Abstract: Provided is a robot system that can accurately sense contact between an arm of a robot or an instrument attached to the arm and another object.

Abstract: Provided is a robot system that can accurately sense contact between an arm of a robot or an instrument attached to the arm and another object.

Abstract: A vapor deposition method is provided that can form a highly uniform epitaxial layer even under different growth conditions. The vapor deposition method uses an apparatus including the process chamber, a flow channel for supplying the reactant gas onto the substrate and discharging the reactant gas, a substrate holding portion holding the substrate, moving means for relatively moving the substrate holding portion and the flow channel, control means for controlling the moving means, and heating means for heating the substrate. Based on a set growth condition as well as the stored positional data, the control means performs control of the position of the substrate holding portion or the position of the flow channel to decrease a change in relative positions of the flow channel and the substrate.

Abstract: A sputtering apparatus for forming a sputtered film on a substrate held on a substrate holder in a vacuum chamber includes a target, a deposition preventing plate provided between the target and the substrate holder, a substrate holder carrying mechanism, and a moving mechanism for moving the substrate holder carrying mechanism to change a distance between the substrate and the deposition preventing plate.

Abstract: A sputtering apparatus for forming a sputtered film on a substrate held on a substrate holder in a vacuum chamber includes a target, a deposition preventing plate provided between the target and the substrate holder, a substrate holder carrying mechanism, and a moving mechanism for moving the substrate holder carrying mechanism to change a distance between the substrate and the deposition preventing plate.

Abstract: An optical disc having a recording film formed on one surface of a plastics substrate transparent to light, a first protection film formed on the recording film, a moisture proof film formed on the other surface of the substrate, and a second protection film formed on the moisture proof film.

Abstract: An objective lens driving apparatus includes a base, an objective lens for converging an optical beam on an optical disc while the optical disc is rotating, and a holding member for holding the objective lens. A first supporting mechanism elastically supports the holding member on the base in such a manner as to allow the holding member to be translated in a focusing direction which is substantially perpendicular to a surface of the optical disc and in a tracking direction which is substantially perpendicular to the focusing direction and parallel to a radial direction of the optical disc. A moving mechanism including a coil and a magnetic circuit for translates the holding member in the focusing direction and the tracking direction by a driving force generated by the coil and the magnetic circuit. A second supporting mechanism for visco-elastically supports the magnetic circuit on the base in such a manner as to translate the magnetic circuit in the focusing direction.

Abstract: An objective-lens driving device has a supporting mechanism for supporting a magnetic circuit so as to allow it to freely make a pseudo-translational motion in the focusing direction. The supporting mechanism is provided with two hinges that are placed in such directions as to make a right angle with each other. The hinges are fixed onto the same plane of a base member at respective ends thereof that are farther from each other, and they are also fixed to the magnetic circuit at respective ends thereof that are closer to each other. Moreover, each hinge has flexible sections that are formed in at least two locations of each hinge with predetermined intervals from the magnetic circuit so that they are in parallel with each other. These flexible sections are formed in such a manner that they make a right angle with each other on the two hinges. This supporting mechanism, which has the hinges that are placed on the same plane, makes it possible to reduce a space taken in the focusing direction to a great degree.

Abstract: An objective lens driving apparatus includes a base, an objective lens for converging an optical beam on an optical disc while the optical disc is rotating, and a holding member for holding the objective lens. A first supporting mechanism elastically supports the holding member on the base in such a manner as to allow the holding member to be translated in a focusing direction which is substantially perpendicular to a surface of the optical disc and in a tracking direction which is substantially perpendicular to the focusing direction and parallel to a radial direction of the optical disc. A moving mechanism including a coil and a magnetic circuit translates the holding member in the focusing direction and the tracking direction by a driving force generated by the coil and the magnetic circuit. A second supporting mechanism visco-elastically supports the magnetic circuit on the base in such a manner as to translate the magnetic circuit in the focusing direction.

Abstract: An optical disk including a transparent plastic substrate, a recording film formed on an one side surface of said substrate, a first protective film covering said recording film, and a moisture-impermeable film formed on the other side surface of said substrate via or not via an intermediate film.