substrate via supporting beams such that the movable piece can be displaced in the Y-axial direction. The movable piece is displaced by an electrostatic force between movable and stationary electrodes to drive a mirror, so that an optical path of an optical device is switched over. The electrode plates of the movable electrode have lengths in the Y-axial direction which are stepwise decreased in order from the electrode plate nearest to the movable piece to the electrode plate farthest from the movable piece. Thus, the total overlapping length of the electrode plates of the stationary and movable electrodes is reduced to a minimum smallest value. Therefore, even if the sizes of the electrode plates are varied, the movable piece is prevented from being displaced and inclined due to electrostatic forces in the X-axial direction. Thus, the movable piece is stably operated.

Abstract: An optical switch device is capable of positioning an optical fiber in substantially perpendicular directions without using an additional member so as to improve the easiness in mounting the optical fiber. While a silicon substrate is bonded on the surface of a glass substrate, on the silicon substrate, a plurality of fiber-mounting grooves for mounting the optical fiber and an actuator including a mirror for switching an optical path between a plurality of the optical fibers. On an internal surface of the fiber-mounting groove, a fiber clamp is constructed for applying an obliquely inclined pushing force to the optical fiber. Thereby, the optical fiber is pushed with the fiber clamp toward the other internal surface as well as toward the glass substrate so as to position the optical fiber.

Abstract: A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam scan be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ?E of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes.

Abstract: A plane vibrator of an angular velocity sensor and a movable member of an acceleration sensor are provided in a spaced floating state on the same substrate. A lid is formed so as to cover and be spaced from the upper side of the plane vibrator and the movable member. A space defined by the substrate and the lid is sectioned into a angular velocity sensor space and an acceleration sensor space by use of a sectioning wall. The angular velocity sensor space is hermetically sealed to be in the vacuum state. The acceleration sensor space is hermetically sealed to be under atmospheric pressure. The plane vibrator is vibrated at a high frequency and a large amplitude so that the angular velocity detection sensitivity is enhanced. The movable member, even if vibration of the plane vibrator is transmitted thereto, is prevented from vibrating at a high frequency and a large amplitude, due to the damping effect of air. Thus, the acceleration detection sensitivity is enhanced.

Abstract: An electrostatic actuator includes a substrate upon which substantially U-shaped support beams are arranged such that a movable element is displaceable in the Y-axis direction. Then, the movable element is displaced from an initial position to a switching position by an electrostatic force between electrodes. When the movable element is at the initial position, the support beams are configured such that the arm portions of the support beams are not parallel to each other and, when the movable element is displaced by a large amount to the vicinity of the switching position, the arm portions are extended in the X-axis direction so as to be substantially parallel to each other. Thus, since the spring constant in the X-axis direction of the support beams is increased, transverse locational deviations when the movable element is displaced and short-circuiting by the deviations are prevented and, as a result, the movable element can be stably displaced by a large amount.

Abstract: An electrostatic actuator includes a movable piece provided on a substrate via supporting beams such that the movable piece can be displaced in the Y-axial direction. The movable piece is displaced by an electrostatic force between movable and stationary electrodes to drive a mirror, so that an optical path of an optical device is switched over. The electrode plates of the movable electrode have lengths in the Y-axial direction which are stepwise decreased in order from the electrode plate nearest to the movable piece to the electrode plate farthest from the movable piece. Thus, the total overlapping length of the electrode plates of the stationary and movable electrodes is reduced to a minimum smallest value. Therefore, even if the sizes of the electrode plates are varied, the movable piece is prevented from being displaced and inclined due to electrostatic forces in the X-axial direction. Thus, the movable piece is stably operated.

Abstract: An optical switch device is capable of positioning an optical fiber in substantially perpendicular directions without using an additional member so as to improve the easiness in mounting the optical fiber. While a silicon substrate is bonded on the surface of a glass substrate, on the silicon substrate, a plurality of fiber-mounting grooves for mounting the optical fiber and an actuator including a mirror for switching an optical path between a plurality of the optical fibers. On an internal surface of the fiber-mounting groove, a fiber clamp is constructed for applying an obliquely inclined pushing force to the optical fiber. Thereby, the optical fiber is pushed with the fiber clamp toward the other internal surface as well as toward the glass substrate so as to position the optical fiber.

Abstract: A plane vibrator of an angular velocity sensor and a movable member of an acceleration sensor are provided in a spaced floating state on the same substrate. A lid is formed so as to cover and be spaced from the upper side of the plane vibrator and the movable member. A space defined by the substrate and the lid is sectioned into a angular velocity sensor space and an acceleration sensor space by use of a sectioning wall. The angular velocity sensor space is hermetically sealed to be in the vacuum state. The acceleration sensor space is hermetically sealed to be under atmospheric pressure. The plane vibrator is vibrated at a high frequency and a large amplitude so that the angular velocity detection sensitivity is enhanced. The movable member, even if vibration of the plane vibrator is transmitted thereto, is prevented from vibrating at a high frequency and a large amplitude, due to the damping effect of air. Thus, the acceleration detection sensitivity is enhanced.