Abstract: A sensor module includes: a first substrate; a second substrate; a coupling portion that electrically couples the first substrate and the second substrate; a first sensor device provided on the first substrate and configured to detect a physical quantity of a first axis; a second sensor device provided on the first substrate, configured to detect the physical quantity of the first axis, and having a drive frequency different from that of the first sensor device; a third sensor device provided on the second substrate and configured to detect a physical quantity of a second axis; and a fourth sensor device provided on the second substrate and configured to detect the physical quantity of the second axis.

Abstract: A sensor module includes: a substrate having a first surface and a second surface that are in a front-back relationship with each other, and side surfaces including a first side surface; a first relay substrate having a first front surface and a first back surface and mounted on the first side surface with the first back surface facing the first side surface, the first front surface and the first back surface being in a front-back relationship with each other; and a first inertial sensor including a first package mounted on the first front surface of the first relay substrate and a first sensor element housed in the first package.

Abstract: An inertial sensor module includes a first inertial sensor that detects a physical quantity of a first axis; a second inertial sensor that detects the physical quantity of the first axis; a first substrate on which the first inertial sensor and the second inertial sensor are mounted; and a second substrate on which the first substrate is mounted and which includes a first terminal electrically coupled to the first inertial sensor via the first substrate and a second terminal electrically coupled to the second inertial sensor via the first substrate.

Abstract: An inertial sensor module includes a first inertial sensor that detects a physical quantity of a first axis, a second inertial sensor that detects the physical quantity of the first axis, a substrate includes a first region in which the first inertial sensor and the second inertial sensor are mounted, a second region surrounding the first region, and a plurality of slits provided between the first region and the second region to surround the first region.

Abstract: An inertial sensor module includes: a first inertial sensor having a first axis as a detection axis; and a second inertial sensor having the first axis, a second axis, and a third axis as detection axes, in which the first inertial sensor and the second inertial sensor are separated from each other, and detection accuracy of the first inertial sensor is higher than detection accuracy of the second inertial sensor.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: A sensor module includes: a substrate including a first terminal and a second terminal; a first conductive bonding member having a first melting point and a first Young's modulus; a lead bonded to the first terminal by the first conductive bonding member; a second conductive bonding member having a second melting point lower than the first melting point and a second Young's modulus higher than the first Young's modulus; and an inertial sensor bonded to the second terminal by the second conductive bonding member.

Abstract: A sensor module includes: a printed circuit board having a first recessed portion formed at a first side, a second recessed portion formed at a second side facing the first side, a third recessed portion formed at a third side, and a fourth recessed portion formed at a fourth side facing the third side; a metal cap including convex portions each bonded to a respective one of the first to fourth recessed portions; and a first inertial sensor and a second inertial sensor that are provided at a main surface of the printed circuit board. The first inertial sensor and the second inertial sensor are disposed outside a region surrounded by a line connecting both ends of the first recessed portion and the second recessed portion and outside a region surrounded by a line connecting both ends of the third recessed portion and the fourth recessed portion.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: An inertial measurement unit includes a sensor module including at least one inertial sensor and a printed substrate on which the inertia sensor is provided, and a lead group provided as a support member for supporting the printed substrate on an attachment surface, and leads of the lead group each have a first section coupled to the attachment surface, a second section extending from the first section toward the printed substrate in a direction that intersects the attachment surface, and a third section coupled to the printed substrate.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: An inertial measurement device includes: a first inertial sensor; a first inertial sensor module in which the first inertial sensor is stored in a first package made of resin; a base having a concave portion and made of ceramic; and a lid body. The first inertial sensor module is accommodated in an accommodation space between the base and the lid body and is hermetically sealed.

Abstract: An inertial sensor module includes: a first inertial sensor having a first axis as a detection axis; and a second inertial sensor having the first axis, a second axis, and a third axis as detection axes, in which the first inertial sensor and the second inertial sensor are separated from each other, and detection accuracy of the first inertial sensor is higher than detection accuracy of the second inertial sensor.

Abstract: A sensor module includes: a substrate including a first terminal and a second terminal; a first conductive bonding member having a first melting point and a first Young's modulus; a lead bonded to the first terminal by the first conductive bonding member; a second conductive bonding member having a second melting point lower than the first melting point and a second Young's modulus higher than the first Young's modulus; and an inertial sensor bonded to the second terminal by the second conductive bonding member.

Abstract: A sensor module includes: a printed circuit board having a first recessed portion formed at a first side, a second recessed portion formed at a second side facing the first side, a third recessed portion formed at a third side, and a fourth recessed portion formed at a fourth side facing the third side; a metal cap including convex portions each bonded to a respective one of the first to fourth recessed portions; and a first inertial sensor and a second inertial sensor that are provided at a main surface of the printed circuit board. The first inertial sensor and the second inertial sensor are disposed outside a region surrounded by a line connecting both ends of the first recessed portion and the second recessed portion and outside a region surrounded by a line connecting both ends of the third recessed portion and the fourth recessed portion.

Abstract: An inertial measurement unit includes: a substrate including a first surface and a second surface orthogonal to a Z-axis and having a front-back relationship with each other; an inertial sensor installed at the first surface of the substrate; a semiconductor device installed at the second surface of the substrate and electrically coupled to the inertial sensor; and a plurality of lead terminals coupled to the substrate and configured to support the substrate to a mounting target surface. The plurality of lead terminals have a first part coupled to the substrate, a second part mounted at the mounting target surface, and a third part located between the first part and the second part and extending in a direction having a component along the Z-axis. The semiconductor device is exposed from between the plurality of lead terminals, as viewed in a plan view from a direction orthogonal to the Z-axis.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: A sensor device includes a mounting member having fixation surfaces inside, and at least one electronic component directly or indirectly fixed to the fixation surfaces of the mounting member, and the mounting member constitutes a part of a casing for housing the electronic component. Further, the fixation surfaces are perpendicular to each other.

Abstract: A sensor unit with high reliability and stable detection accuracy against vibrations of an installation target object is to be provided. A sensor unit includes: a sensor module configured including a substrate with inertial sensors mounted thereon, and an inner case in which the substrate is installed; and an outer case accommodating the sensor module. A recessed part is formed in the inner case. The inertial sensors are arranged in an area overlapping with the recessed part as viewed in a plan view seen from the direction of thickness of the substrate, and a filling member is provided to fill a space formed by the substrate and the recessed part. The sensor module is joined to a bottom wall of the outer case via a joining member.