Abstract: A bellows pump having a pump body including a suction path and a discharge path for a fluid and a bellows which is placed in a state where a basal end flange is airtightly fixed to the pump body to form a pump chamber with respect to the pump body. The bellows pump further comprises an actuation plate which is attached to a head portion of the bellows so as to cause the bellows to expand and contract with respect to the pump body. The bellows is further configured so that an airtight space is formed with between the actuation plate and a cup shape section formed in the head portion, such that a pressure rise can be absorbed and relaxed by contraction of the space portion caused by elastic film deformation of the thin head portion which faces the space portion.

Abstract: A bellows pump which is further improved so that, without causing performance reduction and increases of the installation place and the cost, shock vibration which is generated in the timing of switching between suction and discharge can be suppressed is provided.

Abstract: A connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved is provided. When an integration panel 1 and a valve 2 are to be communicatingly connected to each other in a sealed state through single circular pipe-like fluid passages 3, 7 by using an annular gasket G, an annular projection 11 and outer and inner tapered peripheral faces 12a, 13a are formed in first and second fluid supply/discharge port portions 1A, 2A, and the gasket G is configured by a fluororesin having a pair of annular grooves 51, 51 and tapered peripheral faces 52a, 53a. The integration panel 1 and the valve 2 are attracted to each other, thereby configuring a joined state where a sealing portion S1 is formed by fitting the annular projection 11 to the annular groove 51 to press contact the tapered peripheral faces 12a, 13a, 52a, 53a with each other.

Abstract: A fluid device and a fitting are connected so that fluid supply/discharge passage in the fluid device, and a fluid passage in the fitting are in communication with each other. A functional component, which allows a fluid flowing between the fluid device and the fitting to pass there though and which exerts an action on the fluid, is interposed and sealed between the fluid device and the fitting. An annular groove and an annular projection are fitted to each other and are formed in the fluid device and the fitting, respectively.

Abstract: A connecting structure for an integration panel and a fluid device which, in order to promote integration of fluid pipes, can be further compactified is provided. In a concentric double flow path type connecting structure, an integration panel 1 and a valve 2 are connected to each other in a sealed state via inner and outer annular gaskets G1, G2 while pipe-like fluid passages 3a, 7 and annular fluid passages 4a, 8 are concentrically arranged. Annular projections 11, 21, 31, 41 are formed on fluid supply/discharge port portions 1A, 2A made of a fluororesin, and annular grooves 51, 61 are formed in the gaskets G1, G2 made of a fluororesin. A joined state where the annular projections and the annular grooves are fitted to each other to form a fitting sealing portion 10 is held by holding means I for attracting together the fluid supply/discharge port portions 1A, 2A and maintaining the attraction.

Abstract: A connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved is provided. When an integration panel 1 and a valve 2 are to be communicatingly connected to each other in a sealed state through single circular pipe-like fluid passages 3, 7 by using an annular gasket G, an annular projection 11 and outer and inner tapered peripheral faces 12a, 13a are formed in first and second fluid supply/discharge port portions 1A, 2A, and the gasket G is configured by a fluororesin having a pair of annular grooves 51, 51 and tapered peripheral faces 52a, 53a. The integration panel 1 and the valve 2 are attracted to each other, thereby configuring a joined state where a sealing portion S1 is formed by fitting the annular projection 11 to the annular groove 51 to press contact the tapered peripheral faces 12a, 13a, 52a, 53a with each other.

Abstract: A connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved is provided. When an integration panel 1 and a valve 2 are to be communicatingly connected to each other in a sealed state through single circular pipe-like fluid passages 3, 7 by using an annular gasket G, annular projections 11, 21 are formed in first and second fluid supply/discharge port portions 1A, 2A, the gasket G is configured by a fluororesin having a pair of annular grooves 51, 51 which are formed in an outer-diameter portion of a fluid path W to be fitted to the annular projections 11, 21, respectively, and holding means I for holding a joined state is equipped.

Abstract: The present invention relates to a connecting structure between a fluid device and a joint in which a peripheral portion of a fluid supply/discharge passage in a fluid device, and a fluid joint are fittingly coupled to each other, whereby a functional component which allows a fluid flowing between the fluid device and the joint to pass through the functional component, and which exerts an action on the fluid is interposed between the peripheral portion and the joint in a state where the functional component is sealed both by the peripheral portion and the joint, and an annular groove and annular projection which are fitted to each other to constitute a sealing portion in a state where the fluid device and the joint are fittingly coupled to each other are formed in the fluid device and the joint, respectively.

