Patents by Inventor Masaya YASUKOCHI

Masaya YASUKOCHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck mechanism and charged particle beam apparatus
    Patent number: 9401297
    Abstract: Proposed are an electrostatic chuck mechanism and a charged particle beam apparatus including a first plane that is a plane of a side in which a sample is adsorbed, a first electrode to which a voltage for generating an adsorptive power between the first plane and the sample is applied, and a second electrode that is arranged in a position relatively separated from the sample toward the first plane and through which a virtual line that is perpendicular to the first plane and contacts an edge of the sample passes, wherein the first plane is formed so that a size in a plane direction of the first plane is smaller than that of the sample.
    Type: Grant
    Filed: February 19, 2015
    Date of Patent: July 26, 2016
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yasushi Ebizuka, Seiichiro Kanno, Masaya Yasukochi, Masakazu Takahashi, Naoya Ishigaki, Go Miya
  • Electrostatic Chuck Mechanism and Charged Particle Beam Apparatus
    Publication number: 20150262857
    Abstract: Proposed are an electrostatic chuck mechanism and a charged particle beam apparatus including a first plane that is a plane of a side in which a sample is adsorbed, a first electrode to which a voltage for generating an adsorptive power between the first plane and the sample is applied, and a second electrode that is arranged in a position relatively separated from the sample toward the first plane and through which a virtual line that is perpendicular to the first plane and contacts an edge of the sample passes, wherein the first plane is formed so that a size in a plane direction of the first plane is smaller than that of the sample.
    Type: Application
    Filed: February 19, 2015
    Publication date: September 17, 2015
    Inventors: Yasushi EBIZUKA, Seiichiro KANNO, Masaya YASUKOCHI, Masakazu TAKAHASHI, Naoya ISHIGAKI, Go MIYA