Abstract: A connecting structure for an integration panel and a fluid device in which an excellent sealing property can be held even when substantially no further fastening is performed, and the assembling workability is improved is provided. Therefore, an integration panel 1 and a valve 2 are communicatingly connected to each other by using an annular gasket G in a state where circular pipe-like fluid passages 16, 19 are sealed. Annular projections 11, 21 are formed on first and second fluid supply/discharge port portions 1A, 2A. The gasket G is a fluororesin-made gasket having a pair of annular grooves 51, 51 which are formed on an outer diameter-side portion of a fluid path W so as to be fitted with the annular projections 11, 21, respectively.

Abstract: In order to seal-connect a first fluid supply/discharge port portion 1A of a first fluid device 1 having a pipe-like fluid passage 3 and an annular fluid passage 4 with a second fluid supply/discharge port portion 2A of a second fluid device 2 having a pipe-like fluid passage 7 and an annular fluid passage 8, while the passages 3, 4, 7, 8 are mutually correspond to one another, a fluid gasket has first and second ring-like gasket portions G1, G2. In the gasket portions G1, G2, first sealing portions g12, g22 which abut against the first fluid supply/discharge port portion 1A, second sealing portions g11, g21 which abut against the second fluid supply/discharge port portion 2A, and fluid paths w1, w2 through which the passages 3, 4 and the passages 7, 8 communicate with each other. A bridge portion B is placed so as to traverse the fluid path w2, thereby connecting and integrating the first and second ring-like gasket portions G1, G2 with each other.

Abstract: A bellows that is extendingly and contractingly deformable in the axial direction is placed in a pump body and forms a liquid chamber inside the bellows. A suction portion and a discharge portion are formed in an inner bottom face of the pump body facing the liquid chamber. Liquid is sucked from the suction port into the liquid chamber by extension of the bellows, and the liquid in the liquid chamber is discharged from the discharge portion by contraction of the bellows. The extending and contracting portion of the bellows which is configured by forming ridge-like folds and valley-like folds in a vertically alternate and continuous manner is formed into a shape in which the lower one of upper and lower lamella portions of each of the ridge-like folds, or the lower lamella portion is inclined downwardly toward the axis defining the axial direction, not only in an extending state but also in a contracting state.

Abstract: The present invention provides a check valve in which correct sealing performance can be always ensured. In the check valve, a valve element 1 and a compression coil spring 2 which urges the valve element 1 in the valve closing direction are integrally molded by a synthetic resin material.

Abstract: The invention provides a pump with a pulsation suppression device which can further enhance the effect of suppressing pulsation. According to the invention, in one side portion of a pump head wall 1 having inflow and outflow passages 2 and 3, a first bellows 7 which is driven so as to extend and contract by an air cylinder portion 14, and check valves 16a and 16b which alternately open and close a pump working chamber 9a formed in the first bellows 7 are disposed to constitute a reciprocal pump portion 4. In the other side portion of the pump head wall 1, a pulsation suppressing portion 5 is configured so as to have a second bellows 18 that is extendable and contractible, and that forms: a liquid chamber 20a which can temporarily store liquid that is to be discharged from the pump portion 4; and an air chamber 20b which is isolated from the liquid chamber 20a.

Abstract: The present invention provides a check valve in which correct sealing performance can be always ensured. In the check valve, a valve element 1 and a compression coil spring 2 which urges the valve element 1 in the valve closing direction are integrally molded by a synthetic resin material.

Abstract: The present invention relates to a pulsation suppression device which is interposingly used in a liquid transporting pipe through which a chemical liquid such as a surface washing liquid for washing an IC is transported by a reciprocal pump. The pulsation suppression device of the present invention has: a bellows which partitions the interior of the device body having a sealed container-like shape, into a liquid chamber and an gas chamber; an operating rod which is reciprocated in interlock relationship with the bellows; and an extension and contraction restricting mechanism which, when the bellows extends to a predetermined value, is contacted in parallel with a closed end face of the bellows, thereby restricting further extension of the bellows. Furthermore, the pulsation suppression device of the present invention has a guide for making the reciprocal operation of the operating rod coincident with the extension and contraction directions of the bellows. The guide is made of a low-friction resin material